Metal Oxide Film and Semiconductor Device

ABSTRACT

A metal oxide film includes indium, , ( is Al, Ga, Y, or Sn), and zinc and includes a region where a peak having a diffraction intensity derived from a crystal structure is observed by X-ray diffraction in the direction perpendicular to the film surface. Moreover, a plurality of crystal parts is observed in a transmission electron microscope image in the direction perpendicular to the film surface. The proportion of a region other than the crystal parts is higher than or equal to 20% and lower than or equal to 60%.

This application is a continuation of copending U.S. application Ser.No. 15/391,186, filed on Dec. 27, 2016 which is incorporated herein byreference.

TECHNICAL FIELD

One embodiment of the present invention relates to a metal oxide filmand a method for forming the metal oxide film. One embodiment of thepresent invention relates to a semiconductor device including a metaloxide film.

In this specification or the like, a semiconductor device means alltypes of devices that can function by utilizing semiconductorcharacteristics, and a transistor, a semiconductor circuit, and the likeare embodiments of semiconductor devices. An arithmetic device, a memorydevice, an imaging device, an electro-optical device, a power generationdevice (e.g., a thin film solar cell and an organic thin film solarcell), and an electronic appliance each may include a semiconductordevice.

BACKGROUND ART

An oxide semiconductor has attracted attention as a semiconductormaterial applicable to the transistor. For example, Patent Document 1discloses a semiconductor device achieving high field-effect mobility(simply referred to as mobility or FE in some cases) with such astructure that a plurality of oxide semiconductor layers are stacked,the oxide semiconductor layers functioning as a channel in the pluralityof oxide semiconductor layers contains indium and gallium, and theproportion of indium is higher than the proportion of gallium.

Non-Patent Document 1 discloses that an oxide semiconductor containingindium, gallium, and zinc has a homologous series represented byIn_(1−x)Ga_(1+x)O₃(ZnO)_(m) (x is a number which satisfies −1≤x≤1, and mis a natural number). Furthermore, Non-Patent Document 1 discloses asolid solution range of a homologous series. For example, in the case ofa solid solution range of a homologous series when m is 1, x is within arange from −0.33 to 0.08, and in the case of a solid solution range of ahomologous series when m is 2, x is within a range from −0.68 to 0.32.

REFERENCE Patent Document

-   [Patent Document 1] Japanese Published Patent Application No.    2014-007339

Non-Patent Document

-   [Non-Patent Document 1]-   M. Nakamura, N. Kimizuka, and T. Mohri, “The Phase Relations in the    In₂O₃—Ga₂ZnO₄—ZnO System at 1350° C.,” J. Solid State Chem., 1991,    Vol. 93, pp. 298-315.

DISCLOSURE OF INVENTION

One object of one embodiment of the present invention is to provide ametal oxide film including a crystal part. Another object is to providea metal oxide film having highly stable physical properties. Anotherobject is to provide a metal oxide film with improved electricalcharacteristics. Another object is to provide a metal oxide film withwhich field-effect mobility can be increased. Another object is toprovide a novel metal oxide film. Another object is to provide a highlyreliable semiconductor device including a metal oxide film.

Another object of one embodiment of the present invention is to providea metal oxide film having highly stable physical properties which can beformed at low temperatures. Another object is to provide a highlyreliable semiconductor device which can be formed at low temperature.

Another object of one embodiment of the present invention is to providea flexible power storage device with use of a metal oxide film.

Note that the descriptions of these objects do not disturb the existenceof other objects. In one embodiment of the present invention, there isno need to achieve all the objects. Note that other objects can bederived from the description of the specification, the drawings, theclaims, and the like.

One embodiment of the present invention is a metal oxide film includingindium,

, (

is Al, Ga, Y, or Sn), and zinc. The metal oxide film also includes aregion where a peak having a diffraction intensity derived from acrystal structure is observed by X-ray diffraction in the directionperpendicular to the film surface. In addition, a plurality of crystalparts is observed in a transmission electron microscope image in thedirection perpendicular to the film surface. The proportion of a regionother than the crystal parts is more than or equal to 20% and less thanor equal to 60% or more than or equal to 25% and less than 100%.

It is preferable that the plurality of crystal parts have a higherproportion of crystal parts in which c-axes are aligned in the thicknessdirection than crystal parts aligned in other directions.

A first image is an image obtained by subjecting a cross-sectional TEMimage to fast Fourier transform. The first image is subjected to masktreatment by which only a periodic region remains and then to inversefast Fourier transform, whereby a second image is obtained. Here, theproportion of the remaining area subtracted from the original image ispreferably more than or equal to 20% and less than 60%, or more than orequal to 25% and less than 100%.

When electron diffraction with a probe diameter of 50 nm or more isperformed on a slice of the metal oxide film having a thickness ofgreater than or equal to 10 nm and less than or equal to 50 nm in thedirection perpendicular to its cross section, a first electrondiffraction pattern that includes a ring-like diffraction pattern andtwo first spots overlapping with the ring-like diffraction pattern ispreferably observed. In addition, when electron diffraction with a probediameter of greater than or equal to 0.3 nm and less than or equal to 5nm is performed thereon, a second electron diffraction pattern thatincludes the first spots and a plurality of second spots distributed inthe circumferential direction is preferably observed.

The two first spots are preferably symmetric with respect to the center.The angle formed by a first straight line and the direction of a normalvector of the film surface is preferably more than or equal to 0° andless than or equal to 10°. The first straight line passes through thecenter and a point at which the luminance of the first spots is thehighest.

In the first electron diffraction pattern, the luminance of thering-like diffraction pattern is preferably lower than that of the firstspots at a point of intersection of the ring-like pattern and a secondstraight line that intersects with the first straight line.

The luminance of the first spots is preferably greater than 1 time andless than or equal to 9 times the luminance of the ring-like diffractionpattern at the point of intersection of the ring-like pattern and thesecond straight line.

One embodiment of the present invention is a metal oxide film includingindium,

, (

is Al, Ga, Y, or Sn), and zinc. The metal oxide film also includes aregion where a peak having a diffraction intensity derived from acrystal structure is observed by X-ray diffraction in the directionperpendicular to the film surface. When electron diffraction with aprobe diameter of 50 nm or more is performed on a slice of the metaloxide film having a thickness of greater than or equal to 10 nm and lessthan or equal to 50 nm in the direction perpendicular to its crosssection, a first electron diffraction pattern that includes a ring-likediffraction pattern and two first spots overlapping with the ring-likediffraction pattern is observed. In addition, when electron diffractionwith a probe diameter of greater than or equal to 0.3 nm and less thanor equal to 5 nm is performed thereon, a second electron diffractionpattern that includes the first spots and a plurality of second spotsdistributed in the circumferential direction is observed.

In addition, the first spots are preferably distributed in thecircumferential direction. The angle formed by two straight linespassing through an end portion of the spot in a circumferentialdirection and the center of the electron diffraction pattern ispreferably less than or equal to 45°.

Another embodiment of the present invention is a semiconductor deviceincluding a semiconductor layer, a gate insulating layer, and a gate.The semiconductor layer is characterized by including theabove-described metal oxide film.

One embodiment of the present invention can provide a metal oxide filmincluding a crystal part. One embodiment of the present invention canprovide a metal oxide film having highly stable physical properties. Oneembodiment of the present invention can provide a novel metal oxidefilm. One embodiment of the present invention can provide a highlyreliable semiconductor device to which a metal oxide film is employed.

One embodiment of the present invention can provide a metal oxide filmhaving highly stable physical properties which can be formed at lowtemperature. One embodiment of the present invention can provide ahighly reliable semiconductor device which can be formed at lowtemperature.

One embodiment of the present invention can provide a flexible device towhich a metal oxide film is employed.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1C show the results of XRD measurement of metal oxide films.

FIGS. 2A to 2C are cross-sectional observation images of metal oxidefilms.

FIGS. 3A and 3B are electron diffraction patterns of a metal oxide film.

FIGS. 4A to 4D are electron diffraction patterns of metal oxide films.

FIG. 5 is an electron diffraction pattern of a metal oxide film.

FIGS. 6A and 6B are electron diffraction patterns of metal oxide films.

FIGS. 7A1 to 7D2 are electron diffraction patterns and luminanceprofiles of metal oxide films.

FIG. 8 shows relative luminance estimated from electron diffractionpatterns of metal oxide films.

FIGS. 9A to 9C are electron diffraction patterns of metal oxide films.

FIG. 10 shows the results of variation in orientation of crystal partsin metal oxide films.

FIGS. 11A to 11D are cross-sectional observation images of metal oxidefilms and cross-sectional observation images obtained through analysisthereof.

FIGS. 12A and 12B illustrate electrical characteristics of transistors.

FIGS. 13A to 13C show TDS measurement results of metal oxide films.

FIG. 14 shows SIMS measurement results of metal oxide films.

FIGS. 15A to 15C are model diagrams used for calculation of movement ofexcessive oxygen.

FIGS. 16A to 16C are model diagrams used for calculation of movement ofexcess oxygen.

FIGS. 17A to 17C are model diagrams used for calculation of movement ofexcess oxygen.

FIGS. 18A to 18C are model diagrams used for calculation of movement ofexcess oxygen.

FIG. 19 shows calculation results for demonstrating the movementeasiness of excess oxygen.

FIGS. 20A to 20C are model diagrams used for calculation of movement ofan oxygen vacancy.

FIGS. 21A to 21C are model diagrams used for calculation of movement ofan oxygen vacancy.

FIG. 22 shows calculation results for demonstrating the movementeasiness of an oxygen vacancy.

FIG. 23 shows ESR measurement results of metal oxide films.

FIGS. 24A and 24B show CPM measurement results of metal oxide films.

FIG. 25 shows Id−Vg characteristics of transistors.

FIG. 26 shows Id−Vg characteristics of transistors.

FIG. 27 shows the density of interface states.

FIGS. 28A and 28B show Id−Vg characteristics of transistors.

FIGS. 29A and 29B show calculation results for defect states oftransistors and electrical characteristics of transistors.

FIGS. 30A to 30 F show electrical characteristics of transistors.

FIGS. 31A to 31C each illustrate the range of an atomic ratio of anoxide semiconductor film.

FIG. 32 illustrates an In

ZnO₄ crystal.

FIG. 33 illustrates an energy band of a transistor in which an oxidesemiconductor film is used for its channel region.

FIGS. 34A to 34C are a top view and cross-sectional views illustrating asemiconductor device.

FIGS. 35A to 35C are a top view and cross-sectional views illustrating asemiconductor device.

FIGS. 36A and 36B are cross-sectional views illustrating a semiconductordevice.

FIGS. 37A and 37B are cross-sectional views illustrating a semiconductordevice.

FIGS. 38A and 38B are cross-sectional views illustrating a semiconductordevice.

FIGS. 39A and 39B are cross-sectional views illustrating a semiconductordevice.

FIGS. 40A and 40B are cross-sectional views illustrating a semiconductordevice.

FIGS. 41A and 41B are cross-sectional views illustrating a semiconductordevice.

FIGS. 42A and 42B are cross-sectional views illustrating a semiconductordevice.

FIGS. 43A and 43B are cross-sectional views illustrating a semiconductordevice.

FIGS. 44A and 44B are cross-sectional views illustrating a semiconductordevice.

FIGS. 45A to 45C are band diagrams.

FIGS. 46A to 46C are a top view and cross-sectional views illustrating asemiconductor device.

FIGS. 47A to 47C are a top view and cross-sectional views illustrating asemiconductor device.

FIGS. 48A to 48C are a top view and cross-sectional views illustrating asemiconductor device.

FIGS. 49A to 49C are a top view and cross-sectional views illustrating asemiconductor device.

FIGS. 50A and 50B are cross-sectional views illustrating a semiconductordevice.

FIGS. 51A and 51B are cross-sectional views illustrating a semiconductordevice.

FIGS. 52A to 52C are a top view and cross-sectional views illustrating asemiconductor device.

FIG. 53 is a cross-sectional view illustrating a semiconductor device.

FIG. 54 is a cross-sectional view illustrating a semiconductor device.

FIG. 55 is a cross-sectional view illustrating a semiconductor device.

FIG. 56 is a top view illustrating one embodiment of a display device.

FIG. 57 is a cross-sectional view of one embodiment of a display device.

FIG. 58 is a cross-sectional view of one embodiment of a display device.

FIG. 59 is a cross-sectional view of one embodiment of a display device.

FIGS. 60A to 60D are cross-sectional views illustrating a method forforming an EL layer.

FIG. 61 is a conceptual diagram illustrating a droplet dischargeapparatus.

FIG. 62 is a cross-sectional view of one embodiment of a display device.

FIG. 63 is a cross-sectional view of one embodiment of a display device.

FIGS. 64A to 64C are a top view and cross-sectional views illustrating asemiconductor device.

FIG. 65 is a cross-sectional view illustrating a semiconductor device.

FIGS. 66A to 66C are a block diagram and circuit diagrams illustrating adisplay device.

FIGS. 67A to 67C are circuit diagrams and a timing chart for describingone embodiment of the present invention.

FIGS. 68A to 68C are a graph and circuit diagrams illustrating oneembodiment of the present invention.

FIGS. 69A and 69B are a circuit diagram and a timing chart illustratingone embodiment of the present invention.

FIGS. 70A and 70B are a circuit diagram and a timing chart illustratingone embodiment of the present invention.

FIGS. 71A to 71E are a block diagram, circuit diagrams, and a waveformdiagrams illustrating one embodiment of the present invention.

FIGS. 72A and 72B are a circuit diagram and a timing chart illustratingone embodiment of the present invention.

FIGS. 73A and 73B are circuit diagrams each illustrating one embodimentof the present invention.

FIGS. 74A to 74C are circuit diagrams each illustrating one embodimentof the present invention.

FIG. 75 illustrates a display module.

FIGS. 76A to 76E illustrate electronic devices.

FIGS. 77A to 77G illustrate electronic devices.

FIGS. 78A and 78B are perspective views illustrating a display device.

BEST MODE FOR CARRYING OUT THE INVENTION

Embodiments will be described in detail with reference to the drawings.Note that the present invention is not limited to the followingdescription. It will be readily appreciated by those skilled in the artthat modes and details of the present invention can be modified invarious ways without departing from the spirit and scope of the presentinvention. Thus, the present invention should not be construed as beinglimited to the description in the following embodiments.

Note that in structures of the present invention described below, thesame portions or portions having similar functions are denoted by thesame reference numerals in different drawings, and a description thereofis not repeated. Further, the same hatching pattern is applied toportions having similar functions, and the portions are not especiallydenoted by reference numerals in some cases.

Note that in each drawing described in this specification, the size, thelayer thickness, or the region of each component is exaggerated forclarity in some cases. Therefore, the size, the layer thickness, or theregion is not limited to the illustrated scale.

Note that in this specification and the like, ordinal numbers such as“first,” “second,” and the like are used in order to avoid confusionamong components and do not limit the number.

A transistor is a kind of semiconductor elements and can achieveamplification of current or voltage, switching operation for controllingconduction or non-conduction, or the like. A transistor in thisspecification includes an insulated-gate field effect transistor (IGFET)and a thin film transistor (TFT).

Functions of a “source” and a “drain” are sometimes replaced with eachother when a transistor of opposite polarity is used or when thedirection of current flowing is changed in circuit operation, forexample. Therefore, the terms “source” and “drain” can be replaced witheach other in this specification.

In this specification and the like, a metal oxide means an oxide ofmetal in a broad sense. Metal oxides are classified into an oxideinsulator, an oxide conductor (including a transparent oxide conductor),an oxide semiconductor (also simply referred to as an OS), and the like.For example, a metal oxide used in an active layer of a transistor isreferred to as an oxide semiconductor in some cases. In other words, anOS FET is a transistor including a metal oxide or an oxidesemiconductor.

In this specification and the like, a metal oxide including nitrogen isalso referred a metal oxide in some cases. Furthermore, a metal oxideincluding nitrogen may be referred to as a metal oxynitride.

In this specification and the like, “c-axis aligned crystal (CAAC)” or“cloud-aligned composite (CAC)” may be stated in some cases. CAAC refersto an example of a crystal structure, and CAC refers to an example of afunction or a material composition.

In this specification and the like, CAC-OS or CAC-metal oxide has afunction of a conductor in a part of the material and has a function ofa dielectric (or insulator) in another part of the material; as a whole,CAC-OS or CAC-metal oxide has a function of a semiconductor. In the casewhere CAC-OS or CAC-metal oxide is used in an active layer of atransistor, the conductor has a function of letting electrons (or holes)serving as carriers flow, and the dielectric has a function of notletting electrons serving as carriers flow. By the complementary actionof the function as a conductor and the function as a dielectric, CAC-OSor CAC-metal oxide can have a switching function (on/off function). Inthe CAC-OS or CAC-metal oxide, separation of the functions can maximizeeach function.

In this specification and the like, CAC-OS or CAC-metal oxide includesconductor regions and dielectric regions. The conductor regions have theabove-described function of the conductor, and the dielectric regionshave the above-described function of the dielectric. In some cases, theconductor regions and the dielectric regions in the material areseparated at the nanoparticle level. In some cases, the conductorregions and the dielectric regions are unevenly distributed in thematerial. When observed, the conductor regions are coupled in acloud-like manner with their boundaries blurred, in some cases.

In other words, CAC-OS or CAC-metal oxide can be referred to as a matrixcomposite or a metal matrix composite.

Furthermore, in the CAC-OS or CAC-metal oxide, each of the conductorregions and the dielectric regions has a size of more than or equal to0.5 nm and less than or equal to 10 nm, preferably more than or equal to0.5 nm and less than or equal to 3 nm and is dispersed in the material,in some cases.

Embodiment 1

One embodiment of the present invention is a metal oxide film includingtwo kinds of crystal parts. One is a crystal part (also referred to as afirst crystal part) including crystals aligned in the thicknessdirection (also referred to as a film-plane direction, or a directionperpendicular to a formation surface or film surface). The other is acrystal part (also referred to as a second crystal part) includingcrystals with a random orientation. The metal oxide film of oneembodiment of the present invention includes these two kinds of crystalparts.

Although crystal parts are divided into the two categories: the firstcrystal part with a particular orientation and the second crystal partwith a random orientation for simplicity, the first crystal part and thesecond crystal part cannot be distinguished from each other in some casebecause there is not much difference in crystallinity, crystal size, andthe like. Therefore, the oxide metal film of one embodiment of thepresent invention can be described without a distinction between thefirst crystal part and the second crystal part. In other words, themetal oxide film of one embodiment of the present invention can bereferred to as a metal oxide film including a plurality of crystal partsin which the proportion of crystal parts aligned in the directionperpendicular to the film surface is higher than the proportion ofcrystal parts aligned in other directions.

In the first crystal part, particular crystal planes are aligned in thethickness direction. Accordingly, when an X-ray diffraction (XRD)measurement is performed in a direction substantially perpendicular tothe top surface of the metal oxide film including the first crystalparts, a diffraction peak derived from the first crystal parts isobserved at a predetermined diffraction angle (2θ). Note that the higherthe proportion of the first crystal parts in a film is, the higher thediffraction peak becomes; thus, the height (intensity) of thediffraction peak can be an indicator of crystallinity of the film.

A plurality of crystal parts is observed in a transmission electronmicroscope image of a cross section of the metal oxide film which is oneembodiment of the present invention in the thickness direction. In theplurality of crystal parts, the first crystal parts where crystal planesperpendicular to the c-axes are aligned in the thickness direction areobserved at a higher proportion than the crystal parts aligned in otherdirections.

It is preferable that the proportion of a region in the metal oxide filmexcept the crystal parts observed by a transmission electron microscopebe higher than or equal to 20% and lower than 100%, preferably higherthan or equal to 20% and lower than or equal to 80%, more preferablyhigher than or equal to 20% and lower than or equal to 60%.Alternatively, it is preferable that the proportion of a region exceptthe first crystal parts where c-axes are aligned in the thicknessdirection be higher than or equal to 20% and lower than or equal to 60%,preferably higher than or equal to 30% and lower than or equal to 50%.The metal oxide film including the regions other than the clear crystalparts at such a proportion can have oxygen permeability. Therefore, aneffect of reducing oxygen vacancies as a result of treatment forsupplying oxygen to the metal oxide film can be enhanced. Thus,application of the metal oxide film to a semiconductor device, such as atransistor, can provide an extremely highly reliable semiconductordevice.

The field-effect mobility of a transistor using the metal oxide film inwhich the first crystal part having alignment and the second crystalpart having no alignment exist together can be more increased than thatof a transistor using a metal oxide film including extremely highproportion (e.g., more than or equal to 75% or 80%) of the first crystalpart having alignment, particularly when the gate voltage is low.Therefore, the use of the transistor can make driving voltage of adevice low and can make high-frequency driving easy, for example. Inaddition, such a metal oxide film has a low property of anisotropy ofcurrent flow compared with a metal oxide film with extremely highcrystallinity, whereby variation in electrical characteristics of asemiconductor device including the metal oxide film can be reduced.

When an electron diffraction measurement is performed to the metal oxidefilm of one embodiment of the present invention in the directionperpendicular to its cross section, a diffraction pattern including anelectron diffraction pattern derived from the first crystal part and anelectron diffraction pattern derived from the second crystal part isobtained.

Obvious spots derived from crystallinity are observed in the electrondiffraction pattern derived from the first crystal part. The spots havean alignment in the thickness direction.

The second crystal part is a crystal part that exists in the film andhas a random orientation. Therefore, different images are obtained, asdescribed below, depending on a diameter of electron beam (a probediameter) used for electron diffraction, that is, the area of anobservation region.

A ring-like pattern is observed in a selected-area electron diffraction(SAED) pattern obtained by using a sufficiently large diameter ofelectron beam (probe diameter) (e.g., larger than or equal to 25 nm (p,or larger than or equal to 50 nm q). The ring-like pattern has aluminance distribution in a radial direction in some cases. Selectedarea electron diffraction is electron diffraction in which a selectedmicroscopic region is subjected to a parallel electron beam.

In a nano beam electron diffraction (NBED) pattern obtained by using asufficiently small diameter of electron beam (probe diameter) (e.g.,larger than or equal to 0.3 nm and smaller than or equal to 10 nm (q orsmaller than or equal to 5 nm), a plurality of spots distributed in acircumferential direction (also referred to as in θ direction) isobserved at the position of the ring-like pattern that is observed inthe selected-area electron diffraction pattern. In other words, thering-like pattern observed in the selected-area electron diffractionpattern is formed from an aggregate of the spots. Nano beam electrondiffraction is one of convergent beam electron diffraction in which asample is subjected to a convergent electron beam.

In the selected-area electron diffraction pattern of the cross-sectionof the metal oxide film which is one embodiment of the presentinvention, a first spot derived from the first crystal part and thering-like pattern derived from the second crystal part exist together.In the nano beam electron diffraction pattern of the cross-section ofthe metal oxide film, the first spot derived from the first crystal partand a plurality of second spots distributed in the circumferentialdirection derived from the second crystal part exist together.

The first spot is positioned to overlap with the ring in a radialdirection in the selected-area electron diffraction pattern of the metaloxide film. In addition, the first spot is positioned to overlap withthe second spot in the radial direction in the nano beam electrondiffraction pattern.

In addition, the first spot derived from the first crystal part is adiffraction spot derived from a crystal plane perpendicular to thec-axis of a crystal. In the case where a crystal structure has two-holdsymmetry in a direction perpendicular to the c-axis, two first spots aresymmetric with respect to the center of an electron diffraction pattern.Note that a spot derived from a crystal plane perpendicular to thec-axis other than the first spot and spots derived from planes otherthan the crystal plane perpendicular to the c-axis may be observed inthe electron diffraction pattern.

In the case where the ring overlaps with the first spot in a radialdirection, a plurality of the second spots which is a composition of thering is assumed to be diffraction spots derived from crystal planesperpendicular to the c-axes of crystal parts with alignment in differentdirections.

In a selected-area electron diffraction pattern of the metal oxide film,two ring-like patterns having different diameters (referred to as afirst ring and a second ring in order from the inside) may be observed.In that case, the first spot derived from the first crystal part ispositioned to overlap with the ring that is positioned on the inner side(i.e., the first ring). Furthermore, other spots derived from the firstcrystal part may be observed in a position overlapping with the secondring.

When the proportion of the first crystal parts with a particularorientation in the metal oxide film is high, an electron diffractionpattern in which a high anisotropic pattern is more dominant isobtained. For example, the luminance of the first ring and that of thesecond ring are relatively lower than the luminance of the first spotderived from the first crystal part in a selected-area electrondiffraction pattern. At that time, a different spot (a third spot)derived from the first crystal part may be observed in a positionoverlapping with the second ring that is positioned on the outer side.Each of the third spot and the second ring can be presumed to be derivedfrom the diffraction of the same crystal plane because the third spotoverlaps with the second ring in a radial direction.

Here, in a nano beam electron diffraction pattern, the luminance of thesecond spot (diffraction intensity) derived from the second crystal partis lower than that of the first spot derived from the first crystal partdescribed above. A difference in luminance between the two spots becomeslarger as the proportion of the first crystal parts in the metal oxidefilm is increased and thus indicates the crystallinity of the metaloxide film. For example, it is preferable that the luminance of thefirst spot with respect to the luminance of the second spot be greaterthan 1 time and less than or equal to 10 times, preferably greater than1 time and less than or equal to 9 times, more preferably greater than 1time and less than or equal to 8 times, still more preferably greaterthan or equal to 1.5 times and less than 6 times, still more preferablegreater than or equal to 2 times and less than 4 times.

The metal oxide film of one embodiment of the present invention is anoxide film including indium,

(

is Al, Ga, Y, or Sn) and zinc. Such an oxide film is characterized bythe crystal structure including a stacked-layer structure along thec-axis. Moreover, such an oxide film is characterized by thesemiconductor characteristics.

The metal oxide film of one embodiment of the present invention can beused for a semiconductor where a channel of a transistor is formed.

Compared with a transistor using a metal oxide film which only includesthe second crystal part having no particular alignment, a transistorusing the metal oxide film in which the first crystal part havingalignment and the second crystal part having no particular alignmentexist together is characterized by, as described above, higher stabilityof electrical characteristics, ease of reducing the channel length, andthe like.

A more specific example of one embodiment of the present invention isdescribed below.

[Metal Oxide]

The metal oxide film of one embodiment of the present invention includesindium (In),

(

is Al, Ga, Y, or Sn), and zinc (Zn). Specifically,

is preferably gallium (Ga).

A metal oxide film including In has high carrier mobility (electronmobility), for example. A metal oxide film has high energy gap (Eg) byincluding Ga, for example. Note that Ga is an element having highbonding energy with oxygen, which is higher than the bonding energy ofIn with oxygen. In addition, a metal oxide film including Zn is easilycrystallized.

Accordingly, the metal oxide film of one embodiment of the presentinvention preferably has a crystal structure exhibiting a single phase,particularly, homologous series. For example, the metal oxide film has acomposition of In_(1+x)

_(1−x)O₃(ZnO)_(y) structure (x satisfies 0<x<0.5, and y isapproximately 1) where the content of In is higher than that of

, so that the carrier density (electron mobility) of the metal oxidefilm can be high.

In particular, the metal oxide film of one embodiment of the presentinvention preferably has a composition in the neighborhood of theIn_(1+x)

_(1−x)O₃(ZnO)_(y) structure (x satisfies 0<x<0.5, and y is approximately1), specifically a composition in the neighborhood of a structure whereIn:

:Zn=1.33:0.67:1 (approximately In:

:Zn=4:2:3). The metal oxide film having such a composition can have highcarrier mobility and high film stability.

Note that the composition of the metal oxide film is not limited to theabove-mentioned composition, and other compositions with which the filmcan have a layered crystal structure may be used.

In this specification and the like, “neighborhood” means a range of ±1,preferably ±0.5 with respect to the proportion of atoms of the metalelement

. For example, in the case where the oxide semiconductor film has acomposition in the neighborhood of In:Ga:Zn=4:2:3, the proportion of Inis 4, the proportion of Ga may be greater than or equal to 1 and lessthan or equal to 3 (1≤Ga≤3) and the proportion of Zn is greater than orequal to 2 and less than or equal to 4 (2≤Zn≤4), preferably theproportion of Ga is greater than or equal to 1.5 and less than or equalto 2.5 (1.5≤Ga≤2.5) and the proportion of Zn is greater than or equal to2 and less than or equal to 4 (2≤Zn≤4).

[Formation of Metal Oxide Film]

Samples each including a metal oxide film were formed. Three kinds ofmetal oxide films were formed in different conditions. First, methodsfor forming Samples 1 to 4 are described.

[Sample 1]

Sample 1 is a sample in which an approximately 100-nm-thick metal oxidefilm including indium, gallium, and zinc is formed over a glasssubstrate. The metal oxide film used for Sample 1 was formed under thefollowing conditions: the substrate temperature was 130° C.; an argongas with a flow rate of 180 sccm and an oxygen gas with a flow rate of20 sccm were introduced into a chamber of the sputtering apparatus; thepressure was set to 0.6 Pa; and an AC power of 2.5 kw was applied to ametal oxide target containing indium, gallium, and zinc (with an atomicratio of In:Ga:Zn=4:2:4.1). The proportion of gas flow rate may berepresented by an oxygen flow rate percentage which indicates the oxygenflow rate with respect to the total gas flow rate. In that case, theoxygen flow rate percentage under the formation conditions for Sample 1was 10%.

[Sample 2]

Sample 2 is a sample in which an approximately 100-nm-thick metal oxidefilm is formed over a glass substrate. The metal oxide film used forSample 2 was formed under the conditions similar to the conditions forSample 1 except that the substrate temperature was 170° C. The oxygenflow rate percentage under the formation conditions for Sample 2 was10%.

[Sample 3]

Sample 3 is a sample in which an approximately 100-nm-thick metal oxidefilm is formed over a glass substrate. The metal oxide film used forSample 3 was formed under the conditions similar to the conditions forSample 1 except that the substrate temperature was 170° C. and an argongas with a flow rate of 140 sccm and an oxygen gas with a flow rate of60 sccm were introduced into a chamber of the sputtering apparatus. Theoxygen flow rate percentage under the formation conditions for Sample 3was 30%.

[Sample 4]

Sample 4 is a sample in which an approximately 100-nm-thick metal oxidefilm is formed over a glass substrate. The metal oxide film used forSample 4 was formed under the following conditions: the substrate wasnot heated; an argon gas with a flow rate of 20 sccm and an oxygen gaswith a flow rate of 10 sccm were introduced into a chamber of thesputtering apparatus; the pressure was set to 0.4 Pa; and an AC power of0.2 kw was applied to a metal oxide target containing indium, gallium,and zinc (with an atomic ratio of In:Ga:Zn=1:1:1). The oxygen flow ratepercentage under the formation conditions for Sample 4 was 33%.

[X-Ray Diffraction Measurement]

FIGS. 1A to 1C show results of XRD measurement for Sample 1 to Sample 3.A powder method (also referred to as a θ-2θ method) which is a kind ofan out-of-plane method was used. Note that in a θ-2θ method, X-raydiffraction intensity is measured while an incident angle of an X-ray ischanged and the angle of a detector facing an X-ray source is equal tothe incident angle. Note that a grazing-incidence XRD (GIXRD) method(also referred to as a thin film method or a Seemann-Bohlin method) maybe used. The GIXRD method is a kind of an out-of-plane method formeasuring X-ray diffraction intensity in which X-ray is incident at anangle approximately 0.40° from a film surface with use of avariable-angle detector. In each of FIGS. 1A to 1C, the horizontal axisrepresents the diffraction angle 2θ and the vertical axis representsdiffraction intensity (any unit).

As shown in FIGS. 1A to 1C, a peak of diffraction intensity was observedaround at 2θ=31° in each sample. The highest peak intensity was observedfrom Sample 3, followed by Sample 2 and Sample 1.

The diffraction angle (around at 2θ=31°) at which the peak of thediffraction intensity was observed corresponds to a diffraction angle onthe (009) plane of the structure model of single crystal InGaZnO₄.Accordingly, the observed peaks indicate that each sample includes acrystal part where the c-axes are aligned in the thickness direction(hereinafter also referred to as crystal part having alignment or afirst crystal part). The comparison of the intensities shows that Sample3 has the highest proportion of crystal parts with a particularorientation, followed by Sample 2 and Sample 1.

The above results show that there is a tendency that the higher thesubstrate temperature at the deposition time and the oxygen flow ratepercentage are, the larger the proportion of crystal parts is.

[Cross-Sectional Observation]

FIGS. 2A to 2C are transmission electron microscopy (TEM) images ofSample 1 to Sample 3.

The crystal parts in which atoms are aligned in a layered manner in thethickness direction are observed in Sample 2 and Sample 3. Theproportion of regions where atoms are arranged in the thicknessdirection of Sample 2 appears to be larger than that of Sample 3.Although Sample 1 also includes the region where atoms are periodicallyarranged, the proportion of crystal parts aligned in the thicknessdirection is not large compared to Sample 2 and Sample 3.

[Electron Diffraction]

Next, electron diffraction measurement results of Sample 1 to Sample 4are described below. In the electron diffraction measurement, adiffraction pattern was obtained in such a manner that the sample wasirradiated with an electron beam incident in a direction perpendicularto its cross-section. In the measurement, the diameter of electron beamwas varied from 1 nm to 100 nm. The thickness of each sample was about50 nm.

The electron diffraction pattern of each sample is shown below. Notethat the contrast of each electron diffraction pattern shown here isadjusted for simplicity. However, in luminance analysis of diffractionpatterns described later, image data with contrast adjustment shown infigures are not used but image data without contrast adjustment areused.

Here, the thickness of samples used for electron diffraction isdescribed. As the diameter of incident electron beam used in electrondiffraction is larger and the thickness of sample is larger, informationof the sample in the thickness direction is likely to be shown in theelectron diffraction pattern. Therefore, the information of localregions can be obtained by reducing not only the diameter of electronbeam (a probe diameter) but also the thickness of the sample. Incontrast, when the thickness of sample is too small, for example, lessthan or equal to 5 nm, information of only submicroscopic region isobtained. Therefore, an electron diffraction pattern obtained when asubmicroscopic crystal part exists in the region is similar to anelectron diffraction pattern of a single crystal. When the aim is not toanalyze the submicroscopic region, the thickness of sample is preferablygreater than or equal to 10 nm and less than or equal to 100 nm,typically greater than or equal to 10 nm and less than or equal to 50nm.

[Sample 1]

FIGS. 3A and 3B are electron diffraction patterns of Sample 1. FIGS. 3Aand 3B are electron diffraction patterns with an electron-beam diameterof 100 nm and 1 nm, respectively. In FIGS. 3A and 3B, the brightestluminescent spot at the center of the pattern is derived from theincident electron beam and is the center of the electron diffractionpattern (also referred to as direct spot).

Two ring-like diffraction pattern with different radii are observed inFIG. 3A. The rings are referred to as a first ring and a second ring inascending order of radius. It is observed that the luminance of thefirst ring is higher than that of the second ring. In addition, twospots (referred to as first spot) indicated by arrows are observed at aposition overlapping with the first ring.

The distance from the center to the first ring and the distance from thecenter to the two first spots in a radial direction substantiallycorrespond to the distance from the center to a diffraction spot on the(009) plane of the structure model of single crystal InGaZnO₄.

The observations of the ring-like diffraction patterns indicate thatcrystal parts with a random orientation (hereinafter also referred to ascrystal parts without a particular orientation or second crystal parts)exist in the metal oxide film.

In addition, the crystal part derived from the first spots is presumedto have two-hold symmetry because the two first spots are disposedsymmetrically with respect to the center point of the electrondiffraction pattern and the luminance of the two first spots aresubstantially equal to each other. As described above, since the twofirst spots are diffraction spots which are derived from a crystal planeperpendicular to the c-axis, the orientation of a straight line (astraight line denoted by a dashed line) which passes through the twofirst spots and the center is aligned with the c-axis of the crystalpart. The thickness direction is the vertical direction of FIG. 3A,which suggest the presence of crystal part in which the c-axis isoriented in the thickness direction in the metal oxide film.

In FIG. 3B, a plurality of spots (second spots) circumferentiallydistributed is observed at the position of the first ring shown in FIG.3A. Moreover, two first spots can be observed.

As shown in FIG. 3B, when the diameter of electron beam which enters thesample is extremely small, a plurality of second spots circumferentiallydistributed can be observed. This indicates that the metal oxide filmcontains a plurality of submicroscopic crystal parts with a randomsurface orientation. It is also found that the first ring observed inFIG. 3A results from a sequence of a plurality of diffraction spotsderived from the submicroscopic crystal parts with averaged luminancecaused by increasing the observation area.

As described above, the metal oxide film of Sample 1 is confirmed to bea film including both crystal parts with a particular orientation andcrystal parts with a random orientation. In addition, the luminance ofthe first spots derived from crystal parts with a particular orientationis higher than the luminance of the second spots, which indicates thatthe proportion of crystal parts with a particular orientation is highamong crystal parts that exist in the film.

[Sample 2 and Sample 3]

FIGS. 4A and 4B show electron diffraction patterns of Sample 2. FIGS. 4Cand 4D show electron diffraction patterns of Sample 3. The beam diameteris 100 nm in FIGS. 4A and 4C. The beam diameter is 1 nm in FIGS. 4B and4D.

As shown in FIGS. 4A and 4C, two first spots derived from crystal partswith a particular orientation can be observed more clearly than those inSample 2 and Sample 3. The luminance of the spots is high in thefollowing order: Sample 3, Sample 2 and Sample 1. This indicates thatthe proportion of crystal parts with a particular orientation is high inthat order.

As shown in FIGS. 4A and 4C, two spots (third spots) whose brightness islower than the first spot are observed in a position overlapping withthe second ring in each of Sample 2 and Sample 3. Note that theluminance of the third spot cannot be distinguished from that of thesecond ring in Sample 1 as shown in FIG. 3A. Two third spots areobserved at positions rotated 90 degrees with respect to the firstspots. The third spot is a diffraction spot which is derived from aplane other than crystal plane which is perpendicular to the c-axis.

In addition, high luminance regions are observed at positions rotated 30degrees and positions rotated 60 degrees with respect to the firstspots, which are surrounded by a dashed line in FIG. 4C. Since thediffraction spots other than the first spots are observed moreobviously, Sample 3 is a film in which the proportion of crystal partswith a particular orientation is higher, in other words, thecrystallinity is higher.

The second spots are observed at the position of the first ring as shownin FIGS. 4B and 4D obtained with an extremely small beam diameter. Inaddition, the third spots are also observed in Sample 2 and Sample 3,which do not appear in Sample 1.

[Sample 4]

FIG. 5 is an electron diffraction pattern of Sample 4 obtained with abeam diameter of 100 nm.

In Sample 4, although the first ring was observed, the first spots whichwere observed in Sample 1 to Sample 3 were not observed. This indicatesthat Sample 4 includes a plurality of crystal parts derived from thefirst ring and that the proportion of crystal parts with a particularorientation is equivalent to the proportion of crystal parts with arandom orientation.

[Luminance of Spot in Electron Diffraction Pattern]

A difference in luminance between the first ring and the first spots isimportant information to presume the proportion of crystal parts with aparticular orientation.

FIG. 6A is an enlarged view of FIG. 4C. Here, it is known that in anideal electron diffraction pattern of a single-crystal InGaZnO₄, adiffraction spot is not observed at positions (regions surrounded by adashed line in FIG. 6A) rotated 30, 90, and 120 degrees with respect tothe first spot that is the center of the electron diffraction patternand overlapping with the first ring in a radius direction. In otherwords, the luminance of the regions is assumed to be derived from anelectron diffracted from crystal parts other than crystal parts with aparticular orientation, or from an electron scattered from a region inthe film other than crystal parts or a substrate. Note that the latterscattered electron can be negligible here because scattered electrons atthe position with the same radius are presumed to be observed to have acomparable intensity. Therefore, the difference in luminance between,for example, the first spot and the position rotated by 90 degrees withrespect to the first spot is important information to understand theproportion of crystal parts with a particular orientation.

The difference in luminance between the first spots and the positionsrotated predetermined degrees with respect to the first spots can beobtained by normalizing the luminance of the spots using the luminanceof the direct spot as a reference. Note that the direct spot appears atthe center of an electron diffraction pattern. In addition, the samplescan be relatively compared.

FIG. 7A1 shows the electron diffraction pattern of Sample 1 (same asthat in FIG. 3A). FIG. 7A2 shows the profiles of normalized luminancewith respect to a radial direction along lines A-A′ and B-B′. The lineA-A′ passes through the first spots and the direct spot, and the lineB-B′ intersects with the line A-A′. As shown in FIG. 7A2, two peaksbetween which the peak of the direct spot is sandwiched are observed.There is an obvious difference in luminance of the two peaks betweenA-A′ and B-B′.

FIGS. 7B1 and 7B2 are an electron diffraction pattern of Sample 2 andthe profiles of normalized luminance, respectively. FIGS. 7C1 and 7C2are an electron diffraction pattern of Sample 3 and the profiles ofnormalized luminance, respectively. A difference in luminance of Sample2 between a peak of the first spots and a peak at the positions rotated90 degrees with respect to the first spots is larger than that ofSample 1. Furthermore, the difference is larger in Sample 3 than Sample2.

Moreover, in B-B′ direction of Sample 2 and Sample 3, peaks at theposition corresponding to the second ring are observed, which are notobserved in Sample 1. This obviously shows that Sample 2 and Sample 3have higher crystallinity than Sample 1.

FIGS. 7D1 and 7D2 are an electron diffraction pattern of Sample 4 andthe profiles of normalized luminance, respectively. In Sample 4, theprofiles in both directions substantially agree with each other. Inother words, Sample 4 includes few crystal parts with a particularorientation and includes a plurality of crystal parts with a randomorientation of crystal planes.

When the beam diameter is small, the first ring appears as a group ofdiscrete luminescent spots in the electron diffraction pattern.Therefore, the luminance of the first ring cannot be accurately obtainedby comparison with the local luminance at some position. In that case,luminance at a predetermined position in a rectangular region denoted bya dashed line in FIG. 6B which has a particular width and whoselong-side direction corresponds to a radial direction, can be obtainedfrom the profile of the luminance in a radial direction by using thefigure of averaged luminance in a width direction of the rectangle (in ashort-side direction of the rectangle in FIG. 6B).

When the profile of the luminance in a radial direction is calculated, acomponent of the luminance derived from inelastic scatterings and thelike from a sample is subtracted as the background, in which casecomparison with higher accuracy can be performed. Because the componentof the luminance derived from inelastic scatterings shows an extremelybroad profile in a radial direction, the luminance of the background maybe obtained by a linear approximation. For example, a straight line isdrawn along the tails of a target peak, and a region positioned on theluminance side lower than the straight line can be subtracted as thebackground.

Here, the luminance of the first spots and the luminance at thepositions rotated 90 degrees with respect to the first spots arecalculated from data in which the background is subtracted by the methoddescribed above. Then, the luminance of the first spots is divided bythe luminance of the positions rotated 90 degrees with respect to thefirst spots, whereby a relative luminance R was obtained.

FIG. 8 shows the results of relative luminance R estimated from theelectron diffraction patterns of Sample 1 to Sample 4 that were observedwith a beam diameter of 100 nm.

In Sample 4, the difference in luminance cannot be observed between twopositions and thus the relative luminance R is 1. The relative intensityis higher from Sample 3, Sample 2, and Sample 1 in this order.

When a metal oxide film is used for a semiconductor film in which achannel of a transistor is formed, the relative luminance R is in thefollowing range: greater than 1 time and less than or equal to 10 times,preferably greater than 1 time and less than or equal to 9 times, morepreferably greater than 1 time and less than or equal to 8 times, morepreferably greater than or equal to 1.2 times and less than or equal to8 times, further preferably greater than or equal to 1.5 times and lessthan or equal to 6 times, further preferably greater than or equal to 2times and less than or equal to 6 times, and further preferably greaterthan or equal to 2 times and less than or equal to 4 times. With use ofsuch a metal oxide film as a semiconductor layer, both high stability ofelectrical characteristics and high field-effect mobility in alow-gate-voltage region can be achieved.

[Variation in Orientation]

Crystal parts with a particular orientation included in a metal oxidefilm do not have a complete alignment and have a variation inorientation. The variation in orientation is described below.

The variation in orientation can be evaluated as follows. First,electron diffraction pattern images of a cross-section of a metal oxidefilm are obtained from a plurality of different regions. Then, the slopeof a straight line passing through the center of the electrondiffraction pattern and the first spots with respect to the thicknessdirection of the metal oxide film is measured in each of the obtainedimages. In this manner, variation in orientation of crystal partsincluded in each region can be estimated.

In this analysis, the electron diffraction patterns were obtained asmoving images while scanning an electron beam with a diameter of 1 nm ina direction parallel to the thickness direction. A distance ofapproximately 250 nm was scanned for 100 seconds.

FIGS. 9A to 9C show some electron diffraction patterns of a capturedmoving image of each Sample 1, Sample 2, and Sample 3. FIGS. 9A to 9Ceach show nine electron diffraction patterns. An interval between eachpattern is approximately 10 seconds.

In FIGS. 9A to 9C, a straight line passing through the first spots andthe center of the electron diffraction pattern is denoted by a dottedline. It is found from FIGS. 9A to 9C that there is variation inorientation of crystal parts between observation regions.

FIG. 10 shows distribution of orientation estimated from the electrondiffraction patterns shown in FIGS. 9A to 9C. The horizontal axisrepresents distance (an imaging-start position is the origin ofmeasurement). The vertical axis represents orientation degree when anaverage of orientation angels measured at a respective distance isassumed to be 0 degree. In FIG. 10, the clockwise direction is positive.As shown in FIG. 10, there is little difference in orientation anglebetween the samples, and the variation falls within a range of less than10 degrees in each sample.

The orientation of crystal parts in the metal oxide film can beestimated also from the extension of spots in a circumferentialdirection in an electron diffraction pattern obtained with a largerelectron beam diameter. When the electron beam diameter is increased toextend the observation area, an electron diffraction pattern in whichinformation of crystal parts existing in the measurement area isaveraged can be obtained. Thus, as the variation in orientation ofcrystal parts is increased, the extension of spots in a circumferentialdirection is increased. In addition, the distribution of luminance in acircumferential direction reflects the proportion of crystal parts witha particular orientation.

For example, as shown in FIG. 6A, the first spot does not have aperfect-dot or -round shape but has a near-elliptical shape extended ina circumferential direction. The angle between two straight lines eachconnecting an end portion of the spot in a circumferential direction andthe center of the electron diffraction pattern indicates variation inorientation of crystal parts. In the case where the end portions of thefirst spot are not obvious, the position of 1σ or 2σ when a point withthe brightest luminance of the first spot is used as a reference mayserve as the end portion, for example. In the case where a difference inluminance between the first ring and the first spot, for example,variation in orientation of crystal parts can be estimated from theluminance distribution where the luminance of the first ring issubtracted from the luminance of the first spot. Note that when theabove method is used, there is a case where the extension of spot islarger as the luminance is increased depending on the observationconditions of electron diffraction pattern; as a result, variation inorientation is sometimes estimated larger than the actual one.

For example, the central angle of the end portion of the first spot inwhich the center of an electron diffraction pattern is assumed to be thecenter is preferably greater than or equal to 0 degree and less than orequal to 45 degrees, preferably greater than or equal to 0 degree andless than or equal to 40 degrees, more preferably greater than or equalto 0 degree and less than or equal to 35 degrees, still more preferablygreater than or equal to 0 degree and less than or equal to 30 degrees.The higher the proportion of crystal parts with a particular orientationis, the better the electrical characteristics of the metal oxide film.

[Proportion of Crystal Part]

The proportion of crystal parts in a metal oxide film can be estimatedby analyzing its cross-sectional observation image.

A method for analyzing the image is described. An image processing isperformed as follows. First, a high-resolution TEM image is subjected totwo-dimensional fast Fourier transform (FFT), whereby an FFT image isobtained. The obtained FET image is subjected to a mask processing sothat a region other than a region having a periodic structure isremoved. After the mask processing, the FFT image is subjected totwo-dimensional inverse fast Fourier transform (IFFT), whereby an FFTfiltering image is obtained.

In this manner, a real-space image in which only crystal parts areextracted can be obtained. Then, the proportion of crystal parts can beestimated from the proportion of area of the remaining image. Moreover,the proportion of area other than the crystal parts can be estimated bysubtracting the remaining region from the area of region used for imageprocessing (also referred to as the area of original image).

FIGS. 11A and 11B show cross-sectional TEM observation images of Sample3 and Sample 1 before the image processing. FIGS. 11C and 11D show theimages after the image processing. White regions in the images after theimage processing correspond to regions including crystal parts.

FIG. 11C indicates that the proportion of the area other than the regionincluding crystal parts was about 21.0% in Sample 3. The proportion ofthe area other than the region including crystal parts with a particularorientation was about 39.8% in Sample 1, which was estimated from FIG.11D.

When the proportion of the region other than crystal parts in a metaloxide film, which was estimated in the above manner, is greater than orequal to 5% and less than 20%, the metal oxide film has extremely highcrystallinity and high stability of electrical characteristics and thusis preferable. In addition, when the proportion of the region other thancrystal parts in a metal oxide film is higher than or equal to 20% andlower than 100%, preferably higher than or equal to 20% and lower thanor equal to 90%, more preferably higher than or equal to 20% and lowerthan or equal to 80%, still more preferably higher than 20% and lowerthan or equal to 60%, still more preferably higher than or equal to 30%and lower than or equal to 50%, the metal oxide film includes bothcrystal parts with a particular orientation and the crystal parts with arandom orientation at an appropriate ratio and thus can achieve bothhigh stability of electrical characteristics and high mobility.

Here, a cross-sectional image or a region other than crystal parts thatcan be easily observed by the above image analysis can be referred to asLateral Growth Buffer Region (LGBR). In addition, in a cross-sectionalTEM observation image, a dense portion and a sparse portion are observedin the LGBR. The sparse portion appears to connect the dense portionswith each other by the lateral growth. In particularly, the LGBR is aregion where a plurality of crystal parts whose surface orientations arerandom and whose sizes are extremely minute and different from eachother. The crystal part is not observed as a spot in an electrondiffraction pattern with a large beam diameter (probe dimeter) (e.g.,greater than or equal to 25 nm p or greater than or equal to 50 nm cp),but can be barely observed as a spot in an electron diffraction patternwith an extremely small beam diameter (probe diameter) (e.g., greaterthan or equal to 0.3 nm and less than or equal to 10 nm (p or less thanor equal to 5 nm), which indicates that the crystal part is extremelyminute. In this manner, the presence of crystal parts can be found.

A high-resolution TEM image can be obtained with a spherical aberrationcorrector function. The high-resolution TEM image obtained with aspherical aberration corrector function is particularly referred to as aCs-corrected high-resolution TEM image. The Cs-corrected high-resolutionTEM image can be observed with, for example, an atomic resolutionanalytical electron microscope JEM-ARM200F manufactured by JEOL Ltd.

[Electrical Characteristics 1 of Transistor]

Results of fabrication of transistors using the metal oxides of Sample 1and Sample 3 and measurement of their electrical characteristics aredescribed below.

The transistor structure illustrated in FIGS. 36A and 36B in Embodiment2 was used. Two kinds of samples, Sample A1 and Sample A2 whosesemiconductor layers were formed in different conditions werefabricated.

[Fabrication of Transistor]

First, a 10-nm-thick titanium film and a 100-nm-thick copper film wereformed over a glass substrate with a sputtering apparatus. Next, theconductive film was processed by a photolithography method.

A stack including four insulating films was formed over the substrateand the conductive film. The insulating films were formed in successionin a vacuum with a plasma-enhanced chemical deposition (PECVD)apparatus. As the insulating films, a 50-nm-thick silicon nitride film,a 300-nm-thick silicon nitride film, a 50-nm-thick silicon nitride film,and a 50-nm-thick silicon oxynitride film were used and stacked in thisorder.

Next, an oxide semiconductor film was formed over the insulating filmand was processed into an island shape, whereby a semiconductor layerwas formed. A 40-nm-thick oxide semiconductor film was formed as theoxide semiconductor film 108.

The formation conditions of a metal oxide film for Sample A1 which wasused for an oxide semiconductor film were similar to those for Sample 1.In other words, the metal oxide film used for Sample A1 was formed underthe following conditions: the substrate temperature was 130° C.; anargon gas with a flow rate of 180 sccm and an oxygen gas with a flowrate of 20 sccm were introduced into a chamber of the sputteringapparatus; the pressure was set to 0.6 Pa; and an AC power of 2.5 kw wasapplied to a metal oxide target containing indium, gallium, and zinc(with an atomic ration of In:Ga:Zn=4:2:4.1). Note that the oxygen flowrate percentage was 10%. The thickness of the metal oxide film wasapproximately 40 nm.

The formation conditions of a metal oxide film for Sample A2 which wasused for an oxide semiconductor film were similar to those for Sample 3.In other words, the metal oxide film used for Sample A2 was formed underthe following conditions: the substrate temperature was 170° C.; anargon gas with a flow rate of 140 sccm and an oxygen gas with a flowrate of 60 sccm were introduced into a chamber of the sputteringapparatus; the pressure was set to 0.6 Pa; and an AC power of 2.5 kw wasapplied to a metal oxide target containing indium, gallium, and zinc(with an atomic ration of In:Ga:Zn=4:2:4.1). Note that the oxygen flowrate percentage was 30%. The thickness of the metal oxide film wasapproximately 40 nm.

Next, an insulating film was formed over the insulating film and theoxide semiconductor layer. As the insulating film, a 150-nm-thicksilicon oxynitride film was formed with a PECVD apparatus.

Next, heat treatment was performed. The heat treatment was performed at350° C. for one hour in a mixed gas atmosphere of nitrogen and oxygen.

An opening was formed in a desired region of the insulating film. Theopening was formed by a dry etching method.

Then, a 100-nm-thick oxide semiconductor film was formed over theinsulating film and in the opening and the oxide semiconductor film wasprocessed into an island shape, whereby a conductive film was formed. Inaddition, the insulating film in contact with the bottom surface of theconductive film was processed in succession after the formation of theconductive film, whereby the insulating film was formed.

A 100-nm-thick oxide semiconductor film was formed as the conductivefilm. The oxide semiconductor film had a stacked-layer structureincluding two layers. A layer deposited first of the oxide semiconductorfilm was formed under the following conditions: the substratetemperature was 170° C.; an oxygen gas with a flow rate of 200 sccm wasintroduced into a chamber of the sputtering apparatus; the pressure wasset to 0.6 Pa; an AC power of 2.5 kw was applied to a metal oxide targetcontaining indium, gallium, and zinc (with an atomic ratio ofIn:Ga:Zn=4:2:4.1); and the thickness of the oxide semiconductor film was10 nm. A layer deposited second of the oxide semiconductor film wasformed under the following conditions: the substrate temperature was170° C.; an argon gas with a flow rate of 180 sccm and an oxygen gaswith a flow rate of 20 sccm were introduced into a chamber of thesputtering apparatus; the pressure was set to 0.6 Pa; an AC power of 2.5kw was applied to a metal oxide target containing indium, gallium, andzinc (with an atomic ratio of In:Ga:Zn=4:2:4.1); and the thickness ofthe oxide semiconductor film was 90 nm.

Next, plasma treatment was performed from above the oxide semiconductorfilm, the insulating film, and the conductive film. The plasma treatmentwas performed with a PECVD apparatus at a substrate temperature 220° C.in a mixed gas atmosphere containing an argon gas and a nitrogen gas.

Next, an insulating film was formed over the oxide semiconductor film,the insulating film, and the conductive film. The insulating film wasformed by stacking a 100-nm-thick silicon nitride film and a300-nm-thick silicon oxynitride film with a PECVD apparatus.

Then, a mask was formed over the formed insulating film and an openingwas formed in the insulating film with use of the mask.

A conductive film was formed to fill the opening and was processed intoan island shape, whereby the conductive film serving as a sourceelectrode and a drain electrode was formed. For the conductive films, a10-nm-thick titanium film and a 100-nm-thick copper film were formedwith a sputtering apparatus.

After that, an insulating film was formed over the insulating film andthe conductive film. A 1.5-μm-thick acrylic-based photosensitive resinwas used for the insulating film.

In the above manner, two types of transistors were fabricated.

[Electrical Characteristics of Transistor]

Next, Id−Vg characteristics of the fabricated transistors of Samples A1and A2 were measured.

As conditions for measuring the Id−Vg characteristics of eachtransistor, a voltage applied to the conductive film serving as a firstgate electrode of each transistor (hereinafter the voltage is alsoreferred to as gate voltage (Vg)) and a voltage applied to theconductive film serving as the second gate electrode of each transistor(hereinafter the voltage is also referred to as back gate voltage (Vbg))changed from −15 V to +20 V in increments of 0.25 V. A voltage appliedto the conductive film serving as a source electrode (the voltage isalso referred to as source voltage (Vs)) was 0 V (comm), and a voltageapplied to the conductive film serving as a drain electrode (the voltageis also referred to as drain voltage (Vd)) was 0.1 V and 20 V.

FIGS. 12A and 12B show the results of Id−Vg characteristics of Sample A1and Sample A2. In FIGS. 12A and 12B, the first vertical axis representsId(A), the second vertical axis represents field-effect mobility (μFE)(cm²/Vs), and the horizontal axis represents Vg(V). FIGS. 12A and 12Beach show superimposed Id−Vg characteristics of five transistors.

As shown in FIGS. 12A and 12B, it is confirmed that Sample A1 and SampleA2 has favorable electrical characteristics. The field-effect mobilityof Sample A1 is higher than that of Sample A2. Such a tendency isapparent particularly in a low Vg range (e.g., Vg is lower than or equalto 10 V).

In other words, the transistor in which the metal oxide film containingboth a crystal part having alignment and a crystal part having noalignment was used for a semiconductor layer where a channel was formedshowed high field-effect mobility. In particular, the transistor showedhigh field-effect mobility and high drain current under thelow-gate-voltage conditions.

[Evaluation of Oxygen-Transmitting Property]

The result of evaluating oxygen-transmitting property of a metal oxidefilm is described.

The below-described three samples (Sample Ref, Sample B1, and Sample B2)were fabricated. Note that Sample B1 is a sample which includes a metaloxide film similar to that of Sample 1 and Sample B2 is a sample whichincludes a metal oxide film similar to that of Sample 3.

[Sample Ref]

Sample Ref is a sample in which a silicon oxynitride film that releasesoxygen by heating is formed over a glass substrate.

First, the silicon oxynitride film was formed over the glass substrate.The silicon oxide film was formed under the following conditions: amixed gas of SiH₄ at a flow rate of 160 sccm and N₂O at a flow rate of4000 sccm was used as a deposition gas; the pressure was 200 Pa; thepower was 1500 W; the substrate temperature was 220° C.; and a plasmaCVD method was used. The thickness of the silicon oxynitride film wasapproximately 400 nm.

Then, heat treatment was performed at 350° C. for one hour in a nitrogenatmosphere.

Next, an indium tin oxide film containing silicon (ITSO film) was formedby a sputtering method. The thickness of the ITSO film was approximately5 nm.

Then, oxygen was added to the silicon oxynitride film. The oxygenaddition treatment was performed with an ashing apparatus under theconditions where the substrate temperature was 100° C., an oxygen gas ata flow rate of 300 sccm was introduced into a chamber, the pressure was25.06 Pa, and an RF power of 4750 W was supplied between parallel-plateelectrodes provided in the ashing apparatus so that a bias would beapplied to the substrate side.

After that, the indium tin oxide film was removed by a wet etchingmethod, whereby Sample Ref was formed.

[Sample B1]

Sample B1 was formed in a manner similar to that of Sample Ref asfollows: a silicon oxynitride film was formed and subjected to heattreatment, and an indium tin oxide film was formed and then removed.

In addition, an approximately 5-nm-thick IGZO film was formed in amanner similar to those of Sample 1 over the silicon oxynitride film,and then Sample B1 was manufactured.

[Sample B2]

Sample B2 was manufactured in a manner similar to that of Sample Ref asfollows: a silicon oxynitride film was formed and subjected to heattreatment, and an indium tin oxide film was formed and then removed.

In addition, an approximately 5-nm-thick IGZO film was formed over thesilicon oxynitride film in a manner similar to that of Sample 3, wherebySample B2 was formed.

[TDS Measurement]

The number of released oxygen molecules (mass-to-charge ration (M/z) of32) of the three samples were compared by thermal desorptionspectroscopy (TDS).

FIGS. 13A to 13C show measurement results of Sample Ref, Sample B1, andSample B2, respectively. The vertical axis represents detectionintensity and the horizontal axis represents substrate temperature ineach graph.

The results of Sample Ref shown in FIG. 13A suggested that oxygenmolecules were released at about 100° C. to about 350° C. Furthermore,Sample Ref has a peak at around 250° C.

As shown in FIG. 13B, Sample B1 started to release oxygen at about 150°C., had a peak at about 350° C., and kept releasing oxygen even athigher temperatures. In other words, the metal oxide film used forSample B1 is a film which easily transmits oxygen.

As shown in FIG. 13C, the amount of released oxygen of Sample B2 wasconsiderably smaller than that of Sample B1 even though the profile ofreleased oxygen which had a peak at around 200° C. was observed.

According to the above results, a metal oxide film which includes bothcrystal parts with a particular orientation and crystal parts with arandom orientation and in which the proportion of crystal parts with aparticular orientation is lower is a film which easily transmits oxygen,in other words, a film in which oxygen is easily diffused.

[Evaluation of Oxygen Diffusion]

The evaluation results of ease of oxygen diffusion to metal oxide filmsare described below.

The following two samples (Sample C1 and Sample C2) were fabricated.

[Sample C1]

First, an approximately 50-nm-thick metal oxide film was formed over aglass substrate in a manner similar to that of Sample 1.

Next, an approximately 30-nm-thick silicon oxynitride film, anapproximately 100-nm-thick silicon oxynitride film, and an approximately20-nm-thick silicon oxynitride film were stacked over the metal oxidefilm by a plasma CVD method.

After that, heat treatment was performed at 350° C. for one hour in anitrogen atmosphere.

Next, a 5-nm-thick indium tin oxide film was formed by a sputteringmethod.

Next, oxygen was added to the silicon oxynitride film. The oxygenaddition treatment was performed with an ashing apparatus under theconditions where the substrate temperature was 40° C., an oxygen gas(¹⁶O) at a flow rate of 150 sccm and an oxygen gas (¹⁸O) at a flow rateof 100 sccm were introduced into a chamber, the pressure was 15 Pa, andan RF power of 4500 W was supplied for 600 sec. between parallel-plateelectrodes provided in the ashing apparatus so that a bias would beapplied to the substrate side. Since the silicon oxynitride filmcontained oxygen (¹⁶O) at a main component level when deposited, anoxygen gas (¹⁸O) was used to exactly measure the amount of oxygen addedby the oxygen addition treatment.

Then, an approximately 100-nm-thick silicon nitride film was formed by aplasma CVD method.

After that, heat treatment was performed at 450° C. for one hour in anitrogen atmosphere, whereby Sample C1 was fabricated.

[Sample C2]

Sample C2 is a sample whose metal oxide film was formed in differentconditions from those of Sample C1. In Sample C2, an approximately50-nm-thick metal oxide film was formed in a manner similar to that ofSample 3.

[Sims Analysis]

The concentration of ¹⁸O in Sample C1 and Sample C2 were measured bysecondary ion mass spectrometry (SIMS) analysis. FIG. 14 shows theresults. FIG. 14 shows the analysis results in a region including theglass substrate (expressed as glass), the metal oxide film (expressed asIGZO), and the silicon oxynitride film (expressed as SiON). Note thatthe analysis results shown here are results analyzed from the substrateside (also referred to as substrate side depth profile (SSDP)-SIMS).

In each Sample C1 and Sample C2, it is found that ¹⁸O was diffused tothe silicon oxynitride film and also to the metal oxide film. Whencomparing with Sample C1 and Sample C2, ¹⁸O was more deeply diffusedinto Sample C2 than Sample C1. In Sample C1, ¹⁸O was diffused to a depthof approximately 25 nm.

The above results showed that a metal oxide film including both crystalparts with a particular orientation and crystal parts with a randomorientation and having a low proportion of crystal parts with aparticular orientation is a film which easily transmits oxygen, in otherwords, a film in which oxygen is easily diffused.

[Concept of Oxygen Supply to Oxide Semiconductor Film]

Next, the concept of the oxygen supply to the metal oxide film isdescribed below based on the model diagrams illustrated in FIGS. 15A to15C, FIGS. 16A to 16C, FIGS. 17A to 17C, FIGS. 18A to 18C, FIG. 19,FIGS. 20A to 20C, FIGS. 21A to 21C, and FIG. 22.

Here, taking an IGZO film as an example of the metal oxide film, themovement easiness of excess oxygen (oxygen more than that in thestoichiometric composition) and oxygen vacancies are described.

In this embodiment, models in which either one excess oxygen atom or oneoxygen vacancy existed on one In—O plane of an IGZO film with an atomicratio of In:Ga:Zn=3:1:2 were made by geometry optimization, and energycorresponding to an intermediate structure along a minimum energy pathin each model was calculated by a nudged elastic band (NEB) method.

The calculation was performed using calculation program software“OpenMX” based on the density functional theory (DFT). As a basisfunction used as a parameter in the calculation, a pseudo-atomiclocalized basis function was used. Note that the basis function iscategorized into polarized basis sets of slater type orbital (STO). As afunctional, generalized-gradient-approximation/Perdew-Burke-Ernzerhof(GGA/PBE) was used. The cut-off energy was set to 200 Ry. The number ofsampling k points was 5×5×3.

In the calculation of the movement easiness of excess oxygen, the numberof atoms which existed in the calculation model was set to 85. In thecalculation of the movement easiness of an oxygen vacancy, the number ofatoms which existed in the calculation model was set to 83.

The movement easiness of excess oxygen and the movement easiness of anoxygen vacancy were evaluated by calculation of a height of energybarrier Eb which is required for excess oxygen or an oxygen vacancy togo over in moving to respective sites. That is, when the height ofenergy barrier Eb which is gone over in moving is high, excess oxygen oroxygen vacancy hardly moves, and when the height of the energy barrierEb is low, excess oxygen or oxygen vacancy easily moves.

(Excess Oxygen Transfer)

First, excess oxygen transfer is described. The models in which oneexcess oxygen atom exists in one In—O plane of the IGZO film with anatomic ratio of In:Ga:Zn=3:1:2 are shown in FIGS. 15A to 15C, FIGS. 16Ato 16C, FIGS. 17A to 17C, and FIGS. 18A to 18C.

[(1) First Transition of Excess Oxygen]

FIG. 15A is a model diagram of the IGZO film. FIG. 15B is an enlargedmodel diagram showing a region a1 in FIG. 15A. FIG. 15C is a modeldiagram showing the transition of excess oxygen from the site shown inthe model diagram of FIG. 15B. The transition from FIG. 15B to FIG. 15Cis referred to as a first transition of excess oxygen. In the firsttransition of excess oxygen, excess oxygen diffuses from an InO₂ layerto a (Ga, Zn)O layer.

[(2) Second Transition of Excess Oxygen]

FIG. 16A is a model diagram of the IGZO film. FIG. 16B is an enlargedmodel diagram showing a region a2 in FIG. 16A. FIG. 16C is a modeldiagram showing the transition of excess oxygen from the site shown inthe model diagram of FIG. 16B. The transition from FIG. 16B to FIG. 16Cis referred to as a second transition of excess oxygen. In the secondtransition of excess oxygen, excess oxygen diffuses from a first (Ga,Zn)O layer to a second (Ga, Zn)O layer.

[(3) Third Transition of Excess Oxygen]

FIG. 17A is a model diagram of the IGZO film. FIG. 17B is an enlargedmodel diagram showing a region a3 in FIG. 17A. FIG. 17C is a modeldiagram showing the transition of excess oxygen from the site shown inthe model diagram of FIG. 17B. The transition from FIG. 17B to FIG. 17Cis referred to as a third transition of excess oxygen. In the thirdtransition of excess oxygen, excess oxygen diffuses along an In layer.

[(4) Fourth Transition of Excess Oxygen]

FIG. 18A is a model diagram of the IGZO film. FIG. 18B is an enlargedmodel diagram showing a region a4 in FIG. 18A. FIG. 18C is a modeldiagram showing the transition of excess oxygen from the site shown inthe model diagram of FIG. 18B. The transition from FIG. 18B to FIG. 18Cis referred to as a fourth transition of excess oxygen. In the fourthtransition of excess oxygen, excess oxygen diffuses by moving across anIn layer.

In FIGS. 15B and 15C, FIGS. 17B and 17C, and FIGS. 18B and 18C, anoxygen atom numbered “1” is referred to as a first oxygen atom. In FIGS.15B and 15C, FIGS. 17B and 17C, and FIGS. 18B and 18C, an oxygen atomnumbered “2” is referred to as a second oxygen atom. In FIGS. 16B and16C, FIGS. 17B and 17C, and FIGS. 18B and 18C, an oxygen atom numbered“3” is referred to as a third oxygen atom. In FIGS. 16B and 16C, anoxygen atom numbered “4” is referred to as a fourth oxygen atom.

FIG. 19 shows calculation results showing the movement easiness ofexcess oxygen in the cases of the above-described four transitionpatterns. In FIG. 19, the horizontal axis represents the path length ofthe excess oxygen's movement, and the vertical axis represents energyrequired for the movement relative to the energy in the state shown inFIGS. 15A to 15C, FIGS. 16A to 16C, FIGS. 17A to 17C, and FIGS. 18A to18C.

As shown in FIG. 19, the maximum height of the energy barrier Eb(Eb_(max)) in the first transition of excess oxygen is 0.62 eV, and themaximum height of the energy barrier Eb (Eb_(max)) in the secondtransition of excess oxygen is 0.29 eV. The maximum height of the energybarrier Eb (Eb_(max)) in the third transition of excess oxygen is 0.53eV, and the maximum height of the energy barrier Eb (Eb_(max)) in thefourth transition of excess oxygen is 2.38 eV. Thus, the maximum heightsof the energy barrier Eb (Eb_(max)) in the first to third transitions ofexcess oxygen are lower than that in the fourth transition of excessoxygen. This means that the energies required for the first to thirdtransitions of excess oxygen are lower than that required for the fourthtransition of excess oxygen and the first to third transitions of excessoxygen are more likely to occur than the fourth transition of excessoxygen does.

In other words, the first oxygen atom in the model shown in FIG. 15B,FIG. 17B, and FIG. 18B is more likely to move in the direction ofpushing out the second oxygen atom shown in FIGS. 15B and 15C and FIGS.17B and 17C than in the direction of pushing out the third oxygen atomshown in FIGS. 18B and 18C.

The third oxygen atom in the model shown in FIG. 16B is likely to movein the direction of pushing out the fourth oxygen atom shown in FIG.16C. This shows that an oxygen atom moves along the layer of indiumatoms more easily than across the layer of indium atoms. Further, anoxygen atom moves from the InO₂ layer to the (Ga, Zn)O layer and fromthe first (Ga, Zn)O layer to the second (Ga, Zn)O layer more easily thanacross the layer of indium atoms.

[Oxygen Vacancy Transfer]

Next, oxygen vacancy transfer is described. The models in which oneoxygen vacancy exists in one In—O plane of an IGZO film with an atomicratio of In:Ga:Zn=3:1:2 are shown in FIGS. 20A to 20C and FIGS. 21A to21C.

[(5) First Transition of Oxygen Vacancy]

FIG. 20A is a model diagram of the IGZO film. FIG. 20B is an enlargedmodel diagram showing a region a5 in FIG. 20A. FIG. 20C is a modeldiagram showing the transition of an oxygen vacancy from the site shownin the model diagram of FIG. 20B. The transition from FIG. 20B to FIG.20C is referred to as a first transition of an oxygen vacancy. In thefirst transition of an oxygen vacancy, an oxygen vacancy diffuses alongan In layer.

[(6) Second Transition of Oxygen Vacancy]

FIG. 21A is a model diagram of the IGZO film. FIG. 21B is an enlargedmodel diagram showing a region a6 in FIG. 21A. FIG. 21C is a modeldiagram showing the transition of an oxygen vacancy from the site shownin the model diagram of FIG. 21B. The transition from FIG. 21B to FIG.21C is referred to as a second transition of an oxygen vacancy. In thesecond transition of an oxygen vacancy, an oxygen vacancy diffuses bymoving across an In layer.

In FIGS. 20B and 20C and FIGS. 21B and 21C, a dotted circle representsan oxygen vacancy.

FIG. 22 shows calculation results showing the movement easiness of anoxygen vacancy in the cases of the above-described two transitionpatterns. In FIG. 22, the horizontal axis represents the path length ofthe oxygen vacancy's movement, and the vertical axis represents energyrequired for the movement relative to the energy in the state shown inFIG. 20B and FIG. 21B.

As shown in FIG. 22, the maximum height of the energy barrier Eb(Eb_(max)) in the first transition of an oxygen vacancy is 1.81 eV, andthe maximum height of the energy barrier Eb (Eb_(max)) in the secondtransition of an oxygen vacancy is 4.10 eV. The maximum height of theenergy barrier Eb (Eb_(max)) in the first transition of an oxygenvacancy is lower than that in the second transition of an oxygenvacancy. This means that the energy required for the first transition ofan oxygen vacancy is lower than that required for the second transitionof an oxygen vacancy. In other words, the first transition of an oxygenvacancy is more likely to occur than the second transition of an oxygenvacancy does.

This shows that like the movement of excess oxygen described above, anoxygen vacancy moves along the layer of indium atoms more easily thanacross the layer of indium atoms.

[Temperature Dependence of Transition]

Next, in order to compare probabilities of occurrence of theabove-described six transition patterns from another perspective,temperature dependence of these transitions is described below.

Temperature dependence of these transitions is compared based on themovement frequency per unit time. Here, the movement frequency Z (timesper second) at certain temperature is represented by the followingformula using the number of vibrations Zo (times per second) of anoxygen atom in a position where the oxygen atom is chemically stable.

$\begin{matrix}\left\lbrack {{Formula}\mspace{14mu} 1} \right\rbrack & \; \\{Z = {{Zo} \cdot {\exp \left( {- \frac{{Eb}_{{ma}\; x}}{kT}} \right)}}} & \;\end{matrix}$

Note that in Formula 1, Eb_(max) represents the maximum height of theenergy barrier Eb in each transition, k represents Boltzmann constant, Trepresents the absolute temperature, and Zo represents the number ofvibrations of an atom in a stable position. In this embodiment,calculation is performed on the assumption that Zo is 1.0×10¹³ (timesper second), which is a typical Debye frequency.

In the case where T is 300K (27° C.), Z is as follows.

(1) First transition of excess oxygen

In the case where T is 300K, Z is 3.9×10² (times per second).

(2) Second transition of excess oxygen

In the case where T is 300K, Z is 1.2×10⁸ (times per second).

(3) Third transition of excess oxygen

In the case where T is 300K, Z is 1.2×10⁴ (times per second).

(4) Fourth transition of excess oxygen

In the case where T is 300K, Z is 1.0×10⁻²⁷ (times per second).

(5) First transition of oxygen vacancy

In the case where T is 300K, Z is 4.3×10⁻¹⁸ (times per second).

(6) Second transition of oxygen vacancy

In the case where T is 300K, Z is 1.4×10⁻⁵⁶ (times per second).

In the case where T is 723K (450° C.), Z is as follows.

(1) First transition of excess oxygen

In the case where T is 723K, Z is 4.8×10⁸ (times per second).

(2) Second transition of excess oxygen

In the case where T is 723K, Z is 9.2×01⁰ (times per second).

(3) Third transition of excess oxygen

In the case where T is 723K, Z is 2.0×10⁹ (times per second).

(4) Fourth transition of excess oxygen

In the case where T is 723K, Z is 2.5×10⁴ (times per second).

(5) First transition of oxygen vacancy

In the case where T is 723K, Z is 2.5 (times per second).

(6) Second transition of oxygen vacancy

In the case where T is 723K, Z is 2.5×10⁻¹⁶ (times per second).

In view of the above-described calculation results, excess oxygen, inthe case of either T=300 K or T=723 K, moves along the layer of indiumatoms more easily than across the layer of indium atoms. Moreover, anoxygen vacancy also, in the case where either T=300 K or T=723 K, movesalong the layer of indium atoms more easily than across the layer ofindium atoms.

At T=300 K, the movement of excess oxygen along the layer of indiumatoms, the movement of excess oxygen from the InO₂ layer to the (Ga,Zn)O layer, and the movement of excess oxygen from the first (Ga, Zn)Olayer to the second (Ga, Zn)O layer are likely to occur; in contrast,the other transitions are unlikely to occur. At T=723 K, the movement ofan oxygen vacancy along the layer of indium atoms as well as theabove-mentioned movements of excess oxygen is likely to occur; incontrast, the movements of both excess oxygen and an oxygen vacancyacross the layer of indium atoms are difficult.

Note that although the movement of excess oxygen or an oxygen vacancyacross the layer of indium atoms is described above, the same can applyto the movement of excess oxygen or an oxygen vacancy across metalsother than indium which are contained in an oxide semiconductor film.

As described above, it is difficult for both excess oxygen and an oxygenvacancy to move across the layer of indium atoms, in other words, tomove in the c-axis direction.

[Ease of Oxygen Diffusion to Metal Oxide Film and Method for ReducingImpurities in Film]

The above result indicates that the higher the proportion (density) ofcrystal parts with a particular orientation is, the more difficultoxygen is diffused in the thickness direction, and the lower the densityis, the easier oxygen is diffused in the thickness direction. The easeof oxygen diffusion to the metal oxide film can be considered asfollows.

In other words, in a metal oxide film containing both crystal parts witha particular orientation and submicroscopic crystal parts with a randomorientation, a region other than the crystal parts which can beobviously observed in a cross-section image (LGBR) can be a region inwhich oxygen is easily diffused, that is, can serve as oxygen diffusionpaths. As a result, oxygen can be easily supplied through the LGBR tothe crystal parts with a particular orientation, and the amount ofoxygen vacancy in the film can be reduced.

For example, an oxide film which easily releases oxygen is formed to bein contact with the metal oxide film and heat treatment is performed, sothat oxygen released from the oxide film is diffused to the metal oxidefilm in the thickness direction through the LGBR. Through the LGBR,oxygen can be supplied laterally to crystal parts with a particularorientation. Accordingly, oxygen is easily supplied sufficiently to thecrystal parts with a particular orientation and a region other than thecrystal parts in the metal oxide film, which leads to an effectivereduction of oxygen vacancy in the film.

When a hydrogen atom which is not bonded to a metal atom exists in themetal oxide film, an oxygen atom is bonded to the hydrogen atom, andthen OH is formed and fixed. The state in which a certain amount (e.g.,approximately 1×10¹⁷ cm⁻³) of hydrogen trapped in oxygen vacancy (Vo) inthe metal oxide film (such hydrogen is referred to as VoH) is formed inthe deposition at low temperature, whereby generation of OH isinhibited. A certain amount of carrier exists in the metal oxide filmbecause VoH generates a carrier. Thus, the metal oxide film with anincreased carrier concentration can be formed. Although oxygen vacancyis formed concurrently with the deposition, the oxygen vacancy can bereduced by introducing oxygen through the LGBR as described above. Inthis manner, the metal oxide film with a relatively high carrierconcentration and a sufficiently reduced oxygen vacancy can be formed.

A clear grain boundary cannot be observed in the metal oxide filmbecause submicroscopic crystal parts with a random orientation at thetime of the deposition is formed in a region other than crystal partswith a particular orientation. The minute crystal part is positionedbetween a plurality of crystal parts with a particular orientation. Thesubmicroscopic crystal part is bonded to an adjacent crystal part with aparticular orientation by growing in the lateral direction with heat atthe time of the deposition. The submicroscopic crystal part functions asa region where a carrier is generated. The metal oxide film with such astructure is expected to improve field-effect mobility when applied to atransistor.

In addition, plasma treatment in an oxygen atmosphere is preferablyperformed after the metal oxide film is formed and an oxide insulatingfilm such as a silicon oxide film is formed over the metal oxide film.The treatment can reduce the hydrogen concentration as well as cansupply oxygen to the film. For example, during plasma treatment,fluorine which remains in the chamber is doped at the same time to themetal oxide film in some cases. Fluorine exists as a fluorine atom withnegative charges and is bonded to a hydrogen atom with positive chargesby Coulomb force, and then HF is generated. HF is released to theoutside of the metal oxide film during plasma treatment, and as aresult, the hydrogen concentration in the metal oxide film can bereduced. In plasma treatment, H₂O in which an oxygen atom and a hydrogenatom are bonded is released to the outside of the film in some case.

A structure in which a silicon oxide film (or a silicon oxynitride film)is stacked over the metal oxide film is considered. A halogen elementsuch as fluorine in the silicon oxide film does not affect electricalcharacteristics of the metal oxide film because the halogen element isbonded to hydrogen in the film and can exist as HF which is electricallyneutral. Note that Si—F bond is generated in some cases, which is alsoelectrically neutral. Furthermore, HF in the silicon oxide film does notaffect the diffusion of oxygen.

According to the above mechanism, oxygen vacancy in the metal oxide filmcan be reduced and hydrogen which is not bonded to a metal atom in thefilm can be reduced, which leads to the improvement of reliability. Theelectrical characteristics are expected to be improved because thecarrier density of the metal oxide film is greater than or equal to acertain amount.

[Measurement by ESR]

The measurement results of defect states in the metal oxide film byelectron spin resonance (ESR) are described below.

Defect states of the metal oxide film are measured by ESR. The ESRanalysis is performed by generating a magnetic field in a space in whicha specimen is placed and irradiating the specimen with microwaves. Themagnetic flux density (H₀) and/or the microwave frequency (v) arevaried. The frequency (v) and magnetic flux density (H₀) values of themicrowave absorbed by the specimen are used in the equation g=hv/μ_(B)H₀to give the parameter g-factor. Note that h and μ_(B) represent thePlanck constant and the Bohr magneton, respectively, and both areconstants.

The spin density corresponding to a signal at a g-factor of around 1.93(greater than or equal to 1.89 and less than or equal to 1.96) amongsignals observed by ESR represents the number of oxygen vacancies(V_(O)).

The following two kinds of samples (Sample D1 and Sample D2) werefabricated and measured. ESR measurement was performed three times afterthe steps of forming the metal oxide film.

[Fabrication of Samples]

First, a metal oxide film was formed over a quartz substrate. In SampleD1, an approximately 40-nm-thick metal oxide film was formed in a mannersimilar to that of Sample 1. In Sample D2, an approximately 40-nm-thickmetal oxide film was formed in a manner similar to that of Sample 2.

At this step, first ESR measurement was performed.

Next, an approximately 30-nm-thick silicon oxynitride film, anapproximately 100-nm-thick silicon oxynitride film, and an approximately20-nm-thick silicon oxynitride film were stacked over the metal oxidefilm by a plasma CVD method.

At this step, second ESR measurement was performed.

After that, heat treatment was performed at 350° C. for one hour in anitrogen atmosphere.

Next, a 100-nm-thick oxide semiconductor film was formed. The oxidesemiconductor film has a stacked-layer including two layers. A lowerlayer deposited first of the oxide semiconductor film was formed underthe following conditions: the substrate temperature was 170° C.; anoxygen gas with a flow rate of 200 sccm was introduced into a chamber ofthe sputtering apparatus; the pressure was set to 0.6 Pa; an AC power of2.5 kw was applied to a metal oxide target containing indium, gallium,and zinc (with an atomic ratio of In:Ga:Zn=4:2:4.1); and the thicknesswas 10 nm. A layer deposited second of the oxide semiconductor film wasformed under the following conditions: the substrate temperature was170° C.; an argon gas with a flow rate of 180 scm and an oxygen gas witha flow rate of 20 sccm were introduced into a chamber of the sputteringapparatus; the pressure was set to 0.6 Pa; an AC power of 2.5 kw wasapplied to a metal oxide target containing indium, gallium, and zinc(with an atomic ratio of In:Ga:Zn=4:2:4.1); and the thickness was 90nrm.

An approximately 100-nm-thick silicon nitride film was formed by aplasma CVD method.

After that, heat treatment was performed at 250° C. for one hour in anitrogen atmosphere.

The silicon nitride film and the two-layered oxide semiconductor filmdirectly under the silicon nitride film were removed by wet etching.

At this step, third ESR measurement was performed.

[Results of ESR Measurement]

FIG. 23 shows the results of spin density obtained from a signalappearing at a g-factor of around 1.9. The results of the firstmeasurement, the second measurement, and the third measurement for eachsample are shown from the left.

According to the results of first measurement that was performedimmediately after forming the metal oxide film, the spin density wasbelow the lower limit of measurement in each sample. The spin densitywas increased at the second measurement that was performed immediatelyafter forming the silicon oxynitride film. The results suggest that thedamage of the metal oxide film increase the oxygen vacancies in themetal oxide film at the time of the deposition of the silicon oxynitridefilm. However, the spin density is below the lower limit of measurementagain after forming the oxide semiconductor film and heat treatment.This indicates that the oxygen vacancies in the metal oxide film arereduced by the formation of the oxide semiconductor film and the heattreatment after the formation.

When Sample D1 is compared with Sample D2, the spin density of Sample D1that is measured immediately after forming the silicon oxynitride filmis higher than that of Sample D2. However, oxygen vacancies aresufficiently reduced by the formation of the oxide semiconductor filmand the heat treatment in Sample D1 as well.

[Measurement by CPM]

Defect states in the metal oxide film were measured by constantphotocurrent method (CPM).

In CPM measurement, the amount of light with which a surface of a samplebetween terminals is irradiated is adjusted in the state where voltageis applied between two electrodes included in the sample so that aphotocurrent value is kept constant, and then an absorption coefficientis derived from the amount of the irradiation light in each wavelength.In the CPM measurement, when the sample has a defect, the absorptioncoefficient of energy which corresponds to a level at which the defectexists (calculated from a wavelength) is increased. The increase in theabsorption coefficient is multiplied by a constant, whereby the densityof deep defect states (also referred to as dDOS) of the sample can beobtained.

A part of the absorption coefficient which is referred to as an urbachtail due to the band tail is removed from a curve of the absorptioncoefficient obtained by the CPM measurement, whereby the absorptioncoefficient due to the defect levels can be calculated from thefollowing formula. Here, α(E) indicates the absorption coefficient ateach energy level and α_(u) indicates the absorption coefficient due tothe urbach tail.

$\begin{matrix}\left\lbrack {{Formula}\mspace{14mu} 2} \right\rbrack & \; \\{\int{\frac{{\alpha (E)} - \alpha_{u}}{E}{dE}}} & \;\end{matrix}$

[Fabrication of Sample]

The following two kinds of samples (Sample E1 and Sample E2) werefabricated and measured.

A metal oxide film was formed over a glass substrate. In Sample E1, anapproximately 100-nm-thick metal oxide film was formed in a mannersimilar to that in Sample 1. In Sample E2, an approximately 100-nm-thickmetal oxide film was formed in a manner similar to that in Sample 2.

First, an approximately 30-nm-thick silicon oxynitride film, anapproximately 100-nm-thick silicon oxynitride film, and an approximately20-nm-thick silicon oxynitride film were stacked over the metal oxidefilm by a plasma CVD method.

After that, heat treatment was performed at 350° C. for one hour in anitrogen atmosphere.

Next, a 100-nm-thick oxide semiconductor film was formed. The oxidesemiconductor film has a stacked-layer including two layers. A layerdeposited first of the oxide semiconductor film was formed under thefollowing conditions: the substrate temperature was 170° C.; an oxygengas with a flow rate of 200 sccm was introduced into a chamber of thesputtering apparatus; the pressure was set to 0.6 Pa; an AC power of 2.5kw was applied to a metal oxide target containing indium, gallium, andzinc (with an atomic ratio of In:Ga:Zn=4:2:4.1); and the thickness was10 nm. A layer deposited second of the oxide semiconductor film wasformed under the following conditions: the substrate temperature was170° C.; an argon gas with a flow rate of 180 sccm and an oxygen gaswith a flow rate of 20 sccm were introduced into a chamber of thesputtering apparatus; the pressure was set to 0.6 Pa; an AC power of 2.5kw was applied to a metal oxide target containing indium, gallium, andzinc (with an atomic ratio of In:Ga:Zn=4:2:4.1); and the thickness was90 nm.

The heat treatment was then performed at 350° C. for one hour in a mixedgas atmosphere of nitrogen and oxygen.

Then, the oxide semiconductor film was removed by a wet etching method.

A silicon oxynitride film was formed. The silicon oxynitride film wasformed under the following conditions: a mixed gas of SiH₄ at a flowrate of 160 sccm and N₂O at a flow rate of 4000 sccm was used as adeposition gas; the pressure was 200 Pa; the power was 1500 W; thesubstrate temperature was 220° C.; and a plasma CVD method was used. Thethickness of the silicon oxynitride film was about 400 nm.

An opening was formed in the silicon oxynitride film by aphotolithography method.

A stacked film including an approximately 50-nm-thick T1 film, anapproximately 400-nm-thick Al film, and an approximately 100-nm-thick T1film was formed by a sputtering method. Then, the stacked film wasprocessed by a photolithography method, whereby an electrode was formed.

After that, a second heat treatment was performed at 250° C. for onehour in a nitrogen atmosphere.

Through the above steps, Sample E1 and Sample E2 were fabricated.

[Result of CPM Measurement]

FIGS. 24A and 24B show the results of CPM measurement on each of SampleE1 and Sample E2. The horizontal axis indicates photon energy, and thevertical axis indicates absorption coefficient. A thick line in FIGS.24A and 24B indicates a curve of the absorption coefficient of eachsample, a dotted line is a tangent line, and a thin line indicates theabsorption coefficient optically measured.

The value of the urbach tail of Sample E1 was estimated at 68.63 meVfrom FIG. 24A. The absorption coefficient obtained by removing theabsorption coefficient due to the urbach tail from the curve of theabsorption coefficient, that is, the value of the absorption coefficientdue to a defect was 1.36×10⁻³ cm⁻¹. The value of the urbach tail ofSample E2 was estimated at 68.70 meV from FIG. 24B and the value of theabsorption coefficient due to a defect was 1.21×10⁻³ cm⁻¹.

The above results show that there was no clear difference in defectstates between the metal oxide film of Sample 1 and the metal oxide filmof Sample 2.

[Measurement of Defect State Using Transistor Characteristics]

Defect states of a metal oxide film can be estimated from electricalcharacteristics of a transistor in which the metal oxide film was usedas a semiconductor layer. In the description below, the density ofinterface states of the transistor was measured. In addition, a methodfor estimating subthreshold leakage current in consideration of thedensity of interface state and the number of electrons trapped by theinterface state, N_(trap) is described.

The number of electrons trapped by the interface state, N_(trap), can bemeasured by comparing drain current−gate voltage (Id−Vg) of thetransistor that was actually measured and drain current−gate voltage(Id−Vg) characteristics that was calculated.

FIG. 25 illustrates ideal Id−Vg characteristics obtained by calculationand the actually measured Id−Vg characteristics of the transistor when asource voltage Vs is 0 V and a drain voltage Vd is 0.1 V. Note that onlyvalues more than or equal to 1×10⁻¹³ A at which drain voltage Id can beeasily measured were plotted among the measurement results of thetransistor.

A change of the drain current Id with respect to the gate voltage Vg ismore gradual in the actually measured Id−Vg characteristics than in theideal Id−Vg characteristics obtained by calculation. This is probablybecause an electron is trapped by a shallow interface state positionednear energy at the bottom of the conduction band (represented as Ec). Inthis measurement, the density of interface surface N_(it) can beestimated more accurately in consideration of the number of electrons(per unit area and unit energy) trapped by a shallow interface state,N_(trap), with use of the Fermi distribution function.

First, a method for evaluating the number of electrons trapped by aninterface trap state, N_(trap), by using schematic Id−Vg characteristicsillustrated in FIG. 26 is described. The dashed line indicates idealId−Vg characteristics without trap state and is obtained by thecalculation. On the dashed line, a change in gate voltage Vg when thedrain current changes from Id1 to Id2 is represented by ΔV_(id). Thesolid line indicates the actually measured Id−Vg characteristics. On thesolid line, a change in gate voltage Vg when the drain current changesfrom Id1 to Id2 is represented by ΔV_(ex). The potential at the targetinterface when the drain current is Id1, the potential at the targetinterface when the drain current is Id2, and the amount of change arerepresented by ϕ_(it1), ϕ_(it2), and Δϕ_(it), respectively.

The slope of the actually measured values is smaller than that of thecalculated values in FIG. 26, which indicates that ΔV_(ex) is alwayslarger than ΔV_(id). Here, a difference between ΔV_(ex) and ΔV_(id)corresponds to a potential difference that is needed for trapping of anelectron in a shallow interface state. Therefore, ΔQ_(trap) which theamount of change in charge due to trapped electrons can be expressed byFormula (1) shown below.

[Formula 3]

ΔQ _(trap) =−C _(tg)(ΔV _(ex) −ΔV _(id))  (1)

C_(tg) is combined capacitance of an insulator and a semiconductor perunit area. In addition, ΔQ_(trap) can be expressed by Formula (2) byusing the number of trapped electrons N_(trap) (per unit area and perunit energy). Note that q represents elementary charge.

[Formula 4]

ΔQ _(trap) =−qN _(trap)Δϕ_(it)  (2)

Simultaneously solving the formulae (1) and (2) gives Formula (3).

[Formula 5]

−C _(tg)(ΔV _(ex) −ΔV _(id))=−qN _(trap)Δϕ_(it)  (3)

Then, taking the limit zero of A*t in Formula (3) gives Formula (4).

$\begin{matrix}\left\lbrack {{Formula}\mspace{14mu} 6} \right\rbrack & \; \\{N_{trap} = {{\frac{C_{tg}}{q}{\lim\limits_{{\Delta\varphi}_{it}->0}\left( {\frac{\Delta \; V_{ex}}{{\Delta\varphi}_{it}} - \frac{\Delta \; V_{id}}{{\Delta\varphi}_{it}}} \right)}} = {C_{tg}\left( {\frac{\partial V_{ex}}{\partial\varphi_{it}} - \frac{\partial\; V_{id}}{\partial\varphi_{it}}} \right)}}} & (4)\end{matrix}$

In other words, the number of electrons trapped by an interface surface,N_(trap), can be estimated by using the ideal Id−Vg characteristics, theactually measured Id−Vg characteristics, and Formula (4). Note that therelationship between the drain current and the potential at theinterface surface can be obtained by calculation with the devicesimulator described above.

The relationship between the number of electrons N_(trap) per unit areaand per unit energy and the density of interface surface N_(trap) isexpressed by Formula (5).

$\begin{matrix}\left\lbrack {{Formula}\mspace{14mu} 7} \right\rbrack & \; \\{N_{trap} = {\frac{\partial}{\partial\varphi_{it}}{\int_{- \infty}^{\infty}{{N_{it}(E)}{f(E)}{dE}}}}} & (5)\end{matrix}$

Here, f(E) is Fermi distribution function. The N_(trap) obtained fromFormula (4) is fitted with Formula (5) to determine N_(it). Theconduction characteristics including Id<0.1 pA can be obtained by thedevice simulator to which the N_(it) is set.

The actually measured Id−Vg characteristics in FIG. 25 is applied toFormula (4) and the results of extracting N_(t)p are plotted as whitedots in FIG. 27. The vertical axis in FIG. 27 represents Fermi energy Efat the bottom of the conduction band Ec of a semiconductor. The maximumvalue is positioned on the dashed line just under Ec. When taildistribution of Formula (6) is assumed as N_(it) of Formula (5),N_(trap) can be fitted well like the dashed line in FIG. 27. As aresult, the peak value N_(ta), =1.67×10¹³ cm⁻²/eV and the characteristicwidth W_(ta), =0.105 eV are obtained as the fitting parameters.

$\begin{matrix}\left\lbrack {{Formula}\mspace{14mu} 8} \right\rbrack & \; \\{{N_{it}(E)}N_{ta}{\exp \left\lbrack \frac{E - E_{c}}{W_{ta}} \right\rbrack}} & (6)\end{matrix}$

FIGS. 28A and 28B show the inverse calculation results of Id−Vgcharacteristics by feeding back the obtained fitting curve of interfacestate to the calculation using the device simulator. FIG. 28A shows thecalculated Id−Vg characteristics when the drain voltage Vd is 0.1 V and1.8V and the actually measured Id−Vg characteristics when the drainvoltage Vd is 0.1 V and 1.8V. FIG. 28B is a graph in which the draincurrent Id is a logarithm in FIG. 28A.

The curve obtained by the calculation substantially matches with theplot of the actually measured values, which suggests that the calculatedvalues and the measured values are highly reproducible. Accordingly, theabove method is quite appropriate as a method for calculating thedensity of shallow defect states.

[Fabrication of Samples]

Four samples (samples F1 to F4) were fabricated, and density of defectstates in their metal oxide films was measured.

The above-described fabrication method of the sample A1 can be referredto for the fabrication methods of the samples except the depositionconditions of the metal oxide films (oxide semiconductor films).

The formation conditions of a metal oxide film for Sample F1 which wasused for an oxide semiconductor film were similar to those for Sample 1.In other words, the metal oxide film used for Sample F1 was formed underthe following conditions: the substrate temperature was 130° C.; anargon gas with a flow rate of 180 sccm and an oxygen gas with a flowrate of 20 sccm were introduced into a chamber of the sputteringapparatus; the pressure was set to 0.6 Pa; and an AC power of 2.5 kw wasapplied to a metal oxide target containing indium, gallium, and zinc(with an atomic ratio of In:Ga:Zn=4:2:4.1). Note that the oxygen flowrate percentage was 10%. The thickness of the metal oxide film wasapproximately 40 nm.

A metal oxide film for Sample F2 which was used for an oxidesemiconductor film was formed under the following conditions: thesubstrate temperature was 130° C.; an argon gas with a flow rate of 140sccm and an oxygen gas with a flow rate of 60 sccm were introduced intoa chamber of the sputtering apparatus; the pressure was set to 0.6 Pa;and an AC power of 2.5 kw was applied to a metal oxide target containingindium, gallium, and zinc (with an atomic ratio of In:Ga:Zn=4:2:4.1).Note that the oxygen flow rate percentage was 10%. The thickness of themetal oxide film was approximately 40 nm.

The formation conditions of a metal oxide film for Sample F3 which wasused for an oxide semiconductor film were similar to those for Sample 2.In other words, the metal oxide film used for Sample F3 was formed underthe following conditions: the substrate temperature was 170° C.; anargon gas with a flow rate of 180 sccm and an oxygen gas with a flowrate of 20 sccm were introduced into a chamber of the sputteringapparatus; the pressure was set to 0.6 Pa; and an AC power of 2.5 kw wasapplied to a metal oxide target containing indium, gallium, and zinc(with an atomic ratio of In:Ga:Zn=4:2:4.1). Note that the oxygen flowrate percentage was 10%. The thickness of the metal oxide film wasapproximately 40 nm.

The formation conditions of a metal oxide film for Sample F4 which wasused for an oxide semiconductor film were similar to those for Sample 3.In other words, the metal oxide film used for Sample F4 was formed underthe following conditions: the substrate temperature was 170° C.; anargon gas with a flow rate of 140 sccm and an oxygen gas with a flowrate of 60 sccm were introduced into a chamber of the sputteringapparatus; the pressure was set to 0.6 Pa; and an AC power of 2.5 kw wasapplied to a metal oxide target containing indium, gallium, and zinc(with an atomic ratio of In:Ga:Zn=4:2:4.1). Note that the oxygen flowrate percentage was 30%. The thickness of the metal oxide film wasapproximately 40 nm.

Each of the fabricated transistors has a channel length of approximately6 rm and a channel width of approximately 50 pun.

[Density of Defect States]

FIG. 29A shows calculation results of density of defect states of thesamples F1 to F4 by comparing measured electrical characteristics withideal calculation values according to the above-described method.

The results showed that density of defect states of the sample F1 wasreduced to about half those of the samples F2 to F4.

The above results indicated that the oxygen-transmitting property wasimproved because the metal oxide film was formed at a low temperatureand low oxygen flow ratio, and that the amount of diffused oxygen in thefabrication process of the transistor was increased, whereby the amountof defects such as oxygen vacancies in the metal oxide film and at theinterface between the metal oxide film and the insulating film wasreduced.

[Electrical Characteristics 2 of Transistor]

Transistors in which large current can flow were fabricated, and theiron-state currents were compared.

The transistor structure described in Embodiment 2 and shown in FIG. 36was used. Four kinds of samples G1, G2, G3, and G4 were fabricated indifferent formation conditions of semiconductor layers.

[Fabrication of Transistors]

The transistor sample G1 was fabricated by a method similar to that ofthe sample F1. Similarly, the sample G2, the sample G3, and the sampleG4 were fabricated by methods similar to those of the sample F2, thesample F3, and the sample F4, respectively.

Each of the fabricated transistors has a channel length of approximately2 μm and a channel width of approximately 20 μm.

[On-State Current of Transistors]

FIG. 29B shows the on-state currents of the transistor samples. Thedrain currents were measured when the gate voltage Vg and the drainvoltage Vd were 10 V and 5 V, respectively.

As shown in FIG. 29B, the on-state current of the sample G1 wasextremely higher than those of the other samples.

The above results indicated that the oxygen-transmitting property wasimproved because the metal oxide film was formed at a low temperatureand low oxygen flow ratio, and that the amount of diffused oxygen in thefabrication process of the transistor was increased, whereby the amountof defects such as oxygen vacancies in the metal oxide film and at theinterface between the metal oxide film and the insulating film wasreduced. In addition, density of defect states was reduced owing to suchan effect, so that the on-stage current of the transistor was largelyincreased.

A transistor with such improved on-state current is suitably used for aswitch that can be used for rapid charging and discharging of acapacity. As a typical example, the transistor is suitably used for ademultiplexer circuit.

A demultiplexer circuit is a circuit that divides one input signal intotwo or more signals and outputs the signals. When a demultiplexercircuit including the above transistor is provided between a signal linedriver circuit and a signal line of a display device, the number ofterminals in the case of mounting the signal line driver circuit in aform of an IC can be reduced, leading to a display device with a narrowframe that can operate at a higher speed.

[Electrical Characteristics 3 of Transistors]

Miniaturized transistors were fabricated and their electricalcharacteristics were compared.

The transistor structure described in Embodiment 2 and shown in FIG. 36was used. Three kinds of samples H1, H2, and H3 were fabricated indifferent formation conditions of semiconductor layers.

[Fabrication of Transistors]

The above-described fabrication method of the sample A1 can be referredto for the fabrication methods of the samples H1, H2, and H3 except thedeposition conditions of the metal oxide films (oxide semiconductorfilms).

The formation conditions of a metal oxide film for Sample H1 which wasused for an oxide semiconductor film were similar to those for Sample 1.In other words, the metal oxide film used for Sample H1 was formed underthe following conditions: the substrate temperature was 130° C.; anargon gas with a flow rate of 180 sccm and an oxygen gas with a flowrate of 20 sccm were introduced into a chamber of the sputteringapparatus; the pressure was set to 0.6 Pa; and an AC power of 2.5 kw wasapplied to a metal oxide target containing indium, gallium, and zinc(with an atomic ratio of In:Ga:Zn=4:2:4.1). Note that the oxygen flowrate percentage was 10%. The thickness of the metal oxide film wasapproximately 40 nm.

The formation conditions of a metal oxide film for Sample H2 which wasused for an oxide semiconductor film were similar to those for Sample 3.In other words, the metal oxide film used for Sample H2 was formed underthe following conditions: the substrate temperature was 170° C.; anargon gas with a flow rate of 140 sccm and an oxygen gas with a flowrate of 60 sccm were introduced into a chamber of the sputteringapparatus; the pressure was set to 0.6 Pa; and an AC power of 2.5 kw wasapplied to a metal oxide target containing indium, gallium, and zinc(with an atomic ratio of In:Ga:Zn=4:2:4.1). Note that the oxygen flowrate percentage was 30%. The thickness of the metal oxide film wasapproximately 40 nm.

A metal oxide film for Sample H3 which was used for an oxidesemiconductor film was formed under the following conditions: thesubstrate temperature was 170° C.; an argon gas with a flow rate of 100sccm and an oxygen gas with a flow rate of 100 sccm were introduced intoa chamber of the sputtering apparatus; the pressure was set to 0.6 Pa;and an AC power of 2.5 kw was applied to a metal oxide target containingindium, gallium, and zinc (with an atomic ratio of In:Ga:Zn=1:1:1.2).Note that the oxygen flow rate percentage was 50%. The thickness of themetal oxide film was approximately 40 nm.

Two transistors which differ in size were formed using each of thesamples. One was a transistor having a channel length L of 2 μm and achannel width W of 3 μm, and the other was a transistor having a channellength L of 3 μm and a channel width W of 3 μm.

[Electrical Characteristics of Transistor]

As conditions for measuring the Id−Vg characteristics of eachtransistor, a voltage applied to a conductive film functioning as thefirst gate electrode of each transistor (hereinafter the voltage is alsoreferred to as gate voltage (Vg)) and a voltage applied to theconductive film functioning as the second gate electrode of eachtransistor (hereinafter the voltage is also referred to as back gatevoltage (Vbg)) changed from −15 V to +20 V in increments of 0.25 V. Avoltage applied to a conductive film functioning as a source electrode(hereinafter the voltage is also referred to as source voltage (Vs)) was0 V (comm), and a voltage applied to a conductive film functioning as adrain electrode (hereinafter the voltage is also referred to as drainvoltage (Vd)) was 1 V and 10 V.

The Id−Vg characteristics of the transistors having a channel length Lof 2 μm and a channel width of 3 μm included in the samples H1, H2, andH3 are shown in FIGS. 30A, 30B, and 30C, respectively. The Id−Vgcharacteristics of the transistors having a channel length L of 3 μm anda channel width of 3 μm included in the samples H1, H2, and H3 are shownin FIGS. 30D, 30E, and 30F, respectively. The measurement number of thesamples H1, H2, and H3 were 2, 3, and 3, respectively.

The results shown in FIGS. 30A to 30F indicated that favorabletransistor characteristics were obtained from each sample including theminiaturized transistor having a channel length of 2 μm.

When attention is focused on field-effect mobility, Sample H1 shows thehighest value, followed by Samples H2 and H3. When the maximum figuresof field-effect mobility were compared between the transistors eachhaving a channel length L of 2 μm, Sample H1 was approximately twice ashigh as Sample H2 and Sample H1 was approximately six times as high asSample H3.

When attention is focused on a profile of field-effect mobility, SampleH1 has a steeper rising at low gate voltages (e.g., 5 V or lower).

The results indicate that a higher proportion of indium in thecomposition of a metal oxide film increases field-effect mobility andthat the deposition conditions of the metal oxide film at lowtemperature and low oxygen flow rate significantly increasesfield-effect mobility. For example, the field-effect mobility of 30cm²/Vs or higher which is shown in FIG. 30A is comparable to the figureobtained from a p-channel transistor formed using low-temperaturepolysilicon and thus is a non-conventional ultrahigh figure for atransistor formed using an oxide semiconductor.

[Deposition Method of Metal Oxide Film]

A deposition method of the metal oxide film which is one embodiment ofthe present invention is described below.

The metal oxide film used in one embodiment of the present invention canbe formed by a sputtering method while the substrate is heated in anatmosphere containing oxygen.

The substrate temperature during the deposition of the metal oxide filmis higher than or equal to 80° C. and lower than or equal to 150° C.,preferably higher than or equal to 100° C. and lower than or equal to150° C., typified by 130° C. High substrate temperature can result in alarge number of crystal parts with orientation.

The oxygen flow rate ratio (partial pressure of oxygen) during thedeposition is preferably higher than or equal to 1% and lower than 33%,further preferably higher than or equal to 5% and lower than or equal to30%, still further preferably higher than or equal to 5% and lower thanor equal to 20%, and yet still further preferably higher than or equalto 5% and lower than or equal to 15%, typified by 10%. Low oxygen flowrate can result in a large number of crystal parts with a randomorientation in the film.

Accordingly, setting the substrate temperature and the oxygen flow rateduring the deposition within the above ranges can result in a metaloxide film containing both crystal parts with a particular orientationand crystal parts with a random orientation. Furthermore, theproportions of crystal parts with a particular orientation and crystalparts with a random orientation can be adjusted by optimization of thesubstrate temperature and the oxygen flow rate within the above ranges.

An oxide target that can be used for forming the metal oxide film ofthis embodiment is not limited to an In—Ga—Zn-based oxide; for example,an In-

-Zn-based oxide (

is Al, Ga, Y, or Sn) can be used.

When a metal oxide film containing crystal parts is formed as the metaloxide film using a sputtering target containing a polycrystalline oxidehaving a plurality of crystal grains, a metal oxide film withcrystallinity can be obtained easier than the case of using a sputteringtarget not containing a polycrystalline oxide.

The consideration of the deposition mechanism of the metal oxide film ismade below. In the case where a sputtering target contains a pluralityof crystal grains each of which has a layered structure and an interfaceat which the crystal grain is easily cleaved, ion collision with thesputtering target might cleave crystal grains to make plate-like orpellet-like sputtering particles. The obtained plate-like or pellet-likesputtering particles are deposited on a substrate, which probablyresults in formation of a metal oxide film containing nanocrystals. Ametal oxide film containing crystal parts with a particular orientationis likely to be formed when the substrate is heated because thenanocrystals are then bonded to each other or rearranged at a substratesurface.

Note that the above consideration is made on the assumption that asputtering method is used; a sputtering method is particularlypreferable because the crystallinity can be easily adjusted. Note thatinstead of a sputtering method, a pulsed laser deposition (PLD) method,a plasma-enhanced chemical vapor deposition (PECVD) method, a thermalchemical vapor deposition (CVD) method, an atomic layer deposition (ALD)method, a vacuum evaporation method, or the like may be used. As anexample of the thermal CVD method, an MOCVD method can be given.

[Composition and Structure of Metal Oxide Film]

A metal oxide film of one embodiment of the present invention can beapplied to a semiconductor device such as a transistor. A metal oxidefilm which particularly has semiconductor characteristics (hereinafterreferred to as an oxide semiconductor film) will be described.

[Composition]

First, the composition of an oxide semiconductor film is describedbelow.

As described above, the oxide semiconductor film includes indium (In),

(

is Al, Ga, Y, or Sn), and zinc (Zn).

Note that the element

is aluminum, gallium, yttrium, tin, or the like. Alternatively, theelement

can be boron, silicon, titanium, iron, nickel, germanium, zirconium,molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten,magnesium, or the like. Note that two or more of the above elements maybe used in combination as the element

.

Next, preferred ranges of the atomic ratio of indium, the element

, and zinc contained in an oxide semiconductor film according to anembodiment of the present invention are described with reference toFIGS. 31A to 31C. Note that the proportion of oxygen atoms is not shown.The terms of the atomic ratio of indium, the element

, and zinc contained in the oxide semiconductor film are denoted by[In], [

], and [Zn], respectively.

In FIGS. 31A to 31C, broken lines indicate a line where the atomic ratio[In]:[

]:[Zn] is (1+α):(1−α):1, where −1≤α≤1, a line where the atomic ratio[In]:[

]:[Zn] is (1+α):(1−α):2, a line where the atomic ratio [In]:[

]:[Zn] is (1+α):(1−α):3, a line where the atomic ratio [In]:[

]:[Zn] is (1+α):(1−α):4, and a line where the atomic ratio [In]:[

]:[Zn] is (1+α):(1−α):5.

Dashed-dotted lines indicate a line where the atomic ratio [In]:[

]:[Zn] is 1:1:

, where

≥0, a line where the atomic ratio [In]:[

]:[Zn] is 1:2:

, a line where the atomic ratio [In]:[

]:[Zn] is 1:3:

, a line where the atomic ratio [In]:[

]:[Zn] is 1:4:

, a line where the atomic ratio [In]:[

]:[Zn] is 2:1:

, and a line where the atomic ratio [In]:[

]:[Zn] is 5:1:

.

The oxide semiconductor film shown in FIGS. 31A to 31C with an atomicratio of [In]:[

]:[Zn]=0:2:1 or an atomic ratio that is in the neighborhood thereof islikely to have a spinel crystal structure.

FIGS. 31A and 31B show examples of the preferred ranges of the atomicratio of indium, the element

, and zinc contained in an oxide semiconductor film in one embodiment ofthe present invention.

FIG. 32 shows an example of the crystal structure of In

ZnO₄ whose atomic ratio [In]:[

]:[Zn] is 1:1:1. The crystal structure shown in FIG. 32 is In

ZnO₄ observed from a direction parallel to a b-axis. Note that a metalelement in a layer that contains

, and oxygen (hereinafter, this layer is referred to as an “(

,Zn) layer”) in FIG. 33 represents the element

or zinc. In that case, the proportion of the element

is the same as the proportion of zinc. The element

and zinc can be replaced with each other, and their arrangement israndom.

In

ZnO₄ has a layered crystal structure (also referred to as a layeredstructure) and includes one layer that contains indium and oxygen(hereinafter referred to as an In layer) for every two (

,Zn) layers that contain the element

, zinc, and oxygen, as shown in FIG. 32.

Indium and the element

can be replaced with each other. Thus, when the element

in the (

,Zn) layer is replaced with indium, the layer can also be referred to asan (In,

,Zn) layer. In that case, a layered structure that contains one In layerfor every two (In,

,Zn) layers is obtained.

An oxide whose atomic ratio [In]:[

]:[Zn] is 1:1:2 has a layered structure that contains one In layer forevery three (

,Zn) layers. In other words, if [Zn] is higher than [In] and [

], the proportion of the (

,Zn) layer to the In layer becomes higher when the oxide iscrystallized.

Note that in the case where the number of (

,Zn) layers with respect to one In layer is not an integer in the oxide,the oxide might have a plurality of kinds of layered structures wherethe number of (

,Zn) layers with respect to one In layer is an integer. For example, inthe case of [In]:[

]:[Zn]=1:1:1.5, the oxide may have a mix of a layered structureincluding one In layer for every two (

,Zn) layers and a layered structure including one In layer for everythree (

,Zn) layers.

For example, in the case where the oxide semiconductor film is formedwith a sputtering apparatus, a film having an atomic ratio deviated fromthe atomic ratio of a target is formed. In particular, [Zn] in the filmmight be smaller than [Zn] in the target depending on the substratetemperature in deposition.

A plurality of phases (e.g., two phases or three phases) exists in theoxide semiconductor film in some cases. For example, with an atomicratio [In]:[

]:[Zn] that is close to 0:2:1, two phases of a spinel crystal structureand a layered crystal structure are likely to exist. In addition, withan atomic ratio [In]:[

]:[Zn] that is close to 1:0:0, two phases of a bixbyite crystalstructure and a layered crystal structure are likely to exist. In thecase where a plurality of phases exist in the oxide semiconductor film,a grain boundary might be formed between different crystal structures.

In contrast, when the indium content and the zinc content in an oxidesemiconductor film become lower, carrier mobility becomes lower. Thus,with atomic ratios of [In]:[

]:[Zn]=0:1:0 and in the vicinity thereof (e.g., a region C in FIG. 31C),insulation performance becomes better.

Accordingly, an oxide semiconductor in one embodiment of the presentinvention preferably has an atomic ratio represented by a region A inFIG. 31A. With the atomic ratio, a layered structure with high carriermobility and a few grain boundaries is easily obtained.

A region B in FIG. 31B represents an atomic ratio of [In]:[

]:[Zn]=4:2:3 or 4:2:4.1 and the vicinity thereof. The vicinity includesan atomic ratio of [In]:[

]:[Zn]=5:3:4. An oxide semiconductor film with an atomic ratiorepresented by the region B is an excellent oxide semiconductor filmthat has particularly high crystallinity and high carrier mobility.

Note that a condition where an oxide semiconductor film forms a layeredstructure is not uniquely determined by an atomic ratio. There is adifference in the degree of difficulty in forming a layered structureamong atomic ratios. Even with the same atomic ratio, whether a layeredstructure is formed or not depends on a formation condition. Thus, theillustrated regions each represent an atomic ratio with which an oxidesemiconductor film has a layered structure, and boundaries of theregions A to C are not clear.

[Structure in which Oxide Semiconductor Film is Used in Transistor]

Next, a structure in which the oxide semiconductor film is used in atransistor is described.

Note that when the oxide semiconductor film is used for a transistor,carrier scattering or the like at a grain boundary can be reduced ascompared with a transistor using polycrystalline silicon in a channelregion; thus, the transistor can have high field-effect mobility.

The oxide semiconductor film of one embodiment of the present inventionis a film containing both crystal parts with a particular orientationand crystal parts with a random orientation. With the use of the oxidesemiconductor film having such crystallinity, a transistor having bothhigh field-effect mobility and high reliability can be fabricated.

[Carrier Density of Oxide Semiconductor]

The carrier density of an oxide semiconductor film will be describedbelow.

Examples of a factor affecting the carrier density of an oxidesemiconductor film include oxygen vacancy (V_(O)) and impurities in theoxide semiconductor film.

As the amount of oxygen vacancy in the oxide semiconductor filmincreases, the density of defect states increases when hydrogen isbonded to the oxygen vacancy (this state is also referred to as V_(O)H).The density of defect states also increases with an increase in theamount of impurity in the oxide semiconductor film. Hence, the carrierdensity of an oxide semiconductor film can be controlled by controllingthe density of defect states in the oxide semiconductor film.

A transistor using the oxide semiconductor film in a channel region willbe described below.

The carrier density of the oxide semiconductor film is preferablyreduced in order to inhibit the negative shift of the threshold voltageof the transistor or reduce the off-state current of the transistor. Inorder to reduce the carrier density of the oxide semiconductor film, theimpurity concentration in the oxide semiconductor film is reduced sothat the density of defect states can be reduced. In this specificationand the like, a state with a low impurity concentration and a lowdensity of defect states is referred to as a highly purified intrinsicor substantially highly purified intrinsic state. The carrier density ofa highly purified intrinsic oxide semiconductor film is lower than8×10¹⁵ cm⁻³, preferably lower than 1×10¹¹ cm³, and further preferablylower than 1×10¹⁰ cm⁻³ and is higher than or equal to 1×10⁻⁹ cm⁻³.

In contrast, the carrier density of the oxide semiconductor film ispreferably increased in order to improve the on-state current of thetransistor or improve the field-effect mobility of the transistor. Inorder to increase the carrier density of the oxide semiconductor film,the impurity concentration or the density of defect states in the oxidesemiconductor film is slightly increased. Alternatively, the bandgap ofthe oxide semiconductor film is preferably narrowed. For example, anoxide semiconductor film that has a slightly high impurity concentrationor a slightly high density of defect states in the range where afavorable on/off ratio is obtained in the Id−Vg characteristics of thetransistor can be regarded as substantially intrinsic. Furthermore, anoxide semiconductor film that has a high electron affinity and thus hasa narrow bandgap so as to increase the density of thermally excitedelectrons (carriers) can be regarded as substantially intrinsic. Notethat a transistor using an oxide semiconductor film with higher electronaffinity has lower threshold voltage.

The oxide semiconductor film with an increased carrier density hassomewhat n-type conductivity; thus, it can be referred to as a“slightly-n” oxide semiconductor film.

The carrier density of a substantially intrinsic oxide semiconductorfilm is preferably higher than or equal to 1×10 cm⁻³ and lower than1×10¹⁸ cm⁻³, further preferably higher than or equal to 1×10 cm⁻³ andlower than or equal to 1×10¹⁷ cm⁻³, still further preferably higher thanor equal to 1×10⁹ cm⁻³ and lower than or equal to 5×10¹⁶ cm³, yetfurther preferably higher than or equal to 1×10¹⁰ cm⁻³ and lower than orequal to 1×10¹⁶ cm³, and yet still preferably higher than or equal to1×10¹¹ cm⁻³ and lower than or equal to 1×10¹⁵ cm⁻³.

The use of the substantially intrinsic oxide semiconductor film mayimprove the reliability of a transistor. Here, the reason for theimprovement in the reliability of a transistor which uses the oxidesemiconductor film in its channel region is described with reference toFIG. 33. FIG. 33 is an energy band diagram of the transistor which usedthe oxide semiconductor film in its channel region.

In FIG. 33, GE, G1, OS, and SD refer to a gate electrode, a gateinsulating film, an oxide semiconductor film, and a source/drainelectrode, respectively. In other words, FIG. 33 shows an example ofenergy bands of the gate electrode, the gate insulating film, the oxidesemiconductor film, and the source/drain electrode in contact with theoxide semiconductor film.

In FIG. 33, a silicon oxide film and an In—Ga—Zn oxide are used as thegate insulating film and the oxide semiconductor film, respectively. Thetransition level (εf) of a defect that might be formed in the siliconoxide film is assumed to be formed at a position approximately 3.1 eVaway from the conduction band minimum of the gate insulating film.Furthermore, the Fermi level (Ef) of the silicon oxide film at theinterface between the oxide semiconductor and the silicon oxide filmwhen the gate voltage (Vg) is 30 V is assumed to be formed at a positionapproximately 3.6 eV away from the conduction band minimum of the gateinsulating film. Note that the Fermi level of the silicon oxide filmchanges depending on the gate voltage. For example, the Fermi level (Ef)of the silicon oxide film at the interface between the oxidesemiconductor film and the silicon oxide film is lowered as the gatevoltage is increased. A white circle and x in FIG. 33 represent anelectron (carrier) and a defect state in the silicon oxide film,respectively.

As shown in FIG. 33, when thermal excitation of carriers occurs duringthe application of a gate voltage, the carriers are trapped by thedefect states (x in the diagram) and the charge state of each of thedefect states is changed from positive (“+”) to neutral (“0”). In otherwords, when the value obtained by adding the thermal excitation energyto the Fermi level (Ef) of the silicon oxide film becomes greater thanthe transition level (ef) of the defect, the charge state of the defectstates in the silicon oxide film is changed from positive to neutral, sothat the threshold voltage of the transistor shifts in the positivedirection.

When an oxide semiconductor film with a different electron affinity isused, the Fermi level of the interface between the gate insulating filmand the oxide semiconductor film might be changed. When an oxidesemiconductor film with a higher electron affinity is used, theconduction band minimum of the gate insulating film becomes relativelyhigh at the interface between the gate insulating film and the oxidesemiconductor film or in the vicinity of the interface. In that case,the defect state (x in FIG. 33) which might be formed in the gateinsulating film also becomes relatively high, so that the energydifference between the Fermi level of the gate insulating film and theFermi level of the oxide semiconductor film is increased. The increasein energy difference leads to a reduction in the amount of chargetrapped in the gate insulating film. For example, a change in the chargestate of the defect states which might be formed in the silicon oxidefilm becomes smaller, so that a change in the threshold voltage of thetransistor by gate bias temperature (GBT) stress can be reduced.

Charge trapped by the defect states in the oxide semiconductor filmtakes a long time to be released and may behave like fixed charge. Thus,the transistor in which a channel region is formed in the oxidesemiconductor film and which has a high impurity concentration and ahigh density of defect states might have unstable electricalcharacteristics.

To obtain stable electrical characteristics of the transistor, it iseffective to reduce the concentration of impurities in the oxidesemiconductor film. In order to reduce the concentration of impuritiesin the oxide semiconductor film, the concentration of impurities in afilm which is adjacent to the oxide semiconductor film is preferablyreduced. As examples of the impurities, hydrogen, nitrogen, alkalimetal, alkaline earth metal, iron, nickel, silicon, and the like aregiven.

Here, the influence of impurities in the oxide semiconductor film isdescribed.

When silicon or carbon that is one of Group 14 elements is contained inthe oxide semiconductor, defect states are formed. Thus, theconcentration of silicon or carbon in the oxide semiconductor film andaround an interface with the oxide semiconductor film (measured bysecondary ion mass spectrometry (SIMS)) is set lower than or equal to2×10¹⁸ atoms/cm³, and preferably lower than or equal to 2×10¹⁷atoms/cm³.

When the oxide semiconductor film contains alkali metal or alkalineearth metal, defect states are formed and carriers are generated, insome cases. Thus, a transistor including an oxide semiconductor filmthat contains alkali metal or alkaline earth metal is likely to benormally-on. Therefore, it is preferable to reduce the concentration ofalkali metal or alkaline earth metal in the oxide semiconductor.Specifically, the concentration of alkali metal or alkaline earth metalin the oxide semiconductor film measured by SIMS is set lower than orequal to 1×10¹⁸ atoms/cm³, and preferably lower than or equal to 2×10¹⁶atoms/cm³.

When the oxide semiconductor film contains nitrogen, the oxidesemiconductor film easily becomes n-type by generation of electronsserving as carriers and an increase of carrier density. Thus, atransistor whose semiconductor includes an oxide semiconductor film thatcontains nitrogen is likely to be normally-on. For example, theconcentration of nitrogen in the oxide semiconductor, which is measuredby SIMS, can be lower than 5×10¹⁹ atoms/cm³, further preferably lowerthan or equal to 5×10¹⁸ atoms/cm³, still further preferably lower thanor equal to 1×10¹⁸ atoms/cm³, further preferably lower than or equal to5×10¹⁷ atoms/cm³.

Hydrogen contained in an oxide semiconductor film reacts with oxygenbonded to a metal atom to be water, and thus causes an oxygen vacancy,in some cases. Due to entry of hydrogen into the oxygen vacancy, anelectron serving as a carrier is generated in some cases. Furthermore,in some cases, bonding of part of hydrogen to oxygen bonded to a metalatom causes generation of an electron serving as a carrier. Thus, atransistor including an oxide semiconductor film that contains hydrogenis likely to be normally-on. Accordingly, it is preferable that hydrogenin the oxide semiconductor film be reduced as much as possible.Specifically, the hydrogen concentration of the oxide semiconductor filmmeasured by SIMS is set lower than 1×10²⁰ atoms/cm³, preferably lowerthan 1×10¹⁹ atoms/cm³, further preferably lower than 5×10¹⁸ atoms/cm³,and still further preferably lower than 1×10¹⁸ atoms/cm³.

When an oxide semiconductor film with sufficiently reduced impurityconcentration is used for a channel formation region in a transistor,the transistor can have stable electrical characteristics.

The energy gap of the oxide semiconductor film is preferably 2 eV ormore, 2.5 eV or more, or 3 eV or more.

The thickness of the oxide semiconductor film is greater than or equalto 3 nm and less than or equal to 200 nm, preferably greater than orequal to 3 nm and less than or equal to 100 nm, further preferablygreater than or equal to 3 nm and less than or equal to 60 nm.

When the oxide semiconductor film is an In-M-Zn oxide, as the atomicratio of metal elements in a sputtering target used for formation of theIn-M-Zn oxide, In:M:Zn=1:1:0.5, In:M:Zn=1:1:1, In:M:Zn=1:1:1.2,In:M:Zn=2:1:1.5, In:M:Zn=2:1:2.3, In:M:Zn=2:1:3, In:M:Zn=3:1:2,In:M:Zn=4:2:4.1, In:M:Zn=5:1:7, or the like is preferable.

At least part of this embodiment can be implemented in combination withany of the other embodiments described in this specification asappropriate.

Embodiment 2

In this embodiment, a transistor that can be used for the semiconductordevice of one embodiment of the present invention will be described.

In this embodiment, a top-gate transistor will be described withreference to FIGS. 34A to 34C, FIGS. 35A to 35C, FIGS. 36A and 36B,FIGS. 37A and 37B, FIGS. 38A and 38B, FIGS. 39A and 39B, FIGS. 40A and40B, FIGS. 41A and 41B, FIGS. 42A and 42B, FIGS. 43A and 43B, FIGS. 44Aand 44B, and FIGS. 45A to 45C.

[Structure Example 1 of Transistor]

FIG. 34A is a top view of a transistor 100. FIG. 34B is across-sectional view taken along the dashed-dotted line X1-X2 in FIG.34A. FIG. 34C is a cross-sectional view taken along the dashed-dottedline Y1-Y2 in FIG. 34A. For clarity, some components such as aninsulating film 110 are not illustrated in FIG. 34A. As in FIG. 34A,some components are not illustrated in some cases in top views oftransistors described below. In addition, the direction of thedashed-dotted line X1-X2 may be referred to as the channel length (L)direction, and the direction of the dashed-dotted line Y1-Y2 may bereferred to as the channel width (W) direction.

The transistor 100 illustrated in FIGS. 34A to 34C includes aninsulating film 104 over a substrate 102, an oxide semiconductor film108 over the insulating film 104, the insulating film 110 over the oxidesemiconductor film 108, a conductive film 112 over the insulating film110, and an insulating film 116 over the insulating film 104, the oxidesemiconductor film 108, and the conductive film 112. The oxidesemiconductor film 108 includes a channel region 108 i overlapping withthe conductive film 112, a source region 108 s in contact with theinsulating film 116, and a drain region 108 d in contact with theinsulating film 116.

The insulating film 116 contains nitrogen or hydrogen. The insulatingfilm 116 is in contact with the source region 108 s and the drain region108 d, so that nitrogen or hydrogen that is contained in the insulatingfilm 116 is added to the source region 108 s and the drain region 108 d.The source region 108 s and the drain region 108 d each have a highcarrier density when nitrogen or hydrogen is added thereto.

The transistor 100 may further include an insulating film 118 over theinsulating film 116, a conductive film 120 a electrically connected tothe source region 108 s through an opening 141 a provided in theinsulating films 116 and 118, and a conductive film 120 b electricallyconnected to the drain region 108 d through an opening 141 b provided inthe insulating films 116 and 118.

In this specification and the like, the insulating film 104 may bereferred to as a first insulating film, the insulating film 110 may bereferred to as a second insulating film, the insulating film 116 may bereferred to as a third insulating film, and the insulating film 118 maybe referred to as a fourth insulating film. The conductive film 112functions as a gate electrode. The conductive film 120 a and theconductive film 120 b function as a source electrode and a drainelectrode, respectively.

The insulating film 110 functions as a gate insulating film. Theinsulating film 110 includes an excess oxygen region. Since theinsulating film 110 includes the excess oxygen region, excess oxygen canbe supplied to the channel region 108 i included in the oxidesemiconductor film 108. As a result, oxygen vacancies that might beformed in the channel region 108 i can be filled with excess oxygen,which can provide a highly reliable semiconductor device.

To supply excess oxygen to the oxide semiconductor film 108, excessoxygen may be supplied to the insulating film 104 that is formed underthe oxide semiconductor film 108. In that case, excess oxygen containedin the insulating film 104 might also be supplied to the source region108 s and the drain region 108 d included in the oxide semiconductorfilm 108. When excess oxygen is supplied to the source region 108 s andthe drain region 108 d, the resistance of the source region 108 s andthe drain region 108 d might be increased.

In contrast, in the structure in which the insulating film 110 formedover the oxide semiconductor film 108 contains excess oxygen, excessoxygen can be selectively supplied only to the channel region 108 i.Alternatively, the carrier density of the source and drain regions 108 sand 108 d can be selectively increased after excess oxygen is suppliedto the channel region 108 i and the source and drain regions 108 s and108 d, in which case an increase in the resistance of the source anddrain regions 108 s and 108 d can be prevented.

Furthermore, each of the source region 108 s and the drain region 108 dincluded in the oxide semiconductor film 108 preferably contains anelement that forms an oxygen vacancy or an element that is bonded to anoxygen vacancy. Typical examples of the element that forms an oxygenvacancy or the element that is bonded to an oxygen vacancy includehydrogen, boron, carbon, nitrogen, fluorine, phosphorus, sulfur,chlorine, titanium, and a rare gas. Typical examples of the rare gaselement include helium, neon, argon, krypton, and xenon. The elementthat forms an oxygen vacancy is diffused from the insulating film 116 tothe source region 108 s and the drain region 108 d in the case where theinsulating film 116 contains one or more such elements. In addition oralternatively, the element that forms an oxygen vacancy is added to thesource region 108 s and the drain region 108 d by impurity additiontreatment.

An impurity element added to the oxide semiconductor film cuts a bondbetween a metal element and oxygen in the oxide semiconductor film, sothat an oxygen vacancy is formed. Alternatively, when an impurityelement is added to the oxide semiconductor film, oxygen bonded to ametal element in the oxide semiconductor film is bonded to the impurityelement and detached from the metal element, so that an oxygen vacancyis formed. As a result, the oxide semiconductor film has a highercarrier density, and thus, the conductivity thereof becomes higher.

Next, details of the components of the semiconductor device in FIGS. 34Ato 34C will be described.

[Substrate]

The substrate 102 can be formed using a material having heat resistancehigh enough to withstand heat treatment in the manufacturing process.

Specifically, non-alkali glass, soda-lime glass, potash glass, crystalglass, quartz, sapphire, or the like can be used. Alternatively, aninorganic insulating film may be used. Examples of the inorganicinsulating film include a silicon oxide film, a silicon nitride film, asilicon oxynitride film, and an aluminum oxide film.

The non-alkali glass may have a thickness of greater than or equal to0.2 mm and less than or equal to 0.7 mm, for example. The non-alkaliglass may be polished to obtain the above thickness.

As the non-alkali glass, a large-area glass substrate having any of thefollowing sizes can be used: the 6th generation (1500 mm×1850 mm), the7th generation (1870 mm×2200 mm), the 8th generation (2200 mm×2400 mm),the 9th generation (2400 mm×2800 mm), and the 10th generation (2950mm×3400 mm). Thus, a large-sized display device can be manufactured.

Alternatively, as the substrate 102, a single-crystal semiconductorsubstrate or a polycrystalline semiconductor substrate made of siliconor silicon carbide, a compound semiconductor substrate made of silicongermanium or the like, an SOI substrate, or the like may be used.

For the substrate 102, an inorganic material such as a metal may beused. Examples of the inorganic material such as a metal includestainless steel and aluminum.

Alternatively, for the substrate 102, an organic material such as aresin, a resin film, or plastic may be used. Examples of the resin filminclude polyester, polyolefin, polyamide (e.g., nylon or aramid),polyimide, polycarbonate, polyurethane, an acrylic resin, an epoxyresin, polyethylene terephthalate (PET), polyethylene naphthalate (PEN),polyether sulfone (PES), and a resin having a siloxane bond.

For the substrate 102, a composite material of an inorganic material andan organic material may be used. Examples of the composite materialinclude a resin film to which a metal plate or a thin glass plate isbonded, a resin film into which a fibrous or particulate metal or afibrous or particulate glass is dispersed, and an inorganic materialinto which a fibrous or particulate resin is dispersed.

The substrate 102 can at least support films or layers formed thereoveror thereunder and may be one or more of an insulating film, asemiconductor film, and a conductive film.

[First Insulating Film]

The insulating film 104 can be formed by a sputtering method, a CVDmethod, an evaporation method, a pulsed laser deposition (PLD) method, aprinting method, a coating method, or the like as appropriate. Forexample, the insulating film 104 can be formed to have a single-layerstructure or stacked-layer structure of an oxide insulating film and/ora nitride insulating film. To improve the properties of the interfacewith the oxide semiconductor film 108, at least a region of theinsulating film 104 which is in contact with the oxide semiconductorfilm 108 is preferably formed using an oxide insulating film. When theinsulating film 104 is formed using an oxide insulating film from whichoxygen is released by heating, oxygen contained in the insulating film104 can be moved to the oxide semiconductor film 108 by heat treatment.

The thickness of the insulating film 104 can be greater than or equal to50 nm, greater than or equal to 100 nm and less than or equal to 3000nm, or greater than or equal to 200 nm and less than or equal to 1000nm. By increasing the thickness of the insulating film 104, the amountof oxygen released from the insulating film 104 can be increased, andinterface states at the interface between the insulating film 104 andthe oxide semiconductor film 108 and oxygen vacancies included in thechannel region 108 i of the oxide semiconductor film 108 can be reduced.

For example, the insulating film 104 can be formed to have asingle-layer structure or stacked-layer structure of a silicon oxidefilm, a silicon oxynitride film, a silicon nitride oxide film, a siliconnitride film, an aluminum oxide film, a hafnium oxide film, a galliumoxide film, a Ga—Zn oxide film, or the like. In this embodiment, theinsulating film 104 has a stacked-layer structure of a silicon nitridefilm and a silicon oxynitride film. With the insulating film 104 havingsuch a layered structure including a silicon nitride film as a lowerlayer and a silicon oxynitride film as an upper layer, oxygen can beefficiently introduced into the oxide semiconductor film 108.

[Oxide Semiconductor Film]

As the oxide semiconductor film 108, the metal oxide film described inEmbodiment 1 can be used.

It is suitable to form the oxide semiconductor film 108 by a sputteringmethod because the film density can be high. In the case where the oxidesemiconductor film 108 is formed by a sputtering method, a rare gas(argon, as a typical example), oxygen, or a mixed gas of a rare gas andoxygen is used as a sputtering gas, as appropriate. In addition,increasing the purity of a sputtering gas is necessary. For example, asan oxygen gas or an argon gas used for a sputtering gas, a gas that ishighly purified to have a dew point of −60° C. or lower, preferably−100° C. or lower, is used, whereby entry of moisture or the like intothe oxide semiconductor film 108 can be minimized.

In the case where the oxide semiconductor film 108 is formed by asputtering method, a chamber in a sputtering apparatus is preferablyevacuated to be a high vacuum state (to the degree of about 5×10⁻⁷ Pa to1×10⁻⁴ Pa) with an adsorption vacuum evacuation pump such as a cryopumpin order to remove water or the like, which serves as an impurity forthe oxide semiconductor film 108, as much as possible. In particular,the partial pressure of gas molecules corresponding to H₂O (gasmolecules corresponding to m/z=18) in the chamber in the standby mode ofthe sputtering apparatus is preferably lower than or equal to 1×10⁻⁴ Pa,further preferably lower than or equal to 5×10⁻⁵ Pa.

[Second Insulating Film]

The insulating film 110 functions as a gate insulating film of thetransistor 100. In addition, the insulating film 110 has a function ofsupplying oxygen to the oxide semiconductor film 108, particularly tothe channel region 108 i. The insulating film 110 can be formed to havea single-layer structure or a stacked-layer structure of an oxideinsulating film or a nitride insulating film, for example. To improvethe interface properties with the oxide semiconductor film 108, a regionwhich is in the insulating film 110 and in contact with the oxidesemiconductor film 108 is preferably formed using at least an oxideinsulating film. For example, a silicon oxide film, a silicon oxynitridefilm, a silicon nitride oxide film, or a silicon nitride film may beused as the insulating film 110.

The thickness of the insulating film 110 can be greater than or equal to5 nm and less than or equal to 400 nm, greater than or equal to 5 nm andless than or equal to 300 nm, or greater than or equal to 10 nm and lessthan or equal to 250 nm.

It is preferable that the insulating film 110 have few defects andtypically have as few signals observed by electron spin resonance (ESR)spectroscopy as possible. Examples of the signals include a signal dueto an E′ center observed at a g-factor of 2.001. Note that the E′ centeris due to the dangling bond of silicon. As the insulating film 110, asilicon oxide film or a silicon oxynitride film whose spin density of asignal due to the E′ center is lower than or equal to 3×10¹⁷ spins/cm³and preferably lower than or equal to 5×10¹⁶ spins/cm³ may be used.

In addition to the above-described signal, a signal due to nitrogendioxide (NO₂) might be observed in the insulating film 110. The signalis divided into three signals according to the N nuclear spin; a firstsignal, a second signal, and a third signal. The first signal isobserved at a g-factor of greater than or equal to 2.037 and less thanor equal to 2.039. The second signal is observed at a g-factor ofgreater than or equal to 2.001 and less than or equal to 2.003. Thethird signal is observed at a g-factor of greater than or equal to 1.964and less than or equal to 1.966.

It is suitable to use an insulating film whose spin density of a signaldue to nitrogen dioxide (NO₂) is higher than or equal to 1×10¹⁷spins/cm³ and lower than 1×10¹⁸ spins/cm³ as the insulating film 110,for example.

Note that a nitrogen oxide (NO_(x)) such as nitrogen dioxide (NO₂) formsa state in the insulating film 110. The state is positioned in theenergy gap of the oxide semiconductor film 108. Thus, when nitrogenoxide (NO_(x)) is diffused to the interface between the insulating film110 and the oxide semiconductor film 108, an electron might be trappedby the state on the insulating film 110 side. As a result, the trappedelectron remains in the vicinity of the interface between the insulatingfilm 110 and the oxide semiconductor film 108, leading to a positiveshift of the threshold voltage of the transistor. Accordingly, the useof a film with a low nitrogen oxide content as the insulating film 110can reduce a shift of the threshold voltage of the transistor.

As an insulating film that releases a small amount of nitrogen oxide(NO_(x)), for example, a silicon oxynitride film can be used. Thesilicon oxynitride film releases more ammonia than nitrogen oxide(NO_(x)) in thermal desorption spectroscopy (TDS); the typical releasedamount of ammonia is greater than or equal to 1×10¹⁸/cm³ and less thanor equal to 5×10¹⁹/cm³. Note that the released amount of ammonia is thetotal amount of ammonia released by heat treatment in a range of 50° C.to 650° C. or 50° C. to 550° C. in TDS.

Since nitrogen oxide (NO_(x)) reacts with ammonia and oxygen in heattreatment, the use of an insulating film that releases a large amount ofammonia reduces nitrogen oxide (NO_(x)).

Note that in the case where the insulating film 110 is analyzed by SIMS,nitrogen concentration in the film is preferably lower than or equal to6×10²⁰ atoms/cm³.

The insulating film 110 may be formed using a high-k material such ashafnium silicate (HfSiO_(x)), hafnium silicate containing nitrogen(HfSi_(x)O_(y)N_(z)), hafnium aluminate containing nitrogen(HfAl_(x)O_(y)N_(z)), or hafnium oxide.

[Third Insulating Film]

The insulating film 116 contains nitrogen or hydrogen. The insulatingfilm 116 may contain fluorine. As the insulating film 116, for example,a nitride insulating film can be used. The nitride insulating film canbe formed using silicon nitride, silicon nitride oxide, siliconoxynitride, silicon nitride fluoride, silicon fluoronitride, or thelike. The hydrogen concentration in the insulating film 116 ispreferably higher than or equal to 1×10²² atoms/cm³. Furthermore, theinsulating film 116 is in contact with the source region 108 s and thedrain region 108 d of the oxide semiconductor film 108. Thus, theconcentration of an impurity (nitrogen or hydrogen) in the source region108 s and the drain region 108 d in contact with the insulating film 116is increased, leading to an increase in the carrier density of thesource region 108 s and the drain region 108 d.

[Fourth Insulating Film]

As the insulating film 118, an oxide insulating film can be used.Alternatively, a layered film of an oxide insulating film and a nitrideinsulating film can be used as the insulating film 118. The insulatingfilm 118 can be formed using, for example, silicon oxide, siliconoxynitride, silicon nitride oxide, aluminum oxide, hafnium oxide,gallium oxide, or Ga—Zn oxide.

Furthermore, the insulating film 118 preferably functions as a barrierfilm against hydrogen, water, and the like from the outside.

The thickness of the insulating film 118 can be greater than or equal to30 nm and less than or equal to 500 nm, or greater than or equal to 100nm and less than or equal to 400 nm.

[Conductive Film]

The conductive films 112, 120 a, and 120 b can be formed by a sputteringmethod, a vacuum evaporation method, a PLD method, a thermal CVD method,or the like. As each of the conductive films 112, 120 a, and 120 b, aconductive metal film, a conductive film that has a function ofreflecting visible light, or a conductive film having a function oftransmitting visible light may be used.

A material containing a metal element selected from aluminum, gold,platinum, silver, copper, chromium, tantalum, titanium, molybdenum,tungsten, nickel, iron, cobalt, palladium, and manganese can be used forthe metal film having conductivity. Alternatively, an alloy containingany of the above metal elements may be used.

For the metal film having conductivity, specifically a two-layerstructure in which a copper film is stacked over a titanium film, atwo-layer structure in which a copper film is stacked over a titaniumnitride film, a two-layer structure in which a copper film is stackedover a tantalum nitride film, a three-layer structure in which atitanium film, a copper film, and a titanium film are stacked in thisorder, or the like may be used. In particular, a conductive filmcontaining a copper element is preferably used because the resistancecan be reduced. As an example of the conductive film containing a copperelement, an alloy film containing copper and manganese is given. Thealloy film is favorable because it can be processed by a wet etchingmethod.

Note that a tantalum nitride film is preferably used for the conductivefilms 112, 120 a, and 120 b. A tantalum nitride film has conductivityand a high barrier property against copper or hydrogen. Because atantalum nitride film releases little hydrogen from itself, it can befavorably used as a metal film in contact with the oxide semiconductorfilm 108 or a metal film in the vicinity of the oxide semiconductor film108.

As the conductive film having conductivity, a conductive macromoleculeor a conductive polymer may be used.

For the conductive film having a function of reflecting visible light, amaterial containing a metal element selected from gold, silver, copper,and palladium can be used. In particular, a conductive film containing asilver element is preferably used because reflectance of visible lightcan be improved.

For the conductive film having a function of transmitting visible light,a material containing an element selected from indium, tin, zinc,gallium, and silicon can be used. Specifically, an In oxide, a Zn oxide,an In—Sn oxide (also referred to as ITO), an In—Sn—Si oxide (alsoreferred to as ITSO), an In—Zn oxide, an In—Ga—Zn oxide, or the like canbe used.

As the conductive film having a function of transmitting visible light,a film containing graphene or graphite may be used. The film containinggraphene can be formed in the following manner: a film containinggraphene oxide is formed and is reduced. As a reducing method, a methodwith application of heat, a method using a reducing agent, or the likecan be employed.

The conductive films 112, 120 a, and 120 b can be formed by electrolessplating. As a material that can be deposited by electroless plating, forexample, one or more elements selected from Cu, Ni, Al, Au, Sn, Co, Ag,and Pd can be used. It is further favorable to use Cu or Ag because theresistance of the conductive film can be reduced.

When the conductive film is formed by electroless plating, a diffusionprevention film may be formed under the conductive film to preventcomponent elements of the conductive film from diffusing outward. A seedlayer that can make the conductive film grow may be formed between thediffusion prevention film and the conductive film. The diffusionprevention film can be formed by sputtering, for example. For thediffusion prevention film, a tantalum nitride film or a titanium nitridefilm can be used, for example. The seed layer can be formed byelectroless plating. For the seed layer, a material similar to thematerial for the conductive film that can be formed by electrolessplating can be used.

Note that an oxide semiconductor typified by an In—Ga—Zn oxide may beused for the conductive film 112. The oxide semiconductor can have ahigh carrier density when nitrogen or hydrogen is supplied from theinsulating film 116. In other words, the oxide semiconductor functionsas an oxide conductor (OC). Accordingly, the oxide semiconductor can beused for a gate electrode.

The conductive film 112 can have, for example, a single-layer structureof an oxide conductor (OC), a single-layer structure of a metal film, ora stacked-layer structure of an oxide conductor (OC) and a metal film.

Note that it is suitable that the conductive film 112 has a single-layerstructure of a light-shielding metal film or a stacked-layer structureof an oxide conductor (OC) and a light-shielding metal film because thechannel region 108 i formed under the conductive film 112 can beshielded from light. In the case where the conductive film 112 has astacked-layer structure of an oxide semiconductor or an oxide conductor(OC) and a light-shielding metal film, formation of a metal film (e.g.,a titanium film or a tungsten film) over the oxide semiconductor or theoxide conductor (OC) produces any of the following effects: theresistance of the oxide semiconductor or the oxide conductor (OC) isreduced by the diffusion of the constituent element of the metal film tothe oxide semiconductor or oxide conductor (OC) side, the resistance isreduced by damage (e.g., sputtering damage) during the deposition of themetal film, and the resistance is reduced when oxygen vacancies areformed by the diffusion of oxygen in the oxide semiconductor or theoxide conductor (OC) to the metal film.

The thickness of the conductive films 112, 120 a, and 120 b can begreater than or equal to 30 nm and less than or equal to 500 nm, orgreater than or equal to 100 nm and less than or equal to 400 nm.

[Structure Example 2 of Transistor]

Next, a structure of a transistor different from that in FIGS. 34A to34C is described with reference to FIGS. 35A to 35C.

FIG. 35A is a top view of a transistor 100A. FIG. 35B is across-sectional view taken along dashed-dotted line X1-X2 in FIG. 35A.FIG. 35C is a cross-sectional view taken along dashed-dotted line Y1-Y2in FIG. 35A.

The transistor 100A illustrated in FIGS. 35A to 35C includes aconductive film 106 over the substrate 102, the insulating film 104 overthe conductive film 106, the oxide semiconductor film 108 over theinsulating film 104, the insulating film 110 over the oxidesemiconductor film 108, the conductive film 112 over the insulating film110, and the insulating film 116 over the insulating film 104, the oxidesemiconductor film 108, and the conductive film 112. The oxidesemiconductor film 108 includes the channel region 108 i overlappingwith the conductive film 112, the source region 108 s in contact withthe insulating film 116, and the drain region 108 d in contact with theinsulating film 116.

The transistor 100A includes the conductive film 106 and an opening 143in addition to the components of the transistor 100 described above.

Note that the opening 143 is provided in the insulating films 104 and110. The conductive film 106 is electrically connected to the conductivefilm 112 through the opening 143. Thus, the same potential is applied tothe conductive film 106 and the conductive film 112. Note that differentpotentials may be applied to the conductive film 106 and the conductivefilm 112 without providing the opening 143. Alternatively, theconductive film 106 may be used as a light-shielding film withoutproviding the opening 143. When the conductive film 106 is formed usinga light-shielding material, for example, light irradiating the channelregion 108 i from the bottom can be reduced.

In the case of the structure of the transistor 100A, the conductive film106 functions as a first gate electrode (also referred to as abottom-gate electrode), the conductive film 112 functions as a secondgate electrode (also referred to as a top-gate electrode), theinsulating film 104 functions as a first gate insulating film, and theinsulating film 110 functions as a second gate insulating film.

The conductive film 106 can be formed using a material similar to theabove-described materials of the conductive films 112, 120 a, and 120 b.It is particularly suitable to use a material containing copper as theconductive film 106 because the resistance can be reduced. It isfavorable that, for example, each of the conductive films 106, 120 a,and 120 b has a stacked-layer structure in which a copper film is over atitanium nitride film, a tantalum nitride film, or a tungsten film. Inthat case, by using the transistor 100A as a pixel transistor and/or adriving transistor of a display device, parasitic capacitance generatedbetween the conductive films 106 and 120 a and between the conductivefilms 106 and 120 b can be reduced. Thus, the conductive films 106, 120a, and 120 b can be used not only as the first gate electrode, thesource electrode, and the drain electrode of the transistor 100A, butalso as power source supply wirings, signal supply wirings, connectionwirings, or the like of the display device.

In this manner, unlike the transistor 100 described above, thetransistor 100A in FIGS. 35A to 35C has a structure in which aconductive film functioning as a gate electrode is provided over andunder the oxide semiconductor film 108. As in the transistor 100A, asemiconductor device of one embodiment of the present invention may havea plurality of gate electrodes.

As illustrated in FIGS. 35B and 35C, the oxide semiconductor film 108faces the conductive film 106 functioning as a first gate electrode andthe conductive film 112 functioning as a second gate electrode and ispositioned between the two conductive films functioning as the gateelectrodes.

Furthermore, the length of the conductive film 112 in the channel widthdirection is larger than the length of the oxide semiconductor film 108in the channel width direction. In the channel width direction, thewhole oxide semiconductor film 108 is covered with the conductive film112 with the insulating film 110 placed therebetween. Since theconductive film 112 is connected to the conductive film 106 through theopening 143 provided in the insulating films 104 and 110, a side surfaceof the oxide semiconductor film 108 in the channel width direction facesthe conductive film 112 with the insulating film 110 placedtherebetween.

In other words, in the channel width direction of the transistor 100A,the conductive films 106 and 112 are connected to each other through theopening 143 provided in the insulating films 104 and 110, and theconductive films 106 and 112 surround the oxide semiconductor film 108with the insulating films 104 and 110 positioned therebetween.

Such a structure enables the oxide semiconductor film 108 included inthe transistor 100A to be electrically surrounded by electric fields ofthe conductive film 106 functioning as a first gate electrode and theconductive film 112 functioning as a second gate electrode. A devicestructure of a transistor, like that of the transistor 100A, in whichelectric fields of a first gate electrode and a second gate electrodeelectrically surround the oxide semiconductor film 108 in which achannel region is formed can be referred to as a surrounded channel(S-channel) structure.

Since the transistor 100A has the S-channel structure, an electric fieldfor inducing a channel can be effectively applied to the oxidesemiconductor film 108 by the conductive film 106 or the conductive film112; thus, the current drive capability of the transistor 100A can beimproved and high on-state current characteristics can be obtained. As aresult of the high on-state current, it is possible to reduce the sizeof the transistor 100A. Furthermore, since the transistor 100A has astructure in which the oxide semiconductor film 108 is surrounded by theconductive film 106 and the conductive film 112, the mechanical strengthof the transistor 100A can be increased.

When seen in the channel width direction of the transistor 100A, anopening different from the opening 143 may be formed on the side of theoxide semiconductor film 108 on which the opening 143 is not formed.

When a transistor has a pair of gate electrodes between which asemiconductor film is positioned as in the transistor 100A, one of thegate electrodes may be supplied with a signal A, and the other gateelectrode may be supplied with a fixed potential Vb. Alternatively, oneof the gate electrodes may be supplied with the signal A, and the othergate electrode may be supplied with a signal B. Alternatively, one ofthe gate electrodes may be supplied with a fixed potential Va, and theother gate electrode may be supplied with the fixed potential Vb.

The signal A is, for example, a signal for controlling the on/off state.The signal A may be a digital signal with two kinds of potentials, apotential V1 and a potential V2 (V1>V2). For example, the potential V1can be a high power supply potential, and the potential V2 can be a lowpower supply potential. The signal A may be an analog signal.

The fixed potential Vb is, for example, a potential for controlling athreshold voltage VthA of the transistor. The fixed potential Vb may bethe potential V1 or the potential V2. In that case, a potentialgenerator circuit for generating the fixed potential Vb is notnecessary, which is preferable. The fixed potential Vb may be differentfrom the potential V1 or the potential V2. When the fixed potential Vbis low, the threshold voltage VthA can be high in some cases. As aresult, the drain current flowing when the gate-source voltage Vgs is 0V can be reduced, and leakage current in a circuit including thetransistor can be reduced in some cases. The fixed potential Vb may be,for example, lower than the low power supply potential. Meanwhile, ahigh fixed potential Vb can lower the threshold voltage VthA in somecases. As a result, the drain current flowing when the gate-sourcevoltage Vgs is a high power supply potential and the operating speed ofthe circuit including the transistor can be increased in some cases. Thefixed potential Vb may be, for example, higher than the low power supplypotential.

The signal B is, for example, a signal for controlling the on/off state.The signal B may be a digital signal with two kinds of potentials, apotential V3 and a potential V4 (V3>V4). For example, the potential V3can be a high power supply potential, and the potential V4 can be a lowpower supply potential. The signal B may be an analog signal.

When both the signal A and the signal B are digital signals, the signalB may have the same digital value as the signal A. In this case, it maybe possible to increase the on-state current of the transistor and theoperating speed of the circuit including the transistor. Here, thepotential V1 and the potential V2 of the signal A may be different fromthe potential V3 and the potential V4 of the signal B. For example, if agate insulating film for the gate to which the signal B is input isthicker than a gate insulating film for the gate to which the signal Ais input, the potential amplitude of the signal B (V3-V4) may be largerthan the potential amplitude of the signal A (V1-V2). In this manner,the influence of the signal A and that of the signal B on the on/offstate of the transistor can be substantially the same in some cases.

When both the signal A and the signal B are digital signals, the signalB may have a digital value different from that of the signal A. In thiscase, the signal A and the signal B can separately control thetransistor, and thus, higher performance can be achieved. The transistorwhich is, for example, an n-channel transistor can function by itself asa NAND circuit, a NOR circuit, or the like in the following case: thetransistor is turned on only when the signal A has the potential V1 andthe signal B has the potential V3, or the transistor is turned off onlywhen the signal A has the potential V2 and the signal B has thepotential V4. The signal B may be a signal for controlling the thresholdvoltage VthA. For example, the potential of the signal B in a period inwhich the circuit including the transistor operates may be differentfrom the potential of the signal B in a period in which the circuit doesnot operate. The potential of the signal B may vary depending on theoperation mode of the circuit. In this case, the potential of the signalB is not changed as frequently as the potential of the signal A in somecases.

When both the signal A and the signal B are analog signals, the signal Bmay be an analog signal having the same potential as the signal A, ananalog signal whose potential is a constant times the potential of thesignal A, an analog signal whose potential is higher or lower than thepotential of the signal A by a constant, or the like. In this case, itmay be possible to increase the on-state current of the transistor andthe operating speed of the circuit including the transistor. The signalB may be an analog signal different from the signal A. In this case, thesignal A and the signal B can separately control the transistor, andthus, higher performance can be achieved.

The signal A may be a digital signal, and the signal B may be an analogsignal. Alternatively, the signal A may be an analog signal, and thesignal B may be a digital signal.

When both of the gate electrodes of the transistor are supplied with thefixed potentials, the transistor can function as an element equivalentto a resistor in some cases. For example, in the case where thetransistor is an n-channel transistor, the effective resistance of thetransistor can be sometimes low (high) when the fixed potential Va orthe fixed potential Vb is high (low). When both the fixed potential Vaand the fixed potential Vb are high (low), the effective resistance canbe lower (higher) than that of a transistor with only one gate in somecases.

The other components of the transistor 100A are similar to those of thetransistor 100 described above and have similar effects.

An insulating film may further be formed over the transistor 100A. Anexample of such a case is illustrated in FIGS. 36A and 36B. FIGS. 36Aand 36B are cross-sectional views of the transistor 100B. A top view ofthe transistor 100B is not illustrated because it is similar to that ofthe transistor 100A in FIG. 35A.

The transistor 100B illustrated in FIGS. 36A and 36B includes aninsulating film 122 over the conductive films 120 a and 120 b and theinsulating film 122. The other components of the transistor 100B aresimilar to those of the transistor 100A and have similar effects.

The insulating film 122 has a function of covering unevenness and thelike caused by the transistor or the like. The insulating film 122 hasan insulating property and is formed using an inorganic material or anorganic material. Examples of the inorganic material include siliconoxide, silicon oxynitride, silicon nitride oxide, silicon nitride,aluminum oxide, and aluminum nitride. Examples of the organic materialinclude photosensitive resin materials such as an acrylic resin and apolyimide resin.

[Structure Example 3 of Transistor]

Next, structures of transistors different from the structure of thetransistor illustrated in FIGS. 35A to 35C will be described withreference to FIGS. 37A and 37B, FIGS. 38A and 38B, and FIGS. 39A and39B.

FIGS. 37A and 37B are cross-sectional views of a transistor 100C. FIGS.38A and 38B are cross-sectional views of a transistor 100D. FIGS. 39Aand 39B are cross-sectional views of a transistor 100E. The top views ofthe transistors 100C, 100D, and 100E are not illustrated because theyare similar to the top view of the transistor 100A in FIG. 35A.

The transistor 100C illustrated in FIGS. 37A and 37B is different fromthe transistor 100A in the layered structure of the conductive film 112,the shape of the conductive film 112, and the shape of the insulatingfilm 110.

The conductive film 112 in the transistor 100C includes a conductivefilm 112_1 over the insulating film 110 and the conductive film 112_2over the conductive film 112_1. For example, an oxide conductive film isused as the conductive film 112_1, so that excess oxygen can be added tothe insulating film 110. The oxide conductive film can be formed by asputtering method in an atmosphere containing an oxygen gas. As theoxide conductive film, an oxide film containing indium and tin, an oxidefilm containing tungsten and indium, an oxide film containing tungsten,indium, and zinc, an oxide film containing titanium and indium, an oxidefilm containing titanium, indium, and tin, an oxide film containingindium and zinc, an oxide film containing silicon, indium, and tin, oran oxide film containing indium, gallium, and zinc can be used, forexample.

As illustrated in FIG. 37B, the conductive film 112_2 is connected tothe conductive film 106 through the opening 143. By forming the opening143 after a conductive film to be the conductive film 112_1 is formed,the shape illustrated in FIG. 37B can be obtained. In the case where anoxide conductive film is used as the conductive film 112_1, thestructure in which the conductive film 112_2 is connected to theconductive film 106 can decrease the contact resistance between theconductive film 112 and the conductive film 106.

The conductive film 112 and the insulating film 110 in the transistor100C have a tapered shape. More specifically, the lower edge portion ofthe conductive film 112 is positioned outside the upper edge portion ofthe conductive film 112. The lower edge portion of the insulating film110 is positioned outside the upper edge portion of the insulating film110. In addition, the lower edge portion of the conductive film 112 isformed in substantially the same position as that of the upper edgeportion of the insulating film 110.

It is suitable that the conductive film 112 and the insulating film 110have tapered shapes as in the transistor 100C, because the coverage withthe insulating film 116 can be high as compared with the case of thetransistor 100A in which the conductive film 112 and the insulating film110 are rectangular.

The other components of the transistor 100C are similar to those of thetransistor 100A described above and have similar effects.

The transistor 100D illustrated in FIGS. 38A and 38B is different fromthe transistor 100A in the layered structure of the conductive film 112,the shape of the conductive film 112, and the shape of the insulatingfilm 110.

The conductive film 112 in the transistor 100D includes the conductivefilm 112_1 over the insulating film 110 and the conductive film 112_2over the conductive film 112_1. A lower end portion of the conductivefilm 112_1 is located outward from a lower end portion of the conductivefilm 112_2. The conductive film 112_1, the conductive film 112_2, andthe insulating film 110 can be formed by processing with the same mask.To obtain the above structure, for example, the conductive film 112_2 isprocessed by a wet etching method and the conductive film 112_1 and theinsulating film 110 are processed by a dry etching method.

With the structure of the transistor 100D, regions 108 f are formed inthe oxide semiconductor film 108 in some cases. The regions 108 f areformed between the channel region 108 i and the source region 108 s andbetween the channel region 108 i and the drain region 108 d.

The regions 108 f function as high-resistance regions or low-resistanceregions. The high-resistance regions have the same level of resistanceas the channel region 108 i and do not overlap with the conductive film112 functioning as a gate electrode. In the case where the regions 108 fare high-resistance regions, the regions 108 f function as offsetregions. To suppress a decrease in the on-state current of thetransistor 100D, the regions 108 f functioning as offset regions mayeach have a length of 1 μm or less in the channel length (L) direction.

The low-resistance regions have a resistance that is lower than that ofthe channel region 108 i and higher than that of the source region 108 sand the drain region 108 d. In the case where the regions 108 f arelow-resistance regions, the regions 108 f function as lightly dopeddrain (LDD) regions. The regions 108 f functioning as LDD regions canrelieve an electric field in the drain region, thereby reducing a changein the threshold voltage of the transistor due to the electric field inthe drain region.

Note that in the case where the regions 108 f serve as LDD regions, forexample, the regions 108 f are formed by supplying one or more ofnitrogen, hydrogen, and fluorine from the insulating film 116 to theregions 108 f or by adding an impurity element from above the conductivefilm 112_1 using the insulating film 110 and the conductive film 112_1as a mask so that the impurity element is added to the oxidesemiconductor film 108 through the conductive film 112_1 and theinsulating film 110.

As illustrated in FIG. 38B, the conductive film 112_2 is connected tothe conductive film 106 through the opening 143.

The other components of the transistor 100D are similar to those of thetransistor 100A described above and have similar effects.

The transistor 100E illustrated in FIGS. 39A and 39B is different fromthe transistor 100A in the layered structure of the conductive film 112,the shape of the conductive film 112, and the shape of the insulatingfilm 110.

The conductive film 112 in the transistor 100E includes the conductivefilm 112_1 over the insulating film 110 and the conductive film 112_2over the conductive film 112_1. A lower end portion of the conductivefilm 112_1 is located outward from a lower end portion of the conductivefilm 112_2. Furthermore, a lower end portion of the insulating film 110is located outward from the lower end portion of the conductive film112_1. The conductive film 112_1, the conductive film 112_2, and theinsulating film 110 can be formed by processing with the same mask. Toobtain the above structure, for example, the conductive film 112_2 andthe conductive film 112_1 are processed by a wet etching method and theinsulating film 110 is processed by a dry etching method.

Like the transistor 100D, regions 108 f are formed in the oxidesemiconductor film 108 in the transistor 100E, in some cases. Theregions 108 f are formed between the channel region 108 i and the sourceregion 108 s and between the channel region 108 i and the drain region108 d.

As illustrated in FIG. 39B, the conductive film 112_2 is connected tothe conductive film 106 through the opening 143.

The other components of the transistor 100E are similar to those of thetransistor 100A described above and have similar effects.

[Structure Example 4 Transistor]

Next, structures of transistors different from the structure of thetransistor 100A illustrated in FIGS. 35A to 35C will be described withreference to FIGS. 40A and 40B, FIGS. 41A and 41B, FIGS. 42A and 42B,FIGS. 43A and 43B, and FIGS. 44A and 44B.

FIGS. 40A and 40B are cross-sectional views of a transistor 100F. FIGS.41A and 41B are cross-sectional views of a transistor 100G. FIGS. 42Aand 42B are cross-sectional views of a transistor 100H. FIGS. 43A and43B are cross-sectional views of a transistor 100J. FIGS. 44A and 44Bare cross-sectional views of a transistor 100K. The top views of thetransistors 100F, 100G, 100H, 100J, and 100K are not illustrated becausethey are similar to the top view of the transistor 100A in FIG. 35A.

The transistors 100F, 100G, 100H, 100J, and 100K are different from theabove-described the transistor 100A in the structure of the oxidesemiconductor film 108. The other components are similar to those of thetransistor 100A and have similar effects.

The oxide semiconductor film 108 of the transistor 100F illustrated inFIGS. 40A and 40B includes an oxide semiconductor film 108_1 over theinsulating film 104, an oxide semiconductor film 108_2 over the oxidesemiconductor film 108_1, and an oxide semiconductor film 108_3 over theoxide semiconductor film 108_2. The channel region 108 i, the sourceregion 108 s, and the drain region 108 d each have a three-layerstructure of the oxide semiconductor film 108_1, the oxide semiconductorfilm 108_2, and the oxide semiconductor film 108_3.

The oxide semiconductor film 108 of the transistor 100G illustrated inFIGS. 41A and 41B includes the oxide semiconductor film 108_2 over theinsulating film 104, and the oxide semiconductor film 108_3 over theoxide semiconductor film 108_2. The channel region 108 i, the sourceregion 108 s, and the drain region 108 d each have a two-layer structureof the oxide semiconductor film 108_2 and the oxide semiconductor film108_3.

The oxide semiconductor film 108 of the transistor 100H illustrated inFIGS. 42A and 42B includes the oxide semiconductor film 108_1 over theinsulating film 104, and the oxide semiconductor film 108_2 over theoxide semiconductor film 108_1. The channel region 108 i, the sourceregion 108 s, and the drain region 108 d each have a two-layer structureof the oxide semiconductor film 108_1 and the oxide semiconductor film108_2.

The oxide semiconductor film 108 of the transistor 100J illustrated inFIGS. 43A and 43B includes the oxide semiconductor film 108_1 over theinsulating film 104, the oxide semiconductor film 108_2 over the oxidesemiconductor film 108_1, and the oxide semiconductor film 108_3 overthe oxide semiconductor film 108_2. The channel region 108 i has athree-layer structure of the oxide semiconductor film 108_1, the oxidesemiconductor film 108_2, and the oxide semiconductor film 108_3. Thesource region 108 s and the drain region 108 d each have a two-layerstructure of the oxide semiconductor film 108_1 and the oxidesemiconductor film 108_2. Note that in the cross section of thetransistor 100J in the channel width (W) direction, the oxidesemiconductor film 108_3 covers side surfaces of the oxide semiconductorfilm 108_1 and the oxide semiconductor film 108_2.

The oxide semiconductor film 108 of the transistor 100K illustrated inFIGS. 44A and 44B includes the oxide semiconductor film 108_2 over theinsulating film 104, and the oxide semiconductor film 108_3 over theoxide semiconductor film 108_2. The channel region 108 i has a two-layerstructure of the oxide semiconductor film 108_2 and the oxidesemiconductor film 108_3. The source region 108 s and the drain region108 d each have a single-layer structure of the oxide semiconductor film108_2. Note that in the cross section of the transistor 100K in thechannel width (W) direction, the oxide semiconductor film 108_3 coversside surfaces of the oxide semiconductor film 108_2.

A side surface of the channel region 108 i in the channel width (W)direction or a region in the vicinity of the side surface is easilydamaged by processing, resulting in a defect (e.g., oxygen vacancy), oreasily contaminated by an impurity attached thereto. Therefore, evenwhen the channel region 108 i is substantially intrinsic, stress such asan electric field applied thereto activates the side surface of thechannel region 108 i in the channel width (W) direction or the region inthe vicinity of the side surface and turns it into a low-resistance(n-type) region easily. Moreover, if the side surface of the channelregion 108 i in the channel width (W) direction or the region in thevicinity of the side surface is an n-type region, a parasitic channelmay be formed because the n-type region serves as a carrier path.

Thus, in the transistor 100J and the transistor 100K, the channel region108 i has a stacked-layer structure and side surfaces of the channelregion 108 i in the channel width (W) direction are covered with onelayer of the stacked layers. With such a structure, defects on or in thevicinity of the side surfaces of the channel region 108 i can besuppressed or adhesion of an impurity to the side surfaces of thechannel region 108 i or to regions in the vicinity of the side surfacescan be reduced.

[Band Structure]

Here, a band structure of the insulating film 104, the oxidesemiconductor films 108_1, 108_2, and 108_3, and the insulating film110, a band structure of the insulating film 104, the oxidesemiconductor films 108_2 and 108_3, and the insulating film 110, and aband structure of the insulating film 104, the oxide semiconductor films108_1 and 108_2, and the insulating film 110 will be described withreference to FIGS. 45A to 45C. Note that FIGS. 45A to 45C are each aband structure of the channel region 108 i.

FIG. 45A shows an example of a band structure in the thickness directionof a stack including the insulating film 104, the oxide semiconductorfilms 108_1, 108_2, and 108_3, and the insulating film 110. FIG. 45Bshows an example of a band structure in the thickness direction of astack including the insulating film 104, the oxide semiconductor films108_2 and 108_3, and the insulating film 110. FIG. 45C shows an exampleof a band structure in the thickness direction of a stack including theinsulating film 104, the oxide semiconductor films 108_1 and 108_2, andthe insulating film 110. For easy understanding, the band structuresshow the conduction band minimum (E_(c)) of the insulating film 104, theoxide semiconductor films 108_1, 108_2, and 108_3, and the insulatingfilm 110.

In the band structure of FIG. 45A, a silicon oxide film is used as eachof the insulating films 104 and 110, an oxide semiconductor film formedusing a metal oxide target whose atomic ratio of In to Ga and Zn is1:3:2 is used as the oxide semiconductor film 108_1, an oxidesemiconductor film formed using a metal oxide target whose atomic ratioof In to Ga and Zn is 4:2:4.1 is used as the oxide semiconductor film108_2, and an oxide semiconductor film formed using a metal oxide targetwhose atomic ratio of In to Ga and Zn is 1:3:2 is used as the oxidesemiconductor film 108_3.

In the band structure of FIG. 45B, a silicon oxide film is used as eachof the insulating films 104 and 110, an oxide semiconductor film formedusing a metal oxide target whose atomic ratio of In to Ga to Zn is4:2:4.1 is used as the oxide semiconductor film 108_2, and an oxidesemiconductor film formed using a metal oxide target whose atomic ratioof In to Ga to Zn is 1:3:2 is used as the oxide semiconductor film108_3.

In the band structure of FIG. 45C, a silicon oxide film is used as eachof the insulating films 104 and 110, an oxide semiconductor film formedusing a metal oxide target whose atomic ratio of In to Ga and Zn is1:3:2 is used as the oxide semiconductor film 108_1, and an oxidesemiconductor film formed using a metal oxide target whose atomic ratioof In to Ga and Zn is 4:2:4.1 is used as the oxide semiconductor film108_2.

As illustrated in FIG. 45A, the conduction band minimum gradually variesbetween the oxide semiconductor films 108_1, 108_2, and 108_3. Asillustrated in FIG. 45B, the conduction band minimum gradually variesbetween the oxide semiconductor films 108_2 and 108_3. As illustrated inFIG. 45C, the conduction band minimum gradually varies between the oxidesemiconductor films 108_1 and 108_2. In other words, the conduction bandminimum is continuously changed or continuously connected. To obtainsuch a band structure, there exists no impurity, which forms a defectstate such as a trap center or a recombination center, at the interfacebetween the oxide semiconductor films 108_1 and 108_2 or the interfacebetween the oxide semiconductor films 108_2 and 108_3.

To form a continuous junction between the oxide semiconductor films108_1, 108_2, and 108_3, it is necessary to form the films successivelywithout exposure to the air with a multi-chamber deposition apparatus(sputtering apparatus) provided with a load lock chamber.

With the band structure of FIG. 45A, FIG. 45B, or FIG. 45C, the oxidesemiconductor film 108_2 serves as a well, and a channel region isformed in the oxide semiconductor film 108_2 in the transistor with thestacked-layer structure.

By providing the oxide semiconductor films 108_1 and 108_3, the oxidesemiconductor film 108_2 can be distanced away from defect states.

In addition, the defect states might be more distant from the vacuumlevel than the conduction band minimum (E_(c)) of the oxidesemiconductor film 108_2 functioning as a channel region, so thatelectrons are likely to be accumulated in the defect states. When theelectrons are accumulated in the defect states, the electrons becomenegative fixed electric charge, so that the threshold voltage of thetransistor is shifted in the positive direction. Therefore, it ispreferable that the defect states be closer to the vacuum level than theconduction band minimum (E_(c)) of the oxide semiconductor film 108_2.Such a structure inhibits accumulation of electrons in the defectstates. As a result, the on-state current and the field-effect mobilityof the transistor can be increased.

The conduction band minimum of each of the oxide semiconductor films108_1 and 108_3 is closer to the vacuum level than that of the oxidesemiconductor film 108_2. A typical difference between the conductionband minimum of the oxide semiconductor film 108_2 and the conductionband minimum of each of the oxide semiconductor films 108_1 and 108_3 is0.15 eV or more or 0.5 eV or more and 2 eV or less or 1 eV or less. Thatis, the difference between the electron affinity of each of the oxidesemiconductor films 108_1 and 108_3 and the electron affinity of theoxide semiconductor film 108_2 is 0.15 eV or more or 0.5 eV or more and2 eV or less or 1 eV or less.

In such a structure, the oxide semiconductor film 108_2 serves as a mainpath of a current. In other words, the oxide semiconductor film 108_2serves as a channel region, and the oxide semiconductor films 108_1 and108_3 serve as oxide insulating films. It is preferable that the oxidesemiconductor films 108_1 and 108_3 each include one or more metalelements constituting a part of the oxide semiconductor film 108_2 inwhich a channel region is formed. With such a structure, interfacescattering hardly occurs at the interface between the oxidesemiconductor film 108_1 and the oxide semiconductor film 108_2 or atthe interface between the oxide semiconductor film 108_2 and the oxidesemiconductor film 108_3. Thus, the transistor can have highfield-effect mobility because the movement of carriers is not hinderedat the interface.

To prevent each of the oxide semiconductor films 108_1 and 108_3 fromfunctioning as part of a channel region, a material having sufficientlylow conductivity is used for the oxide semiconductor films 108_1 and108_3. Thus, the oxide semiconductor films 108_1 and 108_3 can bereferred to as oxide insulating films for such properties and/orfunctions. Alternatively, a material that has a smaller electronaffinity (a difference between the vacuum level and the conduction bandminimum) than the oxide semiconductor film 108_2 and has a difference inthe conduction band minimum from the oxide semiconductor film 108_2(band offset) is used for the oxide semiconductor films 108_1 and 108_3.Furthermore, to inhibit generation of a difference in threshold voltagedue to the value of the drain voltage, it is preferable to form theoxide semiconductor films 108_1 and 108_3 using a material whoseconduction band minimum is closer to the vacuum level than that of theoxide semiconductor film 108_2. For example, a difference between theconduction band minimum of the oxide semiconductor film 108_2 and theconduction band minimum of each of the oxide semiconductor films 108_1and 108_3 is preferably greater than or equal to 0.2 eV, more preferablygreater than or equal to 0.5 eV.

It is preferable that the oxide semiconductor films 108_1 and 108_3 nothave a spinel crystal structure. This is because if the oxidesemiconductor films 108_1 and 108_3 have a spinel crystal structure,constituent elements of the conductive films 120 a and 120 b might bediffused into the oxide semiconductor film 108_2 at the interfacebetween the spinel crystal structure and another region. Note that eachof the oxide semiconductor films 108_1 and 108_3 is preferably a CAAC-OSfilm described later, in which case a higher blocking property againstconstituent elements of the conductive films 120 a and 120 b, forexample, copper elements, can be obtained.

Although the example where an oxide semiconductor film formed using ametal oxide target whose atomic ratio of In to Ga and Zn is 1:3:2, isused as each of the oxide semiconductor films 108_1 and 108_3 isdescribed in this embodiment, one embodiment of the present invention isnot limited thereto. For example, an oxide semiconductor film formedusing a metal oxide target whose atomic ratio of In to Ga and Zn is1:1:1, 1:1:1.2, 1:3:4, 1:3:6, 1:4:5, 1:5:6, or 1:10:1 may be used aseach of the oxide semiconductor films 108_1 and 108_3. Alternatively,oxide semiconductor films formed using a metal oxide target whose atomicratio of Ga to Zn is 10:1 may be used as the oxide semiconductor films108_1 and 108_3. It is suitable that an oxide semiconductor film formedusing a metal oxide target whose atomic ratio of In to Ga and Zn is1:1:1 is used as the oxide semiconductor film 108_2 and an oxidesemiconductor film formed using a metal oxide target whose atomic ratioof Ga to Zn is 10:1 is used as each of the oxide semiconductor films108_1 and 108_3 because the difference between the conduction bandminimum of the oxide semiconductor film 108_2 and the conduction bandminimum of the oxide semiconductor film 108_1 or 108_3 can be 0.6 eV ormore.

When the oxide semiconductor films 108_1 and 108_3 are formed using ametal oxide target whose atomic ratio of In to Ga and Zn is 1:1:1, theatomic ratio of In to Ga and Zn in the oxide semiconductor films 108_1and 108_3 might be 1:

1:

2 (0<

1≤2, 0<

2≤2). When the oxide semiconductor films 108_1 and 108_3 are formedusing a metal oxide target whose atomic ratio of In to Ga and Zn is1:3:4, the atomic ratio of In to Ga and Zn in the oxide semiconductorfilms 108_1 and 108_3 might be 1:

3:

4 (1≤

3≤5, 2≤

4≤6). When the oxide semiconductor films 108_1 and 108_3 are formedusing a metal oxide target whose atomic ratio of In to Ga and Zn is1:3:6, the atomic ratio of In to Ga and Zn in the oxide semiconductorfilms 108_1 and 108_3 might be 1:

5:

6 (1≤

5≤5, 4≤

6≤8).

At least part of this embodiment can be implemented in combination withany of the other embodiments described in this specification asappropriate.

Embodiment 3

In this embodiment, a transistor that can be used as the semiconductordevice of one embodiment of the present invention will be described.

In this embodiment, bottom-gate transistors will be described withreference to FIGS. 46A to 46C to FIGS. 52A to 52C.

[Structure Example 1 of Transistor]

FIG. 46A is a top view of a transistor 300A. FIG. 46B is across-sectional view taken along dashed-dotted line X1-X2 in FIG. 46A.FIG. 46C is a cross-sectional view taken along dashed-dotted line Y1-Y2in FIG. 46A. Note that in FIG. 46A, some components of the transistor300A (e.g., an insulating film functioning as a gate insulating film)are not illustrated to avoid complexity. The direction of dashed-dottedline X1-X2 may be referred to as a channel length direction, and thedirection of dashed-dotted line Y1-Y2 may be referred to as a channelwidth direction. As in FIG. 46A, some components are not illustrated insome cases in top views of transistors described below.

The transistor 300A illustrated in FIGS. 46A to 46C includes aconductive film 304 over a substrate 302, an insulating film 306 overthe substrate 302 and the conductive film 304, an insulating film 307over the insulating film 306, an oxide semiconductor film 308 over theinsulating film 307, a conductive film 312 a over the oxidesemiconductor film 308, and a conductive film 312 b over the oxidesemiconductor film 308. Over the transistor 300A, specifically, over theconductive films 312 a and 312 b and the oxide semiconductor film 308,an insulating film 314, an insulating film 316, and an insulating film318 are provided.

In the transistor 300A, the insulating films 306 and 307 function as thegate insulating films of the transistor 300A, and the insulating films314, 316, and 318 functions as protective insulating films of thetransistor 300A. Furthermore, in the transistor 300A, the conductivefilm 304 functions as a gate electrode, the conductive film 312 afunctions as a source electrode, and the conductive film 312 b functionsas a drain electrode.

In this specification and the like, the insulating films 306 and 307 maybe referred to as a first insulating film, the insulating films 314 and316 may be referred to as a second insulating film, and the insulatingfilm 318 may be referred to as a third insulating film.

The transistor 300A illustrated in FIGS. 46A to 46C is a channel-etchedtransistor. The oxide semiconductor film of one embodiment of thepresent invention is suitable for a channel-etched transistor.

[Structure Example 2 of Transistor]

FIG. 47A is a top view of a transistor 300B. FIG. 47B is across-sectional view taken along dashed-dotted line X1-X2 in FIG. 47A.FIG. 47C is a cross-sectional view taken along dashed-dotted line Y1-Y2in FIG. 47A.

The transistor 300B illustrated in FIGS. 47A to 47C includes theconductive film 304 over the substrate 302, the insulating film 306 overthe substrate 302 and the conductive film 304, the insulating film 307over the insulating film 306, the oxide semiconductor film 308 over theinsulating film 307, the insulating film 314 over the oxidesemiconductor film 308, the insulating film 316 over the insulating film314, the conductive film 312 a electrically connected to the oxidesemiconductor film 308 through an opening 341 a provided in theinsulating films 314 and 316, and the conductive film 312 b electricallyconnected to the oxide semiconductor film 308 through an opening 341 bprovided in the insulating films 314 and 316. Over the transistor 300B,specifically, over the conductive films 312 a and 312 b and theinsulating film 316, the insulating film 318 is provided.

In the transistor 300B, the insulating films 306 and 307 function asgate insulating films of the transistor 300B, the insulating films 314and 316 function as protective insulating films of the oxidesemiconductor film 308, and the insulating film 318 functions as aprotective insulating film of the transistor 300B. Furthermore, in thetransistor 300B, the conductive film 304 functions as a gate electrode,the conductive film 312 a functions as a source electrode, and theconductive film 312 b functions as a drain electrode.

The transistor 300A illustrated in FIGS. 46A to 46C has a channel-etchedstructure, whereas the transistor 300B in FIGS. 47A to 47C has achannel-protective structure. The oxide semiconductor film of oneembodiment of the present invention is suitable for a channel-protectivetransistor as well.

[Structure Example 3 of Transistor]

FIG. 48A is a top view of a transistor 300C. FIG. 48B is across-sectional view taken along dashed-dotted line X1-X2 in FIG. 48A.FIG. 48C is a cross-sectional view taken along dashed-dotted line Y1-Y2in FIG. 48A.

The transistor 300C illustrated in FIGS. 48A to 48C is different fromthe transistor 300B in FIGS. 47A to 47C in the shapes of the insulatingfilms 314 and 316. Specifically, the insulating films 314 and 316 of thetransistor 300C have island shapes and are provided over a channelregion of the oxide semiconductor film 308. Other components are similarto those of the transistor 300B.

[Structure Example 4 of Transistor]

FIG. 49A is a top view of a transistor 300D. FIG. 49B is across-sectional view taken along dashed-dotted line X1-X2 in FIG. 49A.FIG. 49C is a cross-sectional view taken along dashed-dotted line Y1-Y2in FIG. 49A.

The transistor 300D illustrated in FIGS. 49A to 49C includes theconductive film 304 over the substrate 302, the insulating film 306 overthe substrate 302 and the conductive film 304, the insulating film 307over the insulating film 306, the oxide semiconductor film 308 over theinsulating film 307, the conductive film 312 a over the oxidesemiconductor film 308, the conductive film 312 b over the oxidesemiconductor film 308, the insulating film 314 over the oxidesemiconductor film 308 and the conductive films 312 a and 312 b, theinsulating film 316 over the insulating film 314, the insulating film318 over the insulating film 316, and conductive films 320 a and 320 bover the insulating film 318.

In the transistor 300D, the insulating films 306 and 307 function asfirst gate insulating films of the transistor 300D, and the insulatingfilms 314, 316, and 318 function as second gate insulating films of thetransistor 300D. Furthermore, in the transistor 300D, the conductivefilm 304 functions as a first gate electrode, the conductive film 320 afunctions as a second gate electrode, and the conductive film 320 bfunctions as a pixel electrode used for a display device. The conductivefilm 312 a functions as a source electrode, and the conductive film 312b functions as a drain electrode.

As illustrated in FIG. 49C, the conductive film 320 a is connected tothe conductive film 304 in an opening 342 b and an opening 342 cprovided in the insulating films 306, 307, 314, 316, and 318. Thus, thesame potential is applied to the conductive film 320 a and theconductive film 304.

The structure of the transistor 300D is not limited to that describedabove, in which the openings 342 b and 342 c are provided so that theconductive film 320 a is connected to the conductive film 304. Forexample, a structure in which only one of the openings 342 b and 342 cis provided so that the conductive film 320 a is connected to theconductive film 304, or a structure in which the conductive film 320 ais not connected to the conductive film 304 without providing theopenings 342 b and 342 c may be employed. Note that in the case wherethe conductive film 320 a is not connected to the conductive film 304,it is possible to apply different potentials to the conductive film 320a and the conductive film 304.

The conductive film 320 b is connected to the conductive film 312 bthrough an opening 342 a provided in the insulating films 314, 316, and318.

Note that the transistor 300D has the S-channel structure describedabove.

[Structure Example 5 Transistor]

The oxide semiconductor film 308 included in the transistor 300A inFIGS. 31A to 31C may have a stacked-layer structure. FIGS. 50A and 50Band FIGS. 51A and 51B illustrate examples of such a case.

FIGS. 50A and 50B are cross-sectional views of a transistor 300E andFIGS. 51A and 51B are cross-sectional views of a transistor 300F. Thetop views of the transistors 300E and 300F are similar to that of thetransistor 300A illustrated in FIG. 46A.

The oxide semiconductor film 308 of the transistor 300E illustrated inFIGS. 50A and 50B includes an oxide semiconductor film 308_1, an oxidesemiconductor film 308_2, and an oxide semiconductor film 308_3. Theoxide semiconductor film 308 of the transistor 300F illustrated in FIGS.51A and 51B includes the oxide semiconductor film 308_2 and the oxidesemiconductor film 308_3.

Note that the conductive film 304, the insulating film 306, theinsulating film 307, the oxide semiconductor film 308, the oxidesemiconductor film 308_1, the oxide semiconductor film 308_2, the oxidesemiconductor film 308_3, the conductive films 312 a and 312 b, theinsulating film 314, the insulating film 316, the insulating film 318,and the conductive films 320 a and 320 b can be formed using thematerials of the conductive film 106, the insulating film 116, theinsulating film 114, the oxide semiconductor film 108, the oxidesemiconductor film 108_1, the oxide semiconductor film 108_2, the oxidesemiconductor film 108_3, the conductive films 120 a and 120 b, theinsulating film 104, the insulating film 118, the insulating film 116,and the conductive film 112, respectively, described in the aboveembodiments.

[Structure Example 6 Transistor]

FIG. 52A is a top view of a transistor 300G. FIG. 52B is across-sectional view taken along dashed-dotted line X1-X2 in FIG. 52A.FIG. 52C is a cross-sectional view taken along dashed-dotted line Y1-Y2in FIG. 52A.

The transistor 300G illustrated in FIGS. 52A to 52C includes theconductive film 304 over the substrate 302, the insulating film 306 overthe substrate 302 and the conductive film 304, the insulating film 307over the insulating film 306, the oxide semiconductor film 308 over theinsulating film 307, the conductive film 312 a over the oxidesemiconductor film 308, the conductive film 312 b over the oxidesemiconductor film 308, the insulating film 314 over the oxidesemiconductor film 308 and the conductive films 312 a and 312 b, theinsulating film 316 over the insulating film 314, the conductive film320 a over the insulating film 316, and the conductive film 320 b overthe insulating film 316.

The insulating films 306 and 307 have an opening 351. A conductive film312 c, which is electrically connected to the conductive film 304through the opening 351, is formed over the insulating films 306 and307. The insulating films 314 and 316 have an opening 352 a that reachesthe conductive film 312 b and an opening 352 b that reaches theconductive film 312 c.

The oxide semiconductor film 308 includes the oxide semiconductor film308_2 on the conductive film 304 side and the oxide semiconductor film308_3 over the oxide semiconductor film 308_2.

The insulating film 318 is provided over the transistor 300G. Theinsulating film 318 is formed to cover the insulating film 316, theconductive film 320 a, and the conductive film 320 b.

In the transistor 300G, the insulating films 306 and 307 function asfirst gate insulating films of the transistor 300G, and the insulatingfilms 314 and 316 function as second gate insulating films of thetransistor 300G, and the insulating film 318 functions as a protectiveinsulating film of the transistor 300G. Furthermore, in the transistor300G, the conductive film 304 functions as a first gate electrode, theconductive film 320 a functions as a second gate electrode, and theconductive film 320 b functions as a pixel electrode used for a displaydevice. Moreover, in the transistor 300G, the conductive film 312 afunctions as a source electrode, the conductive film 312 b functions asa drain electrode, and the conductive film 312 c functions as aconnection electrode.

Note that the transistor 300G has the S-channel structure describedabove.

The structures of the transistors 300A to 300G can be freely combinedwith each other.

At least part of this embodiment can be implemented in combination withany of the other embodiments described in this specification asappropriate.

Embodiment 4

In this embodiment, a semiconductor device including the metal oxidefilm of one embodiment of the present invention is described withreference to FIG. 53, FIG. 54, and FIG. 55.

Structural Example 1 of Semiconductor Device

FIG. 53 is a cross-sectional view in the channel length (L) directionwhen the transistor 300D described in Embodiment 3 and the transistor100B described in Embodiment 2 are stacked.

With the stacked structure of the transistor 300D and the transistor100B, the area of a region where the transistors are disposed can bereduced.

For example, the structure in FIG. 53 is used for a pixel portion of adisplay device, whereby the pixel density of the display device can beincreased. The arrangement of the transistors in FIG. 53 can increasethe aperture ratio of pixels even in the case where the pixel density ofthe display device is greater than 1000 pixels per inch (ppi) or thepixel density of the display device is greater than 2000 ppi. Note thatppi is a unit indicating the number of pixels per inch.

The structure in this embodiment is different from the above structurein that the transistor 300D and the transistor 100B are stacked.

For example, the structure of transistor 300D in FIG. 53 is differentfrom the above structure as follows.

The transistor 300D in FIG. 53 includes an insulating film 319 and aninsulating film 110 a between an insulating film 318 and a conductivefilm 320 a.

The material of the insulating film 314 or the insulating film 316 canbe used for the insulating film 319. The insulating film 319 is providedso that the oxide semiconductor film 108 is not in contact with theinsulating film 318. The insulating film 110 a is formed by processingthe same insulating film as the insulating film 110. Note that theconductive film 320 a included in the transistor 330D and the conductivefilm 112 included in the transistor 100B are formed by processing thesame conductive film.

The transistor 100B in FIG. 53 includes the conductive film 312 cinstead of the conductive film 106. In addition, the transistor 100B inFIG. 53 includes the insulating films 314, 316, 318, and 319 instead ofthe insulating film 104. Since the transistor 300D includes theinsulating films 314, 316, 318, and 319 instead of the insulating film104, the number of manufacturing steps of the transistor can be reduced.

In FIG. 53, the conductive film 120 b of the transistor 300D isconnected to a conductive film 344. The conductive film 344 iselectrically connected to the conductive film 120 b in the opening 342provided in the insulating film 122. The material of the conductive film320 a can be used for the conductive film 344. Note that the conductivefilm 344 serves as a pixel electrode of the display device.

FIG. 53 illustrates the case where the transistor 300D and thetransistor 100B are stacked; however, the present invention is notlimited thereto. For example, structures illustrated in FIG. 54 and FIG.55 may be used.

<Structural Example 2 of Semiconductor Device>FIG. 54 is across-sectional view in the channel length (L) direction when thetransistor 950 and the transistor 100A described in Embodiment 2 arestacked.

The transistor 950 illustrated in FIG. 54 includes a substrate 952; aninsulating film 954 over the substrate 952; a semiconductor film 956over the insulating film 954; an insulating film 958 over thesemiconductor film 956; a conductive film 960 over the insulating film958, an insulating film 962 over the insulating film 954, thesemiconductor film 956, and the conductive film 960; an insulating film964 over the insulating film 962; and a conductive film 966 a and aconductive film 966 b which are electrically connected to thesemiconductor film 956. An insulating film 968 is provided over thetransistor 950.

The semiconductor film 956 includes silicon. In particular, thesemiconductor film 956 preferably includes crystalline silicon. Thetransistor 950 is a transistor that uses low-temperature polysilicon. Itis preferable to use the transistor using low-temperature polysilicon inthe driver circuit portion of the display device because highfield-effect mobility can be obtained. Furthermore, the transistor 300Ais preferably used in a pixel portion of the display device to reducepower consumption.

A glass substrate, a plastic substrate, or the like can be used for thesubstrate 952. The insulating film 954 serves as a base insulating filmof the transistor 950. For example, a silicon oxide film, a siliconnitride film, a silicon oxynitride film, a silicon nitride oxide film,or the like can be used as the insulating film 954. The insulating film958 functions as a gate insulating film of the transistor 950. Thematerials described above for the insulating film 954 can be used forthe insulating film 958. The conductive film 960 functions as a gateelectrode of the transistor 950. The material of the conductive films312 a, 312 b, 120 a, 120 b, and the like in the above embodiments can beused for the conductive film 960. The insulating films 962, 964, and 968serve as a protective insulating film of the transistor 950. Theconductive films 966 a and 966 b serve as a source electrode and a drainelectrode of the transistor 950. The same material as the conductivefilms 312 a, 312 b, 120 a, 120 b, and the like in the above embodimentscan be used for the conductive films 966 a and 966 b.

An insulating film 970 and an insulating film 972 are provided betweenthe transistor 950 and the transistor 300A. The insulating film 970serves as a barrier film. Specifically, the insulating film 970 isformed so that impurities such as hydrogen contained in the transistor950 do not enter the transistor 300A side. The insulating film 972serves as a base insulating film of the transistor 300A.

For the insulating film 970, a material which releases a small amount ofhydrogen and can inhibit diffusion of hydrogen, such as silicon nitrideand aluminum oxide, is preferably used. The insulating film 972preferably contains excess oxygen. The materials of the insulating films314 and 316 can be used for the insulating film 972.

Although the transistor 950 is not overlapped with the transistor 300Ain FIG. 54, the present invention is not limited thereto. For example,the channel region of the transistor 950 may overlap with the channelregion of the transistor 300A as illustrated in FIG. 55. FIG. 55 is across-sectional view in the channel length (L) direction when thetransistor 950 and the transistor 300A are stacked. With the structurein FIG. 55, the area of a region where the transistors are disposed canbe reduced.

Although not illustrated, the transistor 950 and other transistors inEmbodiment 2 and Embodiment 3 (e.g., the transistors 100A to 100K andthe transistors 300A to 300G) may be stacked.

In this manner, the metal oxide film of one embodiment of the presentinvention can be favorably used for the structure in which transistorsof various shape are stacked.

At least part of this embodiment can be implemented in combination withany of the other embodiments described in this specification asappropriate.

Embodiment 5

In this embodiment, an example of a display device that includes any ofthe transistors described in the embodiment above will be describedbelow with reference to FIG. 56, FIG. 57, FIG. 58, FIG. 59, FIGS. 60A to60D, FIG. 61, FIG. 62, and FIG. 63.

FIG. 56 is a top view illustrating an example of a display device. Adisplay device 700 illustrated in FIG. 56 includes a pixel portion 702provided over a first substrate 701; a source driver circuit portion 704and a gate driver circuit portion 706 provided over the first substrate701; a sealant 712 provided to surround the pixel portion 702, thesource driver circuit portion 704, and the gate driver circuit portion706; and a second substrate 705 provided to face the first substrate701. The first substrate 701 and the second substrate 705 are sealedwith the sealant 712. That is, the pixel portion 702, the source drivercircuit portion 704, and the gate driver circuit portion 706 are sealedwith the first substrate 701, the sealant 712, and the second substrate705. Although not illustrated in FIG. 56, a display element is providedbetween the first substrate 701 and the second substrate 705.

In the display device 700, a flexible printed circuit (FPC) terminalportion 708 electrically connected to the pixel portion 702, the sourcedriver circuit portion 704, and the gate driver circuit portion 706 isprovided in a region different from the region which is surrounded bythe sealant 712 and positioned over the first substrate 701.Furthermore, an FPC 716 is connected to the FPC terminal portion 708,and a variety of signals and the like are supplied to the pixel portion702, the source driver circuit portion 704, and the gate driver circuitportion 706 through the FPC 716. Furthermore, a signal line 710 isconnected to the pixel portion 702, the source driver circuit portion704, the gate driver circuit portion 706, and the FPC terminal portion708. The variety of signals and the like are applied to the pixelportion 702, the source driver circuit portion 704, the gate drivercircuit portion 706, and the FPC terminal portion 708 via the signalline 710 from the FPC 716.

A plurality of gate driver circuit portions 706 may be provided in thedisplay device 700. An example of the display device 700 in which thesource driver circuit portion 704 and the gate driver circuit portion706 are formed over the first substrate 701 where the pixel portion 702is also formed is described; however, the structure is not limitedthereto. For example, only the gate driver circuit portion 706 may beformed over the first substrate 701 or only the source driver circuitportion 704 may be formed over the first substrate 701. In this case, asubstrate over which a source driver circuit, a gate driver circuit, orthe like is formed (e.g., a driver circuit board formed using asingle-crystal semiconductor film or a polycrystalline semiconductorfilm) may be formed on the first substrate 701. Note that there is noparticular limitation on the method of connecting a separately prepareddriver circuit substrate, and a chip on glass (COG) method, a wirebonding method, or the like can be used.

The pixel portion 702, the source driver circuit portion 704, and thegate driver circuit portion 706 included in the display device 700include a plurality of transistors.

The display device 700 can include any of a variety of elements. Asexamples of the elements, electroluminescent (EL) element (e.g., an ELelement containing organic and inorganic materials, an organic ELelement, an inorganic EL element, or an LED), a light-emittingtransistor element (a transistor which emits light depending oncurrent), an electron emitter, a liquid crystal element, an electronicink display, an electrophoretic element, an electrowetting element, aplasma display panel (PDP), a micro electro mechanical systems (MEMS)display (e.g., a grating light valve (GLV), a digital micromirror device(DMD), a digital micro shutter (DMS) element, or an interferometricmodulator display (IMOD) element), and a piezoelectric ceramic displaycan be given.

An example of a display device including an EL element is an EL display.Examples of display devices including electron emitters are a fieldemission display (FED) and an SED-type flat panel display (SED:surface-conduction electron-emitter display). Examples of displaydevices including liquid crystal elements include a liquid crystaldisplay (e.g., a transmissive liquid crystal display, a transflectiveliquid crystal display, a reflective liquid crystal display, adirect-view liquid crystal display, or a projection liquid crystaldisplay). Display devices having electronic ink or electrophoreticelements include electronic paper and the like. In the case of atransflective liquid crystal display or a reflective liquid crystaldisplay, some of or all of pixel electrodes function as reflectiveelectrodes. For example, some or all of pixel electrodes are formed tocontain aluminum, silver, or the like. In such a case, a memory circuitsuch as an SRAM can be provided under the reflective electrodes. Thus,the power consumption can be further reduced.

As a display method in the display device 700, a progressive method, aninterlace method, or the like can be employed. Furthermore, colorelements controlled in a pixel at the time of color display are notlimited to three colors: R, G, and B (R, G, and B correspond to red,green, and blue, respectively). For example, four pixels of the R pixel,the G pixel, the B pixel, and a W (white) pixel may be included.Alternatively, a color element may be composed of two colors among R, G,and B as in PenTile layout. The two colors may differ among colorelements. Alternatively, one or more colors of yellow, cyan, magenta,and the like may be added to RGB. Furthermore, the size of a displayregion may be different depending on respective dots of the colorcomponents. Embodiments of the disclosed invention are not limited to adisplay device for color display; the disclosed invention can also beapplied to a display device for monochrome display.

A coloring layer (also referred to as a color filter) may be used toobtain a full-color display device in which white light (W) is used fora backlight (e.g., an organic EL element, an inorganic EL element, anLED, or a fluorescent lamp). As the coloring layer, red (R), green (G),blue (B), yellow (Y), or the like may be combined as appropriate, forexample. With the use of the coloring layer, higher colorreproducibility can be obtained than in the case without the coloringlayer. In this case, by providing a region with the coloring layer and aregion without the coloring layer, white light in the region without thecoloring layer may be directly utilized for display. By partly providingthe region without the coloring layer, a decrease in luminance due tothe coloring layer can be suppressed, and 20% to 30% of powerconsumption can be reduced in some cases when an image is displayedbrightly. Note that in the case where full-color display is performedusing a self-luminous element such as an organic EL element or aninorganic EL element, elements may emit light of their respective colorsR, G, B, Y, and W. By using a self-luminous element, power consumptioncan be further reduced as compared to the case of using the coloringlayer in some cases.

As a coloring system, any of the following systems may be used: the 131.above-described color filter system in which part of white light isconverted into red light, green light, and blue light through colorfilters; a three-color system in which red light, green light, and bluelight are used; and a color conversion system or a quantum dot system inwhich part of blue light is converted into red light or green light.

In this embodiment, a structure including a liquid crystal element andan EL element as display elements is described with reference to FIG.57, FIG. 58, and FIG. 59. Note that FIG. 57 and FIG. 58 are each across-sectional view taken along the dashed-dotted line Q-R shown inFIG. 56 and show a structure including a liquid crystal element as adisplay element. FIG. 59 is a cross-sectional view taken alongdashed-dotted line Q-R in FIG. 56 and illustrates the structureincluding an EL element as a display element.

Portions common to FIG. 57, FIG. 58, and FIG. 59 are described first,and then different portions are described.

[Common Portions in Display Devices]

The display device 700 illustrated in FIG. 57, FIG. 58, and FIG. 59include a lead wiring portion 711, the pixel portion 702, the sourcedriver circuit portion 704, and the FPC terminal portion 708. Note thatthe lead wiring portion 711 includes the signal line 710. The pixelportion 702 includes a transistor 750 and a capacitor 790. The sourcedriver circuit portion 704 includes a transistor 752.

The transistor 750 and the transistor 752 each have a structure similarto that of the transistor 100B described above. Note that the transistor750 and the transistor 752 may each have the structure of any of theother transistors described in the above embodiments.

The transistors used in this embodiment each include an oxidesemiconductor film which is highly purified and in which formation ofoxygen vacancies is suppressed. The transistor can have low off-statecurrent. Accordingly, an electrical signal such as an image signal canbe held for a longer period, and a writing interval can be set longer inan on state. Accordingly, the frequency of refresh operation can bereduced, which leads to an effect of suppressing power consumption.

In addition, the transistor used in this embodiment can have relativelyhigh field-effect mobility and thus is capable of high speed operation.For example, with such a transistor which can operate at high speed usedfor a liquid crystal display device, a switching transistor in a pixelportion and a driver transistor in a driver circuit portion can beformed over one substrate. That is, a semiconductor device formed usinga silicon wafer or the like is not additionally needed as a drivercircuit, by which the number of components of the semiconductor devicecan be reduced. In addition, the transistor which can operate at highspeed can be used also in the pixel portion, whereby a high-qualityimage can be provided.

A capacitor 790 includes a lower electrode that is formed through a stepof processing the same conductive film as a conductive film functioningas a first gate electrode of the transistor 750 and an upper electrodethat is formed through a step of processing the same conductive film asa conductive film functioning as a source electrode or a drain electrodeof the transistor 750. Furthermore, between the lower electrode and theupper electrode, an insulating film that is formed through a step offorming the same insulating film as an insulating film functioning as afirst gate insulating film of the transistor 750 and an insulating filmthat is formed through a step of forming the same insulating film as aninsulating film functioning as a protective insulating film of thetransistor 750 are provided. That is, the capacitor 790 has astacked-layer structure in which the insulating films functioning as adielectric film are positioned between a pair of electrodes.

In FIG. 57, FIG. 58, and FIG. 59, a planarization insulating film 770 isprovided over the transistor 750, the transistor 752, and the capacitor790.

Although FIG. 57, FIG. 58, and FIG. 59 each illustrate an example inwhich the transistor 750 included in the pixel portion 702 and thetransistor 752 included in the source driver circuit portion 704 havethe same structure, one embodiment of the present invention is notlimited thereto. For example, the pixel portion 702 and the sourcedriver circuit portion 704 may include different transistors.Specifically, a structure in which a top-gate transistor is used in thepixel portion 702 and a bottom-gate transistor is used in the sourcedriver circuit portion 704, or a structure in which a bottom-gatetransistor is used in the pixel portion 702 and a top-gate transistor isused in the source driver circuit portion 704 may be employed. Note thatthe term “source driver circuit portion 704” can be replaced by the term“gate driver circuit portion”.

The signal line 710 is formed through the same process as the conductivefilms functioning as source electrodes and drain electrodes of thetransistors 750 and 752. In the case where the signal line 710 is formedusing a material including a copper element, signal delay or the likedue to wiring resistance is reduced, which enables display on a largescreen.

The FPC terminal portion 708 includes a connection electrode 760, ananisotropic conductive film 780, and the FPC 716. Note that theconnection electrode 760 is formed through the same process as theconductive films functioning as source electrodes and drain electrodesof the transistors 750 and 752. The connection electrode 760 iselectrically connected to a terminal included in the FPC 716 through theanisotropic conductive film 780.

For example, a glass substrate can be used as the first substrate 701and the second substrate 705. A flexible substrate may be used as thefirst substrate 701 and the second substrate 705. Examples of theflexible substrate include a plastic substrate.

A structure body 778 is provided between the first substrate 701 and thesecond substrate 705. The structure body 778 is a columnar spacerobtained by selective etching of an insulating film and provided tocontrol the distance (cell gap) between the first substrate 701 and thesecond substrate 705. Note that a spherical spacer may be used as thestructure body 778.

Furthermore, a light-blocking film 738 functioning as a black matrix, acoloring film 736 functioning as a color filter, and an insulating film734 in contact with the light-blocking film 738 and the coloring film736 are provided on the second substrate 705 side.

[Structure Example of Display Device Using Liquid Crystal Element]

The display device 700 illustrated in FIG. 57 includes a liquid crystalelement 775. The liquid crystal element 775 includes a conductive film772, a conductive film 774, and a liquid crystal layer 776. Theconductive film 774 is provided on the second substrate 705 side andfunctions as a counter electrode. The display device 700 illustrated inFIG. 57 can display an image in such a manner that transmission ornon-transmission of light is controlled by the alignment state in theliquid crystal layer 776 which is changed depending on the voltageapplied to between the conductive film 772 and the conductive film 774.

The conductive film 772 is electrically connected to the conductive filmthat functions as a source electrode and a drain electrode included inthe transistor 750. The conductive film 772 is formed over theplanarization insulating film 770 to function as a pixel electrode,i.e., one electrode of the display element.

A conductive film that transmits visible light or a conductive film thatreflects visible light can be used for the conductive film 772. Forexample, a material including one kind selected from indium (In), zinc(Zn), and tin (Sn) is preferably used for the conductive film thattransmits visible light. For example, a material including aluminum orsilver may be used for the conductive film that reflects visible light.

In the case where a conductive film that reflects visible light is usedas the conductive film 772, the display device 700 becomes areflective-type liquid crystal display device. In the case where aconductive film that transmits visible light is used as the conductivefilm 772, the display device 700 becomes a transmissive liquid crystaldisplay device.

When a structure over the conductive film 772 is changed, a drivingmethod of the liquid crystal element can be changed. An example of thiscase is illustrated in FIG. 58. The display device 700 illustrated inFIG. 58 is an example of employing a transverse electric field mode(e.g., an FFS mode) as a driving mode of the liquid crystal element. Inthe structure illustrated in FIG. 58, an insulating film 773 is providedover the conductive film 772 and the conductive film 774 is providedover the insulating film 773. In such a structure, the conductive film774 functions as a common electrode, and an electric field generatedbetween the conductive film 772 and the conductive film 774 through theinsulating film 773 can control the alignment state of the liquidcrystal layer 776.

Although not illustrated in FIG. 57 and FIG. 58, the conductive film 772and/or the conductive film 774 may be provided with an alignment film ona side in contact with the liquid crystal layer 776. Although notillustrated in FIG. 57 and FIG. 58, an optical member (opticalsubstrate) or the like, such as a polarizing member, a retardationmember, or an anti-reflection member, may be provided as appropriate.For example, circular polarization may be employed by using a polarizingsubstrate and a retardation substrate. In addition, a backlight, a sidelight, or the like may be used as a light source.

In the case where a liquid crystal element is used as the displayelement, a thermotropic liquid crystal, a low-molecular liquid crystal,a high-molecular liquid crystal, a polymer-dispersed liquid crystal, aferroelectric liquid crystal, an anti-ferroelectric liquid crystal, orthe like can be used. Such a liquid crystal material exhibits acholesteric phase, a smectic phase, a cubic phase, a chiral nematicphase, an isotropic phase, or the like depending on conditions.

Alternatively, in the case of employing a horizontal electric fieldmode, a liquid crystal exhibiting a blue phase for which an alignmentfilm is unnecessary may be used. A blue phase is one of liquid crystalphases, which is generated just before a cholesteric phase changes intoan isotropic phase while temperature of cholesteric liquid crystal isincreased. Since the blue phase appears only in a narrow temperaturerange, a liquid crystal composition in which several weight percent ormore of a chiral material is mixed is used for the liquid crystal layerin order to improve the temperature range. The liquid crystalcomposition which includes liquid crystal exhibiting a blue phase and achiral material has a short response time and optical isotropy, whichmakes the alignment process unneeded. An alignment film does not need tobe provided and rubbing treatment is thus not necessary; accordingly,electrostatic discharge damage caused by the rubbing treatment can beprevented and defects and damage of the liquid crystal display device inthe manufacturing process can be reduced. Moreover, the liquid crystalmaterial which exhibits a blue phase has a small viewing angledependence.

In the case where a liquid crystal element is used as the displayelement, a twisted nematic (TN) mode, an in-plane-switching (IPS) mode,a fringe field switching (FFS) mode, an axially symmetric alignedmicro-cell (ASM) mode, an optical compensated birefringence (OCB) mode,a ferroelectric liquid crystal (FLC) mode, an antiferroelectric liquidcrystal (AFLC) mode, or the like can be used.

Furthermore, a normally black liquid crystal display device such as atransmissive liquid crystal display device utilizing a verticalalignment (VA) mode may also be used. There are some examples of avertical alignment mode; for example, a multi-domain vertical alignment(MVA) mode, a patterned vertical alignment (PVA) mode, an ASV mode, orthe like can be employed.

[Display Device Including Light-Emitting Element]

The display device 700 illustrated in FIG. 59 includes a light-emittingelement 782. The light-emitting element 782 includes a conductive film772, an EL layer 786, and a conductive film 788. The display device 700shown in FIG. 59 is capable of displaying an image by light emissionfrom the EL layer 786 included in the light-emitting element 782. Notethat the EL layer 786 contains an organic compound or an inorganiccompound such as a quantum dot.

Examples of materials that can be used for an organic compound include afluorescent material and a phosphorescent material. Examples ofmaterials that can be used for a quantum dot include a colloidal quantumdot material, an alloyed quantum dot material, a core-shell quantum dotmaterial, and a core quantum dot material. The quantum dot containingelements belonging to Groups 12 and 16, elements belonging to Groups 13and 15, or elements belonging to Groups 14 and 16, may be used.Alternatively, a quantum dot material containing an element such ascadmium (Cd), selenium (Se), zinc (Zn), sulfur (S), phosphorus (P),indium (In), tellurium (Te), lead (Pb), gallium (Ga), arsenic (As), oraluminum (Al) may be used.

The EL layer 786 can be formed using the above-described organiccompound and the inorganic compound by a method such as an evaporationmethod (including a vacuum evaporation method), a droplet dischargingmethod (also referred to as an ink-jet method), a coating method, or agravure printing method. A low molecular material, a middle molecularmaterial (including an oligomer and a dendrimer), or a high molecularmaterial may be included in the EL layer 786.

Here, a method for forming the EL layer 786 by a droplet dischargemethod is described with reference to FIGS. 60A to 60D. FIGS. 60A to 60Dare cross-sectional views illustrating the method for forming the ELlayer 786.

First, the conductive film 772 is formed over the planarizationinsulating film 770, and an insulating film 730 is formed to cover partof the conductive film 772 (see FIG. 60A).

Next, a droplet 784 is discharged to an exposed portion of theconductive film 772, which is an opening of the insulating film 730,from a droplet discharge apparatus 783, so that a layer 785 containing acomposition is formed. The droplet 784 is a composition containing asolvent and is attached over the conductive film 772 (see FIG. 60B).

Note that the method for discharging the droplet 784 may be performedunder reduced pressure.

Then, the solvent is removed from the layer 785 containing thecomposition, and the resulting layer is solidified to form the EL layer786 (see FIG. 60C).

The solvent may be removed by drying or heating.

Next, the conductive film 788 is formed over the EL layer 786; thus, thelight-emitting element 782 is formed (see FIG. 60D)

When the EL layer 786 is formed by a droplet discharging method asdescribed above, the composition can be selectively discharged;accordingly, waste of material can be reduced. Furthermore, alithography process or the like for shaping is not needed, and thus, theprocess can be simplified and cost reduction can be achieved.

The droplet discharge method described above is a general term for ameans including a nozzle equipped with a composition discharge openingor a means to discharge droplets such as a head having one or aplurality of nozzles.

Next, a droplet discharge apparatus used for the droplet dischargemethod is described with reference to FIG. 61. FIG. 61 is a conceptualdiagram illustrating a droplet discharge apparatus 1400.

The droplet discharge apparatus 1400 includes a droplet discharge means1403. In addition, the droplet discharge means 1403 is equipped with ahead 1405 and a head 1412.

The heads 1405 and 1412 are connected to a control means 1407, and thiscontrol means 1407 is controlled by a computer 1410; thus, apreprogrammed pattern can be drawn.

The drawing may be conducted at a timing, for example, based on a marker1411 formed over a substrate 1402. Alternatively, the reference pointmay be determined on the basis of an outer edge of the substrate 1402.Here, the marker 1411 is detected by an imaging means 1404 and convertedinto a digital signal by an image processing means 1409. Then, thedigital signal is recognized by the computer 1410, and then, a controlsignal is generated and transmitted to the control means 1407.

An image sensor or the like using a charge coupled device (CCD) or acomplementary metal oxide semiconductor (CMOS) can be used as theimaging means 1404. Data about a pattern to be formed over the substrate1402 is stored in a storage medium 1408, and the control signal istransmitted to the control means 1407 based on the data, so that each ofthe heads 1405 and 1412 of the droplet discharging means 1403 can beindividually controlled. The heads 1405 and 1412 are supplied with amaterial to be discharged from material supply sources 1413 and 1414through pipes, respectively.

Inside the head 1405, a space as indicated by a dotted line 1406 to befilled with a liquid material and a nozzle which is a discharge outletare provided. Although it is not shown, an inside structure of the head1412 is similar to that of the head 1405. When the nozzle sizes of theheads 1405 and 1412 are different from each other, different materialswith different widths can be discharged simultaneously. Each head candischarge and draw a plurality of light emitting materials. In the caseof drawing over a large area, the same material can be simultaneouslydischarged to be drawn from a plurality of nozzles in order to improvethroughput. When a large substrate is used, the heads 1405 and 1412 canfreely scan the substrate in directions indicated by arrows X, Y, and Zin FIG. 61, and a region in which a pattern is drawn can be freely set.Thus, a plurality of the same patterns can be drawn over one substrate.

Further, a step of discharging the composition may be performed underreduced pressure. Also, a substrate may be heated when the compositionis discharged. After discharging the composition, either drying orbaking or the both is performed. Both the drying and baking are heattreatments but different in purpose, temperature, and time period. Thesteps of drying and baking are performed under normal pressure or underreduced pressure by laser irradiation, rapid thermal annealing, heatingusing a heating furnace, or the like. Note that the timing of the heattreatment and the number of times of the heat treatment are notparticularly limited. The temperature for performing each of the stepsof drying and baking in a favorable manner depends on the materials ofthe substrate and the properties of the composition.

In the above manner, the EL layer 786 can be formed with the dropletdischarge apparatus.

The display device 700 shown in FIG. 59 is described again.

In the display device 700 in FIG. 59, an insulating film 730 is providedover the planarization insulating film 770 and the conductive film 772.The insulating film 730 covers part of the conductive film 772. Notethat the light-emitting element 782 has a top emission structure.Therefore, the conductive film 788 has a light-transmitting property andtransmits light emitted from the EL layer 786. Although the top-emissionstructure is described as an example in this embodiment, one embodimentof the present invention is not limited thereto. A bottom-emissionstructure in which light is emitted to the conductive film 772 side, ora dual-emission structure in which light is emitted to both theconductive film 772 side and the conductive film 788 side may beemployed.

The coloring film 736 is provided to overlap with the light-emittingelement 782, and the light-blocking film 738 is provided to overlap withthe insulating film 730 and to be included in the lead wiring portion711 and in the source driver circuit portion 704. The coloring film 736and the light-blocking film 738 are covered with the insulating film734. A space between the light-emitting element 782 and the insulatingfilm 734 is filled with a sealing film 732. Although a structure withthe coloring film 736 is described as the display device 700 in FIG. 59,the structure is not limited thereto. In the case where the EL layer 786is formed by a separate coloring method, the coloring film 736 is notnecessarily provided.

[Structure Example of Display Device Provided with Input/Output Device]

An input/output device may be provided in the display device 700illustrated in FIG. 58 and FIG. 59. As an example of the input/outputdevice, a touch panel or the like can be given.

FIG. 62 illustrates a structure in which the display device 700 shown inFIG. 58 includes a touch panel 791. FIG. 63 illustrates a structure inwhich the display device 700 shown in FIG. 59 includes the touch panel791.

FIG. 62 is a cross-sectional view of the structure in which the touchpanel 791 is provided in the display device 700 illustrated in FIG. 58.FIG. 63 is a cross-sectional view of the structure in which the touchpanel 791 is provided in the display device 700 illustrated in FIG. 59.

First, the touch panel 791 illustrated in FIG. 62 and FIG. 63 isdescribed below.

The touch panel 791 illustrated in FIG. 62 and FIG. 63 is an in-celltouch panel provided between the substrate 705 and the coloring film736. The touch panel 791 is formed on the substrate 705 side before thelight-blocking film 738 and the coloring film 736 are formed.

The touch panel 791 includes the light-blocking film 738, an insulatingfilm 792, an electrode 793, an electrode 794, an insulating film 795, anelectrode 796, and an insulating film 797. A change in the mutualcapacitance between the electrode 793 and the electrode 794 can besensed when an object such as a finger or a stylus approaches, forexample.

A portion in which the electrode 793 intersects with the electrode 794is illustrated in the upper portion of the transistor 750 illustrated inFIG. 62 and FIG. 63. Through openings in the insulating film 795, theelectrode 796 is electrically connected to the two electrodes 793between which the electrode 794 is positioned. Note that a structure inwhich a region where the electrode 796 is provided is provided in thepixel portion 702 is illustrated in FIG. 62 and FIG. 63 as an example;however, one embodiment of the present invention is not limited thereto.For example, the region where the electrode 796 is provided may beprovided in the source driver circuit portion 704.

The electrodes 793 and 794 are provided in a region overlapping with thelight-blocking film 738. As illustrated in FIG. 62, it is preferablethat the electrode 793 do not overlap with the light-emitting element782. As illustrated in FIG. 63, it is preferable that the electrode 793do not overlap with the liquid crystal element 775. In other words, theelectrode 793 has an opening in its region overlapping with thelight-emitting element 782 and the liquid crystal element 775. That is,the electrode 793 has a mesh shape. With this structure, the electrode793 does not block light emitted from the light-emitting element 782.Alternatively, the electrode 793 can have a structure which does notblock light transmitted through the liquid crystal element 775. Thus,since luminance is hardly reduced even when the touch panel 791 isplaced, a display device with high visibility and low power consumptioncan be achieved. Note that the electrode 794 can have a similarstructure.

In addition, since the electrodes 793 and 794 do not overlap with thelight-emitting element 782, the electrodes 793 and 794 can be formedusing a metal material with low visible light transmittance. In the casewhere the electrode 793 and the electrode 794 do not overlap with theliquid crystal element 775, a metal material having low transmittancewith respect to visible light can be used for the electrode 793 and theelectrode 794.

Accordingly, the resistance of the electrodes 793 and 794 can be reducedas compared with an electrode using an oxide material with high visiblelight transmittance, so that the sensitivity of the touch panel can beincreased.

For example, conductive nanowires may be used for the electrodes 793,794, and 796. The nanowires may have a mean diameter of greater than orequal to 1 nm and less than or equal to 100 nm, preferably greater thanor equal to 5 nm and less than or equal to 50 nm, further preferablygreater than or equal to 5 nm and less than or equal to 25 nm. As thenanowire, a carbon nanotube or a metal nanowire such as an Ag nanowire,a Cu nanowire, or an Al nanowire may be used. For example, in the casewhere a Ag nanowire is used for any one of or all of the electrodes 664,665, and 667, the transmittance of visible light can be greater than orequal to 89% and the sheet resistance can be greater than or equal to 40Ω/square and less than or equal to 100 Ω/square.

Although the structure of the in-cell touch panel is illustrated in FIG.62 and FIG. 63, one embodiment of the present invention is not limitedthereto. For example, a touch panel formed over the display device 700(an on-cell touch panel), or a touch panel attached to the displaydevice 700 (an out-cell touch panel) may be used.

In this manner, the display device of one embodiment of the presentinvention can be combined with various types of touch panels.

At least part of this embodiment can be implemented in combination withany of the other embodiments described in this specification asappropriate.

Embodiment 6

In this embodiment, an example of a semiconductor device of oneembodiment of the present invention will be described. A transistor inthis embodiment is suitable for miniaturization.

FIGS. 64A to 64C illustrate a top surface of a transistor 200. FIG. 64Aillustrates a top surface of the transistor 200. For simplification ofthe figure, some films are omitted in FIG. 64A. FIG. 64B is across-sectional view taken along dashed-dotted line X1-X2 in FIG. 64A.FIG. 64C is a cross-sectional view taken along dashed-dotted line Y1-Y2in FIG. 64A.

The transistor 200 includes a conductor 205 (a conductor 205 a and aconductor 205 b) and a conductor 260 (a conductor 260 a and a conductor260 b) that function as gate electrodes; an insulator 220, an insulator222, an insulator 224, and an insulator 250 that function as gateinsulating layers; an oxide semiconductor 230 (an oxide semiconductor230 a, an oxide semiconductor 230 b, and an oxide semiconductor 230 c)that includes a region where a channel is formed; a conductor 240 a thatfunctions as one of a source and a drain; a conductor 240 b thatfunctions as the other of the source and the drain; and an insulator 280that includes excess oxygen.

The oxide semiconductor 230 includes the oxide semiconductor 230 a, theoxide semiconductor 230 b over the oxide semiconductor 230 a, and theoxide semiconductor 230 c over the oxide semiconductor 230 b. When thetransistor 200 is turned on, a current flows (a channel is formed)mainly in the oxide semiconductor 230 b. Although current sometimesflows through a region in the vicinity of the interface (a mixed regionin some cases) between the oxide semiconductor 230 b and the oxidesemiconductors 230 a and 230 c, the oxide semiconductors 230 a and 230 cfunction as insulators at the other region.

FIGS. 64A to 64C illustrate a stacked-layer structure in which theconductor 260 serving as a gate electrode includes the conductor 260 aand the conductor 260 b. The insulator 270 is provided over theconductor 260 serving as a gate electrode.

The conductor 205 is formed using a metal film containing an elementselected from molybdenum, titanium, tantalum, tungsten, aluminum,copper, chromium, neodymium, and scandium; a metal nitride filmcontaining any of the above elements as its component (e.g., a titaniumnitride film, a molybdenum nitride film, or a tungsten nitride film); orthe like. Alternatively, a conductive material such as indium tin oxide,indium oxide containing tungsten oxide, indium zinc oxide containingtungsten oxide, indium oxide containing titanium oxide, indium tin oxidecontaining titanium oxide, indium zinc oxide, or indium tin oxide towhich silicon oxide is added can also be used.

For example, a conductor having a barrier property with respect tohydrogen, e.g., tantalum nitride, may be used as the conductor 205 a,and tungsten, which has high conductivity, may be stacked thereover asthe conductor 205 b. The use of the combination of the materials canprevent diffusion of hydrogen into the oxide semiconductor 230 whileconductivity of a wiring is ensured. A two-layer structure of aconductor 205 a and a conductor 205 b is shown in FIGS. 64A and 64B, butthe structure of the conductor 205 is not limited thereto, and asingle-layer structure or a stacked-layer structure of three or morelayers may be used.

Each of the insulators 220 and 224 is preferably an insulator containingoxygen, such as a silicon oxide film or a silicon oxynitride film. Inparticular, the insulator 224 is preferably an insulator containingexcess oxygen (containing oxygen in excess of that in the stoichiometriccomposition). In the case where such an insulator containing excessoxygen is provided in contact with an oxide in the transistor 200,oxygen vacancies in the oxide can be compensated. Note that theinsulators 220 and 224 are not necessarily formed of the same material.

The insulator 222 preferably has a single-layer structure or astacked-layer structure formed using an insulator containing a high-kmaterial such as silicon oxide, silicon oxynitride, silicon nitrideoxide, aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide,lead zirconate titanate (PZT), strontium titanate (SrTiO₃), or(Ba,Sr)TiO₃ (BST). Aluminum oxide, bismuth oxide, germanium oxide,niobium oxide, silicon oxide, titanium oxide, tungsten oxide, yttriumoxide, or zirconium oxide may be added to the insulator, for example.The insulator may be subjected to nitriding treatment. A layer ofsilicon oxide, silicon oxynitride, or silicon nitride may be stackedover the insulator.

Note that the insulator 222 may have a stacked-layer structure of two ormore layers. In this case, the stacked layers are not necessarily formedof the same material but may be formed of different materials.

In the case where the insulator 222 including a high-k material isprovided between the insulator 220 and the insulator 224, electrons canbe trapped in the insulator 222 under specific conditions, and thethreshold voltage can be increased. As a result, the insulator 222 isnegatively charged in some cases.

For example, in the case where the insulator 220 and the insulator 224are formed using silicon oxide and the insulator 222 is formed using amaterial having a lot of electron trap states such as hafnium oxide,aluminum oxide, or tantalum oxide, the state where the potential of theconductor 205 is higher than the potential of the source electrode andthe drain electrode is kept at a temperature higher than the operatingtemperature or the storage temperature of the semiconductor device(e.g., at a temperature of 125° C. or higher and 450° C. or lower,typically 150° C. or higher and 300° C. or lower) for 10 milliseconds orlonger, typically one minute or longer. Thus, electrons are moved fromthe oxide in the transistor 200 to the conductor 205. At this time, someof the moving electrons are trapped by the electron trap states of theinsulator 222.

In the transistor in which a necessary amount of electrons is trapped bythe electron trap states of the insulator 222, the threshold voltage isshifted in the positive direction. By controlling the voltage of theconductor 205, the amount of electrons to be trapped can be controlled,and thus the threshold voltage can be controlled. The transistor 200having the structure is a normally-off transistor which is in anon-conduction state (also referred to as an off state) even when thegate voltage is 0 V.

The treatment for trapping the electrons may be performed in themanufacturing process of the transistor. For example, the treatment ispreferably performed at any step before factory shipment, such as afterthe formation of a conductor connected to a source conductor or a drainconductor of the transistor, after the preceding process (waferprocessing), after a wafer-dicing step, or after packaging.

The threshold voltages can be controlled by appropriate adjustment ofthe thicknesses of the insulator 220, the insulator 222, and theinsulator 224. A transistor having a low leakage current in an off statecan be provided. A transistor with stable electrical characteristics canbe provided. A transistor having a high on-state current can beprovided. A transistor with a small subthreshold swing value can beprovided. A highly reliable transistor can be provided.

The oxide semiconductor 230 a, the oxide semiconductor 230 b, and theoxide semiconductor 230 c are formed using metal oxide such as In-

-Zn oxide (

is Al, Ga, Y, or Sn). In—Ga oxide or In—Zn oxide may be used as theoxide semiconductor 230.

The insulator 250 can have a single-layer structure or a stacked-layerstructure using, for example, one or more of an insulator containing ahigh-k material such as silicon oxide, silicon oxynitride, siliconnitride oxide, aluminum oxide, hafnium oxide, tantalum oxide, zirconiumoxide, lead zirconate titanate (PZT), strontium titanate (SrTiO₃), and(Ba,Sr)TiO₃ (BST). Aluminum oxide, bismuth oxide, germanium oxide,niobium oxide, silicon oxide, titanium oxide, tungsten oxide, yttriumoxide, or zirconium oxide may be added to the insulator, for example.The insulator may be subjected to nitriding treatment. A layer ofsilicon oxide, silicon oxynitride, or silicon nitride may be stackedover the insulator.

As the insulator 250, like the insulator 224, an oxide insulator thatcontains oxygen in excess of the stoichiometric composition ispreferably used. When such an insulator containing excess oxygen isprovided in contact with the oxide semiconductor 230, oxygen vacanciesin the oxide semiconductor 230 can be reduced.

As the insulator 250, an insulating film formed of aluminum oxide,aluminum oxynitride, gallium oxide, gallium oxynitride, yttrium oxide,yttrium oxynitride, hafnium oxide, hafnium oxynitride, silicon nitride,or the like, which has barrier properties with respect to oxygen andhydrogen, can be used. The insulator formed of such a material functionsas a layer that prevents release of oxygen from the oxide semiconductor230 or entry of an impurity such as hydrogen from the outside.

Note that the insulator 250 may have a stacked-layer structure similarto that of the insulator 220, the insulator 222, and the insulator 224.When the insulator 250 includes an insulator in which a necessary amountof electrons is trapped by electron trap states, the threshold voltageof the transistor 200 can be shifted in the positive direction. Thetransistor 200 having the structure is a normally-off transistor whichis in a non-conduction state (also referred to as an off state) evenwhen the gate voltage is 0V.

In addition to the insulator 250, a barrier film may be provided betweenthe oxide semiconductor 230 and the conductor 260 in the semiconductordevice illustrated in FIGS. 64A and 64B. The oxide semiconductor 230 cmay have a barrier property.

For example, an insulating film containing excess oxygen is provided incontact with the oxide semiconductor 230 and covered by a barrier film,whereby the composition of the oxide can be almost the same as thestoichiometric composition or can be in a supersaturated statecontaining more oxygen than that in the stoichiometric composition. Itis also possible to prevent entry of impurities such as hydrogen intothe oxide semiconductor 230.

One of a pair of the conductor 240 a and the conductor 240 b functionsas a source electrode, and the other pair functions as a drainelectrode.

Any of metals such as aluminum, titanium, chromium, nickel, copper,yttrium, zirconium, molybdenum, silver, tantalum, and tungsten, or analloy containing any of the metals as its main component can be used foreach of the conductors 240 a and 240 b. Although a single layerstructure is shown in figures, a stacked-layer structure of two or morelayers may be used.

For example, a titanium film and an aluminum film are may be stacked.Other examples include a two-layer structure where an aluminum film isstacked over a tungsten film, a two-layer structure where a copper filmis stacked over a copper-magnesium-aluminum alloy film, a two-layerstructure where a copper film is stacked over a titanium film, and atwo-layer structure where a copper film is stacked over a tungsten film.

Other examples include a three-layer structure where a titanium film ora titanium nitride film is formed, an aluminum film or a copper film isstacked over the titanium film or the titanium nitride film, and atitanium film or a titanium nitride film is formed over the aluminumfilm or the copper film; and a three-layer structure where a molybdenumfilm or a molybdenum nitride film is formed, an aluminum film or acopper film is stacked over the molybdenum film or the molybdenumnitride film, and a molybdenum film or a molybdenum nitride film isformed over the aluminum film or the copper film. Note that atransparent conductive material containing indium oxide, tin oxide, orzinc oxide may be used.

The conductor 260 functioning as a gate electrode can be formed using,for example, a metal selected from aluminum, chromium, copper, tantalum,titanium, molybdenum, and tungsten, an alloy containing any of thesemetals as its component, an alloy containing any of these metals incombination, or the like. Furthermore, one or both of manganese andzirconium may be used. Alternatively, a semiconductor typified bypolycrystalline silicon doped with an impurity element such asphosphorus, or a silicide such as nickel silicide may be used.

For example, a two-layer structure in which a titanium film is stackedover an aluminum film. Other examples include a two-layer structurewhere a titanium film is stacked over a titanium nitride film, atwo-layer structure where a tungsten film is stacked over a titaniumnitride film, and a two-layer structure where a tungsten film is stackedover a tantalum nitride film or a tungsten nitride film.

Other examples include a three-layer structure where a titanium film isformed, an aluminum film is stacked over the titanium film, and atitanium film is formed over the aluminum film. Alternatively, an alloyfilm or a nitride film that contains aluminum and one or more elementsselected from titanium, tantalum, tungsten, molybdenum, chromium,neodymium, and scandium may be used.

The conductor 260 can also be formed using a light-transmittingconductive material such as indium tin oxide, indium oxide containingtungsten oxide, indium zinc oxide containing tungsten oxide, indiumoxide containing titanium oxide, indium tin oxide containing titaniumoxide, indium zinc oxide, or indium tin oxide to which silicon oxide isadded. It is also possible to have a stacked-layer structure formedusing the above light-transmitting conductive material and the abovemetal.

The conductor 260 a is formed by a thermal CVD method, an MOCVD method,and an ALD method. In particular, the conductor 260 a is preferablyformed by an atomic layer deposition (ALD) method. Plasma damage to theinsulator 250 can be reduced by using an ALD method and the like. Inaddition, the ALD method is preferable because coverage can be improved.Accordingly, a highly reliable transistor 200 can be provided.

The conductor 260 b is formed by a material with high conductivity suchas tantalum, tungsten, copper, or aluminum.

The insulator 270 may be provided to cover the conductor 260. In thecase where the insulator 280 is formed using an oxide material fromwhich oxygen is released, the insulator 270 is formed using a substancehaving a barrier property with respect to oxygen to prevent theconductor 260 from being oxidized by the released oxygen.

For example, the insulator 270 can be formed using metal oxide such asaluminum oxide. The insulator 270 is formed to a thickness with whichthe oxidation of the conductor 260 is prevented. For example, thethickness of the insulator 270 is set greater than or equal to 1 nm andless than or equal to 10 nm, preferably greater than or equal to 3 nmand less than or equal to 7 nm.

Thus, the oxidation of the conductor 260 can be prevented, and oxygenreleased from the insulator 280 can be supplied to the oxidesemiconductor 230 efficiently.

An insulator 280 is provided over the transistor 200. The insulator 280preferably includes oxide containing oxygen in excess of that in thestoichiometric composition. That is, in the insulator 280, a regioncontaining oxygen in excess of that in the stoichiometric composition(hereinafter also referred to as excess-oxygen region) is preferablyformed. In particular, in the case of using an oxide semiconductor inthe transistor 200, when an insulator including an excess-oxygen regionis provided as an interlayer film or the like in the vicinity of thetransistor 200, oxygen vacancies in the transistor 200 are reduced,whereby the reliability can be improved.

As the insulator including the excess-oxygen region, specifically, anoxide material that releases part of oxygen by heating is preferablyused. Oxide that releases part of oxygen by heating is an oxide film ofwhich the amount of released oxygen converted into oxygen atoms isgreater than or equal to 1.0×10¹⁸ atoms/cm³, preferably greater than orequal to 3.0×10²⁰ atoms/cm³ in TDS analysis. Note that the temperatureof the film surface in the TDS analysis is preferably higher than orequal to 100° C. and lower than or equal to 700° C., or higher than orequal to 100° C. and lower than or equal to 500° C.

For example, as such a material, a material containing silicon oxide orsilicon oxynitride is preferably used. Alternatively, a metal oxide canbe used. Note that in this specification, silicon oxynitride refers to amaterial that contains oxygen at a higher proportion than nitrogen, andsilicon nitride oxide refers to a material that contains nitrogen at ahigher proportion than oxygen.

The insulator 280 covering the transistor 200 may function as aplanarization film that covers a roughness thereunder.

Application Example

An example of stacking transistors with different compositions isdescribed below.

A semiconductor device shown in FIG. 65 includes a transistor 400, atransistor 200, and a capacitor 410.

The transistor 200 is a transistor in which a channel is formed in asemiconductor layer including an oxide semiconductor. Since theoff-state current of the transistor 200 is small, by using thetransistor 200 in the semiconductor device (memory device), stored datacan be held for a long time. In other words, it is possible to obtain asemiconductor device (memory device) which does not require refreshoperation or has an extremely low frequency of the refresh operation,which leads to a sufficient reduction in power consumption.

The semiconductor device includes the transistor 400, the transistor200, and the capacitor 410 as shown in FIG. 65. The transistor 200 isprovided over the transistor 400, and the capacitor 410 is provided overthe transistor 400 and the transistor 200.

The transistor 400 is provided over a substrate 401 and includes aconductor 406, an insulator 404, a semiconductor region 402 that is apart of the substrate 401, and low-resistance regions 408 a and 408 bfunctioning as a source region and a drain region.

The transistor 400 may be a p-channel transistor or an n-channeltransistor.

It is preferable that a region of the semiconductor region 402 where achannel is formed, a region in the vicinity thereof, the low-resistanceregions 408 a and 408 b functioning as a source region and a drainregion, and the like contain a semiconductor such as a silicon-basedsemiconductor, more preferably single crystal silicon. Alternatively, amaterial including germanium (Ge), silicon germanium (SiGe), galliumarsenide (GaAs), gallium aluminum arsenide (GaAlAs), or the like may becontained. Silicon whose effective mass is controlled by applying stressto the crystal lattice and thereby changing the lattice spacing may becontained. Alternatively, the transistor 400 may be ahigh-electron-mobility transistor (HEMT) with GaAs and GaAlAs or thelike.

The low-resistance regions 408 a and 408 b contain an element whichimparts n-type conductivity, such as arsenic or phosphorus, or anelement which imparts p-type conductivity, such as boron, in addition toa semiconductor material used for the semiconductor region 402.

The conductor 406 functioning as a gate electrode can be formed using asemiconductor material such as silicon containing the element whichimparts n-type conductivity, such as arsenic or phosphorus, or theelement which imparts p-type conductivity, such as boron, or aconductive material such as a metal material, an alloy material, or ametal oxide material.

Note that a material of the conductor determines the work function,whereby the threshold voltage can be adjusted. Specifically, it ispreferable to use titanium nitride, tantalum nitride, or the like as theconductor. Furthermore, in order to ensure the conductivity andembeddability of the conductor, it is preferable to use a laminatedlayer of metal materials such as tungsten and aluminum as the conductor.In particular, tungsten is preferable in terms of heat resistance.

Note that the transistor 400 shown in FIG. 65 is just an example and isnot limited to the structure shown therein; an appropriate transistormay be used in accordance with a circuit configuration or a drivingmethod.

An insulator 420, an insulator 422, an insulator 424, and an insulator426 are stacked sequentially and cover the transistor 400.

As the insulator 420, the insulator 422, the insulator 424, and theinsulator 426, for example, silicon oxide, silicon oxynitride, siliconnitride oxide, silicon nitride, aluminum oxide, aluminum oxynitride,aluminum nitride oxide, or aluminum nitride may be used.

The insulator 422 functions as a planarization film for eliminating alevel difference caused by the transistor 400 or the like underlying theinsulator 422. A top surface of the insulator 422 may be planarized byplanarization treatment using a chemical mechanical polishing (CMP)method or the like to increase the level of planarity.

The insulator 424 is preferably formed using, for example, a film havinga barrier property that prevents hydrogen or impurities from diffusingfrom the substrate 401, the transistor 400, or the like into a regionwhere the transistor 200 is formed.

As an example of the film having a barrier property with respect tohydrogen, silicon nitride formed by a CVD method can be given. Diffusionof hydrogen into a semiconductor element including an oxidesemiconductor, such as the transistor 200, degrades the characteristicsof the semiconductor element in some cases. Therefore, a film thatprevents hydrogen diffusion is preferably provided between thetransistor 200 and the transistor 400. Specifically, the film thatprevents hydrogen diffusion is a film from which hydrogen is less likelyto be released.

The amount of released hydrogen can be measured by thermal desorptionspectroscopy (TDS), for example. The amount of hydrogen released fromthe insulator 424 that is converted into hydrogen atoms per area of theinsulator 424 is less than or equal to 10×10¹⁵ atoms/cm², preferablyless than or equal to 5×10¹⁵ atoms/cm² in TDS analysis in the range of50° C. to 500° C., for example.

Note that the dielectric constant of the insulator 426 is preferablylower than that of the insulator 424. For example, the relativedielectric constant of the insulator 426 is preferably lower than 4,more preferably lower than 3. For example, the relative dielectricconstant of the insulator 424 is preferably 0.7 times or less that ofthe insulator 426, more preferably 0.6 times or less that of theinsulator 426. In the case where a material with a low dielectricconstant is used as an interlayer film, the parasitic capacitancebetween wirings can be reduced.

A conductor 428, a conductor 430, and the like that are electricallyconnected to the capacitor 410 or the transistor 200 are embedded in theinsulator 420, the insulator 422, the insulator 424, and the insulator426. Note that the conductor 428 and the conductor 430 each function asa plug or a wiring. Note that a plurality of structures of conductorsfunctioning as plugs or wirings are collectively denoted by the samereference numeral in some cases, as described later. Furthermore, inthis specification and the like, a wiring and a plug electricallyconnected to the wiring may be a single component. That is, there arecases where a part of a conductor functions as a wiring and a part of aconductor functions as a plug.

As a material of each of plugs and wirings (e.g., the conductor 428 andthe conductor 430), a conductive material such as a metal material, analloy material, a metal nitride material, or a metal oxide material canbe used in a single-layer structure or a stacked-layer structure. It ispreferable to use a high-melting-point material that has both heatresistance and conductivity, such as tungsten or molybdenum, and it isparticularly preferable to use tungsten. Alternatively, a low-resistanceconductive material such as aluminum or copper is preferably used. Theuse of a low-resistance conductive material can reduce wiringresistance.

Furthermore, the conductor 428 and the conductor 430 preferably includea conductor having a barrier property with respect to hydrogen. Theconductor having a barrier property with respect to hydrogen is formedparticularly in an opening portion of the insulator 424 having a barrierproperty with respect to hydrogen. In such a structure, the transistor400 and the transistor 200 can be separated by a layer having a barrierproperty, so that diffusion of hydrogen from the transistor 400 to thetransistor 200 can be prevented.

Note that as the conductor having a barrier property with respect tohydrogen, tantalum nitride may be used, for example. By stackingtantalum nitride and tungsten, which has high conductivity, diffusion ofhydrogen from the transistor 400 can be prevented while the conductivityof a wiring is ensured. In this case, a tantalum nitride layer having abarrier property with respect to hydrogen is preferably in contact withthe insulator 424 having a barrier property with respect to hydrogen.

A wiring layer may be provided over the insulator 426 and the conductor430. For example, in FIG. 65, an insulator 450, an insulator 452, and aninsulator 454 are stacked sequentially. The conductor 456 is formed inthe insulator 450, the insulator 452, and the insulator 454. Theconductor 456 functions as a plug or a wiring. Note that the conductor456 can be formed using a material similar to that used for forming theconductor 428 and the conductor 430.

In addition, the conductor 456 is preferably formed using alow-resistance conductive material such as aluminum or copper. The useof a low-resistance conductive material can reduce wiring resistance.When copper is used as the conductor 456, the conductor 456 ispreferably stacked with the conductor which inhibits diffusion ofcopper. As the conductor which inhibits diffusion of copper, forexample, tantalum, an alloy containing tantalum such as tantalumnitride, ruthenium, an alloy containing ruthenium, or the like ispreferably used.

Furthermore, an insulator which inhibits diffusion of copper or has abarrier property against oxygen and hydrogen is preferably used as theinsulator 450. For example, a silicon nitride film can be used as a filmwhich inhibits diffusion of copper. Therefore, the insulator 450 can beformed using a material similar to that used for forming the insulator424.

In particular, it is preferable to provide the conductor which inhibitsdiffusion of copper in contact with an opening of the insulator 450which inhibits diffusion of copper. Copper is preferably stacked overthe conductor which inhibits diffusion of copper. In such a structure,diffusion of copper around wirings can be prevented.

An insulator 458, an insulator 210, an insulator 212, and an insulator214 are stacked in this order over the insulator 454. A materialinhibiting diffusion of copper or a material having a barrier propertyagainst oxygen or hydrogen is preferably used for one or all of theinsulator 458, the insulator 210, the insulator 212, and the insulator214.

The insulator 458 and the insulator 212 are preferably formed using, forexample, a film inhibiting diffusion of copper or a film having abarrier property that prevents hydrogen or impurities from diffusingfrom a region where the substrate 401 or the transistor 400 is formed orthe like into a region where the transistor 200 is formed. Therefore,the insulator 458 and the insulator 212 can be formed using a materialsimilar to that used for forming the insulator 424.

The insulator 210 can be formed using a material similar to that of theinsulator 420. For example, a silicon oxide film, a silicon oxynitridefilm, or the like can be used as the insulator 210.

As the insulator 214, metal oxide such as aluminum oxide, hafnium oxide,or tantalum oxide is preferably used, for example.

In particular, aluminum oxide has an excellent blocking effect thatprevents permeation of oxygen and impurities such as hydrogen andmoisture which cause a change in electrical characteristics of thetransistor. Accordingly, the use of aluminum oxide can prevent entry ofimpurities such as hydrogen and moisture into the transistor 200 in andafter a manufacturing process of the transistor. In addition, release ofoxygen from oxide in the transistor 200 can be prevented. Therefore,aluminum oxide is suitably used as a protective film for the transistor200.

An insulator 216 is provided over the insulator 214. The insulator 216can be formed using a material similar to that used for forming theinsulator 420. For example, a silicon oxide film, a silicon oxynitridefilm, or the like can be used as the insulator 216.

A conductor 218, a conductor 205 forming the transistor 200, and thelike are embedded in the insulator 458, the insulator 210, the insulator212, the insulator 214, and the insulator 216. Note that the conductor218 functions as a plug or a wiring that is electrically connected tothe capacitor 410 or the transistor 400. The conductor 218 can be formedusing a material similar to that used for forming the conductor 428 andthe conductor 430.

In particular, the conductor 218 in contact with the insulator 458, theinsulator 212, and the insulator 214 is preferably a conductorinhibiting diffusion of copper or having a barrier property againstoxygen, hydrogen, and water. In this structure, the transistor 400 andthe transistor 200 can be completely separated by a layer inhibitingdiffusion of copper or having a barrier property against oxygen,hydrogen, and water. In other words, diffusion of copper from theconductor 456 can be inhibited and diffusion of hydrogen from thetransistor 400 to the transistor 200 can be prevented.

The transistor 200 and the insulator 280 are provided over the insulator214. Note that the transistor 200 shown in FIG. 65 is just an exampleand is not limited to the structure shown therein; an appropriatetransistor may be used in accordance with a circuit configuration or adriving method.

An insulator 282, an insulator 284, and an insulator 470 are stackedsequentially over the insulator 280. A conductor 244 and the like areembedded in an insulator 220, an insulator 222, an insulator 224, theinsulator 280, the insulator 282, the insulator 284, and the insulator470. A conductor 245 and the like which connect a conductor in an abovelayer are provided over the conductor such as the conductor 240 a andthe conductor 240 b included in the transistor 200. Note that theconductor 244 functions as a plug or a wiring that is electricallyconnected to the capacitor 410, the transistor 200, or the transistor400. The conductor 244 can be formed using a material similar to thatused for forming the conductor 428 and the conductor 430.

A material having a barrier property against oxygen or hydrogen ispreferably used for one or both of the insulator 282 and the insulator284. Thus, the insulator 282 can be formed using a material similar tothat used for forming the insulator 214. The insulator 284 can be formedusing a material similar to that used for forming the insulator 212.

As the insulator 282, metal oxide such as aluminum oxide, hafnium oxide,or tantalum oxide is preferably used, for example.

In particular, aluminum oxide has an excellent blocking effect thatprevents permeation of oxygen and impurities such as hydrogen andmoisture which cause a change in electrical characteristics of thetransistor. Accordingly, the use of aluminum oxide can prevent entry ofimpurities such as hydrogen and moisture into the transistor 200 in andafter a manufacturing process of the transistor. In addition, release ofoxygen from oxide in the transistor 200 can be prevented. Therefore,aluminum oxide is suitably used as a protective film for the transistor200.

The insulator 284 is preferably formed using, for example, a film havinga barrier property that prevents hydrogen or impurities from diffusingfrom a region where the capacitor 410 is formed into a region where thetransistor 200 is formed. Therefore, the insulator 284 can be formedusing a material similar to that used for forming the insulator 424.

As an example of the film having a barrier property against hydrogen,silicon nitride formed by a CVD method can be given. Diffusion ofhydrogen into a semiconductor element including an oxide semiconductor,such as the transistor 200, degrades the characteristics of thesemiconductor element in some cases. Therefore, a film that preventshydrogen diffusion is preferably provided between the transistor 200 andthe transistor 400. Specifically, the film that prevents hydrogendiffusion is a film from which hydrogen is less likely to be released.

Therefore, a structure can be obtained in which the transistor 200 andthe insulator 280 including the excess-oxygen region are positionedbetween a stacked-layer structure of the insulator 210, the insulator212, and the insulator 214 and a stacked-layer structure of theinsulator 282 and the insulator 284. The insulator 210, the insulator212, the insulator 214, the insulator 282 and the insulator 284 have abarrier property that prevents diffusion of oxygen or impurities such ashydrogen and water.

Accordingly, oxygen released from the insulator 280 and the transistor200 can be prevented from diffusing into the layer where the capacitor410 is formed or the layer where the transistor 400 is formed.Furthermore, impurities such as hydrogen and water can be prevented fromdiffusing from a layer over the insulator 282 and a layer under theinsulator 214 into the transistor 200.

That is, oxygen can be efficiently supplied from the excess-oxygenregion of the insulator 280 to oxide where a channel is formed in thetransistor 200, so that oxygen vacancies can be reduced. Moreover,oxygen vacancies can be prevented from being formed by impurities in theoxide where a channel is formed in the transistor 200. Thus, the oxidewhere a channel is formed in the transistor 200 can be an oxidesemiconductor with a low density of defect states and stablecharacteristics. That is, a change in electrical characteristics of thetransistor 200 can be prevented and the reliability can be improved.

The capacitor 410 and a conductor 474 are provided over the insulator470. The capacitor 410 is provided over the insulator 470 and includesthe conductor 462, the insulator 480, the insulator 482, the insulator484, and the conductor 466. Note that the conductor 474 functions as aplug or a wiring that is electrically connected to the capacitor 410,the transistor 200, or the transistor 400.

The conductor 462 can be formed using a conductive material such as ametal material, an alloy material, or a metal oxide material. It ispreferable to use a high-melting-point material which has both heatresistance and conductivity, such as tungsten or molybdenum, and it isparticularly preferable to use tungsten. In the case where the conductor462 is formed concurrently with another component such as a conductor,Cu (copper), Al (aluminum), or the like which is a low-resistance metalmaterial may be used.

Note that the conductor 474 can be formed using a material similar tothat used for forming the conductor 462 functioning as an electrode ofthe capacitor.

The insulator 480, the insulator 482, the insulator 484 are providedover the conductor 474 and the conductor 462. As the insulator 480, theinsulator 482, and the insulator 484, silicon oxide, silicon oxynitride,silicon nitride oxide, silicon nitride, aluminum oxide, aluminumoxynitride, aluminum nitride oxide, aluminum nitride, hafnium oxide,hafnium oxynitride, hafnium nitride oxide, hafnium nitride, or the likemay be used. Although a three-layer structure is shown in the drawings,a single layer, two-layer, or stacked-layer structure of four or morelayers may be used.

For example, a material with high dielectric strength such as siliconoxynitride is preferably used as the insulator 480 and the insulator484. In addition, as the insulator 484, a high dielectric constant(high-k) material such as aluminum oxide is preferably stacked with amaterial with high dielectric strength such as silicon oxynitride. Withthis structure, the capacitor 410 can have a sufficient capacitanceowing to a high dielectric constant (high-k) insulator and can have ahigher dielectric strength owing to an insulator with high dielectricstrength for avoiding electrostatic breakdown.

The conductor 466 is provided over the conductor 462 with the insulator480, the insulator 482, and the insulator 484 provided therebetween.Note that the conductor 466 can be formed using a conductive materialsuch as a metal material, an alloy material, or a metal oxide material.It is preferable to use a high-melting-point material which has bothheat resistance and conductivity, such as tungsten or molybdenum, and itis particularly preferable to use tungsten. In the case where theconductor 466 is formed concurrently with another component such as aconductor, Cu (copper), Al (aluminum), or the like which is alow-resistance metal material may be used.

For example, the insulator 480, the insulator 482, and the insulator 484are provided to cover the top surface and the side surface of theconductor 462 as illustrated in FIG. 65. Furthermore, the conductor 466is provided to cover the top surface and the side surface of theconductor 462 with the insulator 480, the insulator 482, and theinsulator 484 provided therebetween.

That is, a capacitance is formed also on the side surface of theconductor 462, so that a capacitance per projected area of a capacitorcan be increased. Thus, the semiconductor device can be reduced in area,highly integrated, and miniaturized.

An insulator 460 is provided over the conductor 466 and the insulator484. The insulator 460 can be formed using a material similar to thatused for forming the insulator 420. The insulator 460 covering thecapacitor 410 may function as a planarization film that covers aroughness thereunder.

The above is the description of the application example.

At least part of this embodiment can be implemented in combination withany of the other embodiments described in this specification asappropriate.

Embodiment 7

In this embodiment, a display device that includes the semiconductordevice of one embodiment of the present invention is described withreference to FIGS. 66A to 66C.

[Circuit Configuration of Display Device]

The display device illustrated in FIG. 66A includes a region includingpixels of display elements (hereinafter the region is referred to as apixel portion 502), a circuit portion being provided outside the pixelportion 502 and including a circuit for driving the pixels (hereinafterthe portion is referred to as a driver circuit portion 504), circuitseach having a function of protecting an element (hereinafter thecircuits are referred to as protection circuits 506), and a terminalportion 507. Note that the protection circuits 506 are not necessarilyprovided.

Part or the whole of the driver circuit portion 504 is preferably formedover a substrate over which the pixel portion 502 is formed. Thus, thenumber of components and the number of terminals can be reduced. Whenpart or the whole of the driver circuit portion 504 is not formed overthe substrate over which the pixel portion 502 is formed, the part orthe whole of the driver circuit portion 504 can be mounted by COG ortape automated bonding (TAB).

The pixel portion 502 includes a plurality of circuits for drivingdisplay elements arranged in X rows (X is a natural number of 2 or more)and Y columns (Y is a natural number of 2 or more) (hereinafter, suchcircuits are referred to as pixel circuits 501). The driver circuitportion 504 includes driver circuits such as a circuit for supplying asignal (scan signal) to select a pixel (hereinafter, the circuit isreferred to as a gate driver 504 a) and a circuit for supplying a signal(data signal) to drive a display element in a pixel (hereinafter, thecircuit is referred to as a source driver 504 b).

The gate driver 504 a includes a shift register or the like. The gatedriver 504 a receives a signal for driving, the shift register throughthe terminal portion 507 and outputs a signal. For example, the gatedriver 504 a receives a start pulse signal, a clock signal, or the likeand outputs a pulse signal. The gate driver 504 a has a function ofcontrolling the potentials of wirings supplied with scan signals(hereinafter, such wirings are referred to as scan lines GL_1 to GL_X).Note that a plurality of gate drivers 504 a may be provided to controlthe scan lines GL_1 to GL_X separately. Alternatively, the gate driver504 a has a function of supplying an initialization signal. Withoutbeing limited thereto, the gate driver 504 a can supply another signal.

The source driver 504 b includes a shift register or the like. Thesource driver 504 b receives a signal (image signal) from which a datasignal is derived, as well as a signal for driving the shift register,through the terminal portion 507. The source driver 504 b has a functionof generating a data signal to be written to the pixel circuit 501 whichis based on the image signal. In addition, the source driver 504 b has afunction of controlling output of a data signal in response to a pulsesignal produced by input of a start pulse signal, a clock signal, or thelike. Furthermore, the source driver 504 b has a function of controllingthe potentials of wirings supplied with data signals (hereinafter suchwirings are referred to as data lines DL_1 to DL_Y). Alternatively, thesource driver 504 b has a function of supplying an initializationsignal. Without being limited thereto, the source driver 504 b cansupply another signal.

The source driver 504 b includes a plurality of analog switches, forexample. The source driver 504 b can output, as the data signals,signals obtained by time-dividing the image signal by sequentiallyturning on the plurality of analog switches. The source driver 504 b mayinclude a shift register or the like.

A pulse signal and a data signal are input to each of the plurality ofpixel circuits 501 through one of the plurality of scan lines GLsupplied with scan signals and one of the plurality of data lines DLsupplied with data signals, respectively. Writing and holding of thedata signal to and in each of the plurality of pixel circuits 501 arecontrolled by the gate driver 504 a. For example, to the pixel circuit501 in the m-th row and the n-th column (m is a natural number of lessthan or equal to X, and n is a natural number of less than or equal toY), a pulse signal is input from the gate driver 504 a through the scanline GL_m, and a data signal is input from the source driver 504 bthrough the data line DL_n in accordance with the potential of the scanline GL_m.

The protection circuit 506 in FIG. 66A is connected to, for example, thescan line GL between the gate driver 504 a and the pixel circuit 501.Alternatively, the protection circuit 506 is connected to the data lineDL between the source driver 504 b and the pixel circuit 501.Alternatively, the protection circuit 506 can be connected to a wiringbetween the gate driver 504 a and the terminal portion 507.Alternatively, the protection circuit 506 can be connected to a wiringbetween the source driver 504 b and the terminal portion 507. Note thatthe terminal portion 507 means a portion having terminals for inputtingpower, control signals, and image signals to the display device fromexternal circuits.

The protection circuit 506 is a circuit that electrically connects awiring connected to the protection circuit to another wiring when apotential out of a certain range is applied to the wiring connected tothe protection circuit.

As shown in FIG. 66A, the protection circuits 506 are provided for thepixel portion 502 and the driver circuit portion 504, so that theresistance of the display device to overcurrent generated byelectrostatic discharge (ESD) or the like can be improved. Note that theconfiguration of the protection circuits 506 is not limited to that, andfor example, the protection circuit 506 may be configured to beconnected to the gate driver 504 a or the protection circuit 506 may beconfigured to be connected to the source driver 504 b. Alternatively,the protection circuit 506 may be configured to be connected to theterminal portion 507.

In FIG. 66A, an example in which the driver circuit portion 504 includesthe gate driver 504 a and the source driver 504 b is shown; however, thestructure is not limited thereto. For example, only the gate driver 504a may be formed and a separately prepared substrate where a sourcedriver circuit is formed (e.g., a driver circuit substrate formed with asingle crystal semiconductor film or a polycrystalline semiconductorfilm) may be mounted.

Each of the plurality of pixel circuits 501 in FIG. 66A can have thestructure illustrated in FIG. 66B, for example.

The pixel circuit 501 in FIG. 66B includes a liquid crystal element 570,a transistor 550, and a capacitor 560. As the transistor 550, any of thetransistors described in the above embodiment, for example, can be used.

The potential of one of a pair of electrodes of the liquid crystalelement 570 is set in accordance with the specifications of the pixelcircuit 501 as appropriate. The alignment state of the liquid crystalelement 570 depends on written data. A common potential may be suppliedto one of the pair of electrodes of the liquid crystal element 570included in each of the plurality of pixel circuits 501. Furthermore,the potential supplied to one of the pair of electrodes of the liquidcrystal element 570 in the pixel circuit 501 in one row may be differentfrom the potential supplied to one of the pair of electrodes of theliquid crystal element 570 in the pixel circuit 501 in another row.

As examples of a driving method of the display device including theliquid crystal element 570, any of the following modes can be given: aTN mode, an STN mode, a VA mode, an axially symmetric aligned micro-cell(ASM) mode, an optically compensated birefringence (OCB) mode, aferroelectric liquid crystal (FLC) mode, an antiferroelectric liquidcrystal (AFLC) mode, an MVA mode, a patterned vertical alignment (PVA)mode, an IPS mode, an FFS mode, a transverse bend alignment (TBA) mode,and the like. Other examples of the method of driving the display deviceinclude an electrically controlled birefringence (ECB) mode, apolymer-dispersed liquid crystal (PDLC) mode, a polymer network liquidcrystal (PNLC) mode, and a guest-host mode. A variety of liquid crystalelements and the driving methods thereof can be used.

In the pixel circuit 501 in the m-th row and the n-th column, one of asource electrode and a drain electrode of the transistor 550 iselectrically connected to the data line DL_n, and the other iselectrically connected to the other of the pair of electrodes of theliquid crystal element 570. A gate electrode of the transistor 550 iselectrically connected to the scan line GL_m. The transistor 550 has afunction of controlling whether to write a data signal by being turnedon or off.

One of a pair of electrodes of the capacitor 560 is electricallyconnected to a wiring to which a potential is supplied (hereinafterreferred to as a potential supply line VL), and the other iselectrically connected to the other of the pair of electrodes of theliquid crystal element 570. The potential of the potential supply lineVL is set in accordance with the specifications of the pixel circuit 501as appropriate. The capacitor 560 functions as a storage capacitor forstoring written data.

For example, in the display device including the pixel circuit 501 inFIG. 66B, the pixel circuits 501 are sequentially selected row by row bythe gate driver 504 a illustrated in FIG. 66A, whereby the transistors550 are turned on and a data signal is written.

When the transistors 550 are turned off, the pixel circuits 501 in whichthe data has been written are brought into a holding state. Thisoperation is sequentially performed row by row; thus, an image can bedisplayed.

Alternatively, each of the plurality of pixel circuits 501 in FIG. 66Acan have the structure illustrated in FIG. 66C, for example.

The pixel circuit 501 illustrated in FIG. 66C includes transistors 552and 554, a capacitor 562, and a light-emitting element 572. Any of thetransistors described in the above embodiment, for example, can be usedas one or both of the transistors 552 and 554.

One of a source electrode and a drain electrode of the transistor 552 iselectrically connected to a wiring to which a data signal is supplied(hereinafter referred to as a signal line DL_n). A gate electrode of thetransistor 552 is electrically connected to a wiring to which a gatesignal is supplied (hereinafter referred to as a scan line GL_m).

The transistor 552 has a function of controlling whether to write a datasignal by being turned on or off.

One of a pair of electrodes of the capacitor 562 is electricallyconnected to a wiring to which a potential is supplied (hereinafterreferred to as a potential supply line VL_a), and the other iselectrically connected to the other of the source electrode and thedrain electrode of the transistor 552.

The capacitor 562 functions as a storage capacitor for storing writtendata.

One of a source electrode and a drain electrode of the transistor 554 iselectrically connected to the potential supply line VL_a. Furthermore, agate electrode of the transistor 554 is electrically connected to theother of the source electrode and the drain electrode of the transistor552.

One of an anode and a cathode of the light-emitting element 572 iselectrically connected to a potential supply line VL_b, and the other iselectrically connected to the other of the source electrode and thedrain electrode of the transistor 554.

As the light-emitting element 572, an organic electroluminescent element(also referred to as an organic EL element) can be used, for example.Note that the light-emitting element 572 is not limited to an organic ELelement; an inorganic EL element including an inorganic material may beused.

Note that a high power supply potential VDD is supplied to one of thepotential supply line VL_a and the potential supply line VL_b, and a lowpower supply potential VSS is supplied to the other.

For example, in the display device including the pixel circuit 501 inFIG. 66C, the pixel circuits 501 are sequentially selected row by row bythe gate driver 504 a illustrated in FIG. 66A, whereby the transistor552 is turned on and a data signal is written.

When the transistor 552 is turned off, the pixel circuits 501 in whichthe data has been written are brought into a holding state. Furthermore,the amount of current flowing between the source electrode and the drainelectrode of the transistor 554 is controlled in accordance with thepotential of the written data signal. The light-emitting element 572emits light with luminance corresponding to the amount of flowingcurrent. This operation is sequentially performed row by row; thus, animage is displayed.

At least part of this embodiment can be implemented in combination withany of the other embodiments described in this specification asappropriate.

Embodiment 8

In this embodiment, circuit configuration examples to which thetransistors described in the above embodiments can be applied will bedescribed with reference to FIGS. 67A to 67C, FIGS. 68A to 68C, FIGS.69A and 69B, and FIGS. 70A and 70B.

[Configuration Example of Inverter Circuit]

FIG. 67A is a circuit diagram of an inverter which can be used for ashift register, a buffer, or the like included in the driver circuit. Aninverter 800 outputs a signal whose logic is inverted from the logic ofa signal supplied to an input terminal IN to an output terminal OUT. Theinverter 800 includes a plurality of OS transistors. A signal S_(BG) canswitch electrical characteristics of the OS transistors.

FIG. 67B illustrates an example of the inverter 800. The inverter 800includes OS transistors 810 and 820. The inverter 800 can be formedusing only n-channel transistors; thus, the inverter 800 can be formedat lower cost than an inverter formed using a complementary metal oxidesemiconductor (i.e., a CMOS inverter).

Note that the inverter 800 including the OS transistors can be providedover a CMOS circuit including Si transistors. Since the inverter 800 canbe provided so as to overlap with the CMOS circuit, no additional areais required for the inverter 800, and thus, an increase in the circuitarea can be suppressed.

Each of the OS transistors 810 and 820 includes a first gate functioningas a front gate, a second gate functioning as a back gate, a firstterminal functioning as one of a source and a drain, and a secondterminal functioning as the other of the source and the drain.

The first gate of the OS transistor 810 is connected to its secondterminal. The second gate of the OS transistor 810 is connected to awiring that supplies the signal SB. The first terminal of the OStransistor 810 is connected to a wiring which supplies a voltage VDD.The second terminal of the OS transistor 810 is connected to the outputterminal OUT.

The first gate of the OS transistor 820 is connected to the inputterminal IN. The second gate of the OS transistor 820 is connected tothe input terminal IN. The first terminal of the OS transistor 820 isconnected to the output terminal OUT. The second terminal of the OStransistor 820 is connected to a wiring which supplies a voltage VSS.

FIG. 67C is a timing chart illustrating the operation of the inverter800. The timing chart in FIG. 67C illustrates changes of a signalwaveform of the input terminal IN, a signal waveform of the outputterminal OUT, a signal waveform of the signal S_(BG), and the thresholdvoltage of the OS transistor 810.

The signal SB can be supplied to the second gate of the OS transistor810 to control the threshold voltage of the OS transistor 810.

The signal S_(BG) includes a voltage V_(BO) _(_) _(A) for shifting thethreshold voltage in the negative direction and a voltage V_(BO) _(_)_(B) for shifting the threshold voltage in the positive direction. Thethreshold voltage of the OS transistor 810 can be shifted in thenegative direction to be a threshold voltage V_(TH) _(_) _(A) when thevoltage V_(BO) _(_) _(A) is applied to the second gate. The thresholdvoltage of the OS transistor 810 can be shifted in the positivedirection to be a threshold voltage V_(TH) _(_) _(B) when the voltageV_(BG) _(_) _(B) is applied to the second gate.

To visualize the above description, FIG. 68A shows an Id−Vg curve, whichis one of indicators of the transistor's electrical characteristics.

When a high voltage such as the voltage V_(BG) _(_) _(A) is applied tothe second gate, the electrical characteristics of the OS transistor 810can be shifted to match a curve shown by a dashed line 840 in FIG. 68A.When a low voltage such as the voltage V_(BG) _(_) _(B) is applied tothe second gate, the electrical characteristics of the OS transistor 810can be shifted to match a curve shown by a solid line 841 in FIG. 68A.As shown in FIG. 68A, switching the signal S_(BG) between the voltageV_(BG) _(_) _(A) and the voltage V_(BG) _(_) _(B) enables the thresholdvoltage of the OS transistor 810 to be shifted in the positive directionor the negative direction.

The shift of the threshold voltage in the positive direction toward thethreshold voltage V_(TH) _(_) _(B) can make current less likely to flowin the OS transistor 810. FIG. 68B visualizes the state.

As illustrated in FIG. 68B, a current I_(B) that flows in the OStransistor 810 can be extremely low. Thus, when a signal supplied to theinput terminal IN is at a high level and the OS transistor 820 is on(ON), the voltage of the output terminal OUT can drop sharply.

Since a state in which a current is less likely to flow in the OStransistor 810 as illustrated in FIG. 68B can be obtained, a signalwaveform 831 of the output terminal in the timing chart in FIG. 67C canbe made steep. Shoot-through current between the wiring that suppliesthe voltage VDD and the wiring that supplies the voltage VSS can be low,leading to low-power operation.

The shift of the threshold voltage in the negative direction toward thethreshold voltage V_(TH) _(_) _(A) can make current flow easily in theOS transistor 810. FIG. 68C visualizes the state. As illustrated in FIG.68C, a current I_(A) flowing at this time can be higher than at leastthe current I_(B). Thus, when a signal supplied to the input terminal INis at a low level and the OS transistor 820 is off (OFF), the voltage ofthe output terminal OUT can be increased sharply. Since a state in whichcurrent is likely to flow in the OS transistor 810 as shown in FIG. 68Ccan be obtained, a signal waveform 832 of the output terminal in thetiming chart in FIG. 67C can be made steep.

Note that the threshold voltage of the OS transistor 810 is preferablycontrolled by the signal S_(BG) before the state of the OS transistor820 is switched, i.e., before Time T1 or T2. For example, as in FIG.67C, it is preferable that the threshold voltage of the OS transistor810 be switched from the threshold voltage V_(TH) _(_) _(A) to thethreshold voltage V_(TH) _(_) _(B) a before time T1 at which the levelof the signal supplied to the input terminal IN is switched to a highlevel. Moreover, as in FIG. 67C, it is preferable that the thresholdvoltage of the OS transistor 810 be switched from the threshold voltageV_(TH) _(_) _(B) to the threshold voltage V_(TH) _(_) _(A) before timeT2 at which the level of the signal supplied to the input terminal IN isswitched to a low level.

Although the timing chart in FIG. 67C shows the structure in which thelevel of the signal S_(BG) is switched in accordance with the signalsupplied to the input terminal IN, a different structure may be employedin which voltage for controlling the threshold voltage is held by thesecond gate of the OS transistor 810 in a floating state, for example.FIG. 69A illustrates an example of such a circuit configuration.

The circuit configuration in FIG. 69A is the same as that in FIG. 67B,except that an OS transistor 850 is added. A first terminal of the OStransistor 850 is connected to the second gate of the OS transistor 810.A second terminal of the OS transistor 850 is connected to a wiringwhich supplies the voltage V_(BG) _(_) _(B) (or the voltage V_(BG) _(_)_(A)). A first gate of the OS transistor 850 is connected to a wiringwhich supplies a signal S_(F). A second gate of the OS transistor 850 isconnected to the wiring which supplies the voltage V_(BG) _(_) _(B) (orthe voltage V_(BG) _(_) _(A)).

The operation with the circuit configuration in FIG. 69A will bedescribed with reference to a timing chart in FIG. 69B.

The voltage for controlling the threshold voltage of the OS transistor810 is supplied to the second gate of the OS transistor 810 before TimeT3 at which the level of the signal supplied to the input terminal IN ischanged to a high level. The signal S_(F) is set to a high level and theOS transistor 850 is turned on, so that the voltage V_(BG) _(_) _(B) forcontrolling the threshold voltage is supplied to a node N_(BG).

The OS transistor 850 is turned off after the voltage of the node N_(BG)becomes V_(BG) _(_) _(B). Since the off-state current of the OStransistor 850 is extremely low, the voltage V_(BO) _(_)B held by thenode N_(BO) can be retained while the OS transistor 850 remains off.Therefore, the number of times of operation of supplying the voltageV_(BG) _(_) _(B) to the second gate of the OS transistor 850 can bereduced and accordingly the power consumed to rewrite the voltage V_(BG)_(_) _(B) can be reduced.

Although FIGS. 67B and 69A illustrate the case where the voltage issupplied to the second gate of the OS transistor 810 by control from theoutside, a different configuration in which voltage for controlling thethreshold voltage is generated on the basis of the signal supplied tothe input terminal IN and supplied to the second gate of the OStransistor 810 may be employed, for example. FIG. 70A illustrates anexample of such a circuit structure.

The circuit configuration in FIG. 70A is the same as that in FIG. 67B,except that a CMOS inverter 860 is provided between the input terminalIN and the second gate of the OS transistor 810. An input terminal ofthe CMOS inverter 860 is connected to the input terminal IN. An outputterminal of the CMOS inverter 860 is connected to the second gate of theOS transistor 810.

The operation with the circuit structure in FIG. 70A will be describedwith reference to a timing chart in FIG. 70B. The timing chart in FIG.70B illustrates changes of a signal waveform of the input terminal IN, asignal waveform of the output terminal OUT, an output waveform IN_B ofthe CMOS inverter 860, and a threshold voltage of the OS transistor 810.

The output waveform IN_B which corresponds to a signal whose logic isinverted from the logic of the signal supplied to the input terminal INcan be used as a signal that controls the threshold voltage of the OStransistor 810. Therefore, the threshold voltage of the OS transistor810 can be controlled as described with reference to FIGS. 68A to 68C.For example, the signal supplied to the input terminal IN is at a highlevel and the OS transistor 820 is turned on at time T4 in FIG. 70B. Atthis time, the output waveform IN_B is at a low level. Accordingly,current can be made less likely to flow in the OS transistor 810; thus,the voltage of the output terminal OUT can be sharply decreased.

Moreover, the signal supplied to the input terminal IN is at a low leveland the OS transistor 820 is turned off at Time T5 in FIG. 70B. At thistime, the output waveform IN_B is at a high level. Accordingly, currentcan easily flow in the OS transistor 810; thus, a rise in the voltage ofthe output terminal OUT can be made steep.

As described above, in the structure of the inverter including the OStransistor in this embodiment, the voltage of the back gate is switchedin accordance with the logic of the signal supplied to the inputterminal IN. In such a structure, the threshold voltage of the OStransistor can be controlled. The control of the threshold voltage ofthe OS transistor by the signal supplied to the input terminal IN cancause a steep change in the voltage of the output terminal OUT.Moreover, shoot-through current between the wirings that supply powersupply voltages can be reduced. Thus, power consumption can be reduced.

At least part of this embodiment can be implemented in combination withany of the other embodiments described in this specification asappropriate.

Embodiment 9

In this embodiment, examples of a semiconductor device in which thetransistor including an oxide semiconductor (OS transistor) described inany of the above embodiments is used in a plurality of circuits will bedescribed with reference to FIGS. 71A to 71E, FIGS. 72A and 72B, FIGS.73A and 73B, and FIGS. 74A to 74C.

[Circuit Configuration Example of Semiconductor Device]

FIG. 71A is a block diagram of a semiconductor device 900. Thesemiconductor device 900 includes a power supply circuit 901, a circuit902, a voltage generation circuit 903, a circuit 904, a voltagegeneration circuit 905, and a circuit 906.

The power supply circuit 901 is a circuit that generates a voltageV_(ORG) used as a reference. The voltage V_(ORG) is not necessarily onevoltage and can be a plurality of voltages. The voltage V_(ORG) can begenerated on the basis of a voltage V₀ supplied from the outside of thesemiconductor device 900. The semiconductor device 900 can generate thevoltage V_(ORG) on the basis of one power supply voltage supplied fromthe outside. Thus, the semiconductor device 900 can operate withoutsupply of a plurality of power supply voltages from the outside.

The circuits 902, 904, and 906 operate with different power supplyvoltages. For example, the power supply voltage of the circuit 902 is avoltage applied on the basis of the voltage V_(ORG) and the voltageV_(SS) (V_(ORG)>V_(SS)). For example, the power supply voltage of thecircuit 904 is a voltage applied on the basis of the voltage V_(POG) andthe voltage V_(SS) (V_(POG)>V_(SS)). For example, the power supplyvoltages of the circuit 906 are voltages applied on the basis of thevoltage V_(ORG), the voltage V_(SS), and a voltage V_(NEG)(V_(ORG)>V_(SS)>V_(NEG)). When the voltage V_(SS) is equal to a groundpotential (GND), the kinds of voltages generated in the power supplycircuit 901 can be reduced.

The voltage generation circuit 903 is a circuit that generates thevoltage V_(POG). The voltage generation circuit 903 can generate thevoltage V_(POG) on the basis of the voltage V_(ORG) supplied from thepower supply circuit 901. Thus, the semiconductor device 900 includingthe circuit 904 can operate on the basis of one power supply voltagesupplied from the outside.

The voltage generation circuit 905 is a circuit that generates thevoltage V_(NEO). The voltage generation circuit 905 can generate thevoltage V_(NEG) on the basis of the voltage V_(ORG) supplied from thepower supply circuit 901. Thus, the semiconductor device 900 includingthe circuit 906 can operate on the basis of one power supply voltagesupplied from the outside.

FIG. 71B illustrates an example of the circuit 904 that operates withthe voltage V_(POG) and FIG. 71C illustrates an example of a waveform ofa signal for operating the circuit 904.

FIG. 71B illustrates a transistor 911. A signal supplied to a gate ofthe transistor 911 is generated on the basis of, for example, thevoltage V_(POG) and the voltage V_(SS). The signal is generated on thebasis of the voltage V_(POG) to turn on the transistor 911 and on thebasis of the voltage V_(SS) to turn off the transistor 911. Asillustrated in FIG. 71C, the voltage V_(POG) is higher than the voltageV_(ORG). Thus, a source (S) and a drain (D) of the transistor 911 can beelectrically connected to each other surely. As a result, the frequencyof malfunction of the circuit 904 can be reduced.

FIG. 71D illustrates an example of the circuit 906 that operates withthe voltage V_(NEO) and FIG. 71E illustrates an example of a waveform ofa signal for operating the circuit 906.

FIG. 71D illustrates a transistor 912 having a back gate. A signalsupplied to a gate of the transistor 912 is generated on the basis of,for example, the voltage V_(ORG) and the voltage V_(SS). The signal isgenerated on the basis of the voltage V_(ORG) to turn on the transistor912 and on the basis of the voltage V_(SS) to turn off the transistor912. A signal supplied to the back gate of the transistor 912 isgenerated on the basis of the voltage V_(NEG). As illustrated in FIG.71E, the voltage V_(NEG) is lower than the voltage V_(SS)(GND). Thus,the threshold voltage of the transistor 912 can be controlled to shiftin the positive direction. Thus, the transistor 912 can be surely turnedoff and the amount of current flowing between the source (S) and thedrain (D) can be small. As a result, the frequency of malfunction of thecircuit 906 can be reduced and the power consumption thereof can bereduced.

The voltage V_(NEG) may be directly supplied to the back gate of thetransistor 912. Alternatively, a signal supplied to the gate of thetransistor 912 may be generated on the basis of the voltage V_(ORG) andthe voltage V_(NEG) and the generated signal may also be supplied to theback gate of the transistor 912.

FIGS. 72A and 72B illustrate a modification example of FIGS. 71D and71E.

In a circuit diagram illustrated in FIG. 72A, a transistor 922 whoseconduction state can be controlled by a control circuit 921 is providedbetween the voltage generation circuit 905 and the circuit 906. Thetransistor 922 is an n-channel OS transistor. A control signal S_(BG)output from the control circuit 921 is a signal for controlling theconduction state of the transistor 922. Transistors 912A and 912Bincluded in the circuit 906 are OS transistors like the transistor 922.

A timing chart in FIG. 72B shows changes in the potential of the controlsignal S_(BG) and the potential of a node N_(BG). The potential of thenode N_(BG) indicates the states of potentials of back gates of thetransistors 912A and 912B. When the control signal S_(BG) is at a highlevel, the transistor 922 is turned on and the voltage of the nodeN_(BG) becomes the voltage V_(NEG). Then, when the control signal S_(BG)is at a low level, the node N_(BG) is brought into an electricallyfloating state. Since the transistor 922 is an OS transistor, itsoff-state current is small. Accordingly, even when the node N_(BG) is inan electrically floating state, the voltage V_(NEG) which has beensupplied can be held.

FIG. 73A illustrates an example of a circuit configuration applicable tothe above-described voltage generation circuit 903. The voltagegeneration circuit 903 illustrated in FIG. 73A is a five-stage chargepump including diodes D1 to D5, capacitors C1 to C5, and an inverterINV. A clock signal CLK is supplied to the capacitors C1 to C5 directlyor through the inverter INV. When the power supply voltage of theinverter INV is a voltage applied on the basis of the voltage V_(ORG)and the voltage V_(SS), the voltage V_(POG), which has been increased toa positive voltage having a positively quintupled value of the voltageV_(ORG) by application of the clock signal CLK, can be obtained. Notethat a forward voltage of the diodes D1 to D5 is 0 V. A desired voltageV_(POG) can be obtained when the number of stages of the charge pump ischanged.

FIG. 73B illustrates an example of a circuit configuration applicable tothe above-described voltage generation circuit 905. The voltagegeneration circuit 905 illustrated in FIG. 73B is a four-stage chargepump including the diodes D1 to D5, the capacitors C1 to C5, and theinverter INV. A clock signal CLK is supplied to the capacitors C1 to C5directly or through the inverter INV. When the power supply voltage ofthe inverter INV is a voltage applied on the basis of the voltageV_(ORG) and the voltage V_(SS), the voltage V_(NEO), which has beenreduced from the ground voltage, i.e., the voltage V_(SS) to a negativevoltage having a negatively quadrupled value of the voltage V_(ORG) byapplication of the clock signal CLK, can be obtained. Note that aforward voltage of the diodes D1 to D5 is 0 V. A desired voltage V_(NEG)can be obtained when the number of stages of the charge pump is changed.

The circuit configuration of the voltage generation circuit 903 is notlimited to the configuration in the circuit diagram illustrated in FIG.73A. Modification examples of the voltage generation circuit 903 areillustrated in FIGS. 74A to 74C. Note that further modification examplesof the voltage generation circuit 903 can be realized by changingvoltages supplied to wirings or arrangement of elements in voltagegeneration circuits 903A to 903C illustrated in FIGS. 74A to 74C.

A voltage generation circuit 903A illustrated in FIG. 74A includestransistors M1 to M10, capacitors C11 to C14, and an inverter INV1. Theclock signal CLK is supplied to gates of the transistors M1 to M10directly or through the inverter INV1. The voltage V_(POG) can beobtained by increasing the voltage V_(ORG) by a voltage four times thepotential difference between the voltage V_(ORG) and the voltage V_(SS)with the application of the clock signal CLK. A desired voltage V_(POG)can be obtained when the number of stages is changed. In the voltagegeneration circuit 903A in FIG. 74A, off-state current of each of thetransistors M1 to M10 can be low when the transistors M1 to M10 are OStransistors, and leakage of charge held in the capacitors C11 to C14 canbe suppressed. Accordingly, raising from the voltage V_(ORG) to thevoltage V_(POG) can be efficiently performed.

The voltage generation circuit 903B illustrated in FIG. 74B includestransistors M11 to M14, capacitors C15 and C16, and an inverter INV2.The clock signal CLK is supplied to gates of the transistors M11 to M14directly or through the inverter INV2. The voltage V_(POG) can beobtained by increasing the voltage V_(ORG) by a voltage twice thepotential difference between the voltage V_(ORG) and the voltage V_(SS)with the application of the clock signal CLK. In the voltage generationcircuit 903B in FIG. 74B, off-state current of each of the transistorsM11 to M14 can be low when the transistors M11 to M14 are OStransistors, and leakage of charge held in the capacitors C15 and C16can be suppressed. Accordingly, raising from the voltage V_(ORG) to thevoltage V_(POG) can be efficiently performed.

A voltage generation circuit 903C shown in FIG. 74C includes an inductorInd1, a transistor M15, a diode D6, and a capacitor C17. The conductionstate of the transistor M15 is controlled by a control signal EN. Owingto the control signal EN, the voltage V_(POG) which is obtained byincreasing the voltage V_(ORG) can be obtained. Since the voltagegeneration circuit 903C in FIG. 74C increases the voltage using theinductor Ind1, the voltage can be efficiently increased.

As described above, in any of the structures of this embodiment, avoltage required for circuits included in a semiconductor device can beinternally generated. Thus, in the semiconductor device, the number ofpower supply voltages supplied from the outside can be reduced.

At least part of this embodiment can be implemented in combination withany of the other embodiments described in this specification asappropriate.

Embodiment 10

In this embodiment, a display module and electronic devices, each ofwhich includes a semiconductor device of one embodiment of the presentinvention, will be described with reference to FIG. 75, FIGS. 76A to76E, FIGS. 77 to 77G, and FIGS. 78A and 78B.

[Display Module]

In a display module 7000 illustrated in FIG. 75, a touch panel 7004connected to an FPC 7003, a display panel 7006 connected to an FPC 7005,a backlight 7007, a frame 7009, a printed board 7010, and a battery 7011are provided between an upper cover 7001 and a lower cover 7002.

The semiconductor device of one embodiment of the present invention canbe used for the display panel 7006, for example.

The shapes and sizes of the upper cover 7001 and the lower cover 7002can be changed as appropriate in accordance with the sizes of the touchpanel 7004 and the display panel 7006.

The touch panel 7004 can be a resistive touch panel or a capacitivetouch panel and overlap with the display panel 7006. Alternatively, acounter substrate (sealing substrate) of the display panel 7006 can havea touch panel function. Alternatively, a photosensor may be provided ineach pixel of the display panel 7006 to form an optical touch panel.

The backlight 7007 includes a light source 7008. One embodiment of thepresent invention is not limited to the structure in FIG. 75, in whichthe light source 7008 is provided over the backlight 7007. For example,a structure in which the light source 7008 is provided at an end portionof the backlight 7007 and a light diffusion plate is further providedmay be employed. Note that the backlight 7007 need not be provided inthe case where a self-luminous light-emitting element such as an organicEL element is used or in the case where a reflective panel or the likeis employed.

The frame 7009 protects the display panel 7006 and functions as anelectromagnetic shield for blocking electromagnetic waves generated bythe operation of the printed board 7010. The frame 7009 may alsofunction as a radiator plate.

The printed board 7010 includes a power supply circuit and a signalprocessing circuit for outputting a video signal and a clock signal. Asa power source for supplying power to the power supply circuit, anexternal commercial power source or the separate battery 7011 may beused. The battery 7011 can be omitted in the case where a commercialpower source is used.

The display module 7000 may be additionally provided with a member suchas a polarizing plate, a retardation plate, or a prism sheet.

[Electronic Device 1]

Next, FIGS. 76A to 76E illustrate examples of electronic devices.

FIG. 76A is an external view of a camera 8000 to which a finder 8100 isattached.

The camera 8000 includes a housing 8001, a display portion 8002,operation buttons 8003, a shutter button 8004, and the like.Furthermore, an attachable lens 8006 is attached to the camera 8000.

Although the lens 8006 of the camera 8000 here is detachable from thehousing 8001 for replacement, the lens 8006 may be included in thehousing 8001.

Images can be taken with the camera 8000 at the press of the shutterbutton 8004. In addition, images can be taken at the touch of thedisplay portion 8002 which serves as a touch panel.

The housing 8001 of the camera 8000 includes a mount including anelectrode, so that the finder 8100, a stroboscope, or the like can beconnected to the housing 8001.

The finder 8100 includes a housing 8101, a display portion 8102, abutton 8103, and the like.

The housing 8101 includes a mount for engagement with the mount of thecamera 8000 so that the finder 8100 can be connected to the camera 8000.The mount includes an electrode, and an image or the like received fromthe camera 8000 through the electrode can be displayed on the displayportion 8102.

The button 8103 functions as a power supply button. With the button8103, the display portion 8102 can be turned on and off.

A display device of one embodiment of the present invention can be usedin the display portion 8002 of the camera 8000 and the display portion8102 of the finder 8100.

Although the camera 8000 and the finder 8100 are separate and detachableelectronic devices in FIG. 76A, the housing 8001 of the camera 8000 mayinclude a finder having a display device.

FIG. 76B is an external view of a head-mounted display 8200.

The head-mounted display 8200 includes a mounting portion 8201, a lens8202, a main body 8203, a display portion 8204, a cable 8205, and thelike. The mounting portion 8201 includes a battery 8206.

Power is supplied from the battery 8206 to the main body 8203 throughthe cable 8205. The main body 8203 includes a wireless receiver or thelike to receive video data, such as image data, and display it on thedisplay portion 8204. The movement of the eyeball and the eyelid of auser is captured by a camera in the main body 8203 and then coordinatesof the points the user looks at are calculated using the captured datato utilize the eye of the user as an input means.

The mounting portion 8201 may include a plurality of electrodes so as tobe in contact with the user. The main body 8203 may be configured tosense current flowing through the electrodes with the movement of theuser's eyeball to recognize the direction of his or her eyes. The mainbody 8203 may be configured to sense current flowing through theelectrodes to monitor the user's pulse. The mounting portion 8201 mayinclude sensors, such as a temperature sensor, a pressure sensor, or anacceleration sensor so that the user's biological information can bedisplayed on the display portion 8204. The main body 8203 may beconfigured to sense the movement of the user's head or the like to movean image displayed on the display portion 8204 in synchronization withthe movement of the user's head or the like.

The display device of one embodiment of the present invention can beused in the display portion 8204.

FIGS. 76C to 76E are external views of a head-mounted display 8300. Thehead-mounted display 8300 includes a housing 8301, a display portion8302, fixing bands 8304, and a pair of lenses 8305.

A user can see display on the display portion 8302 through the lenses8305. It is favorable that the display portion 8302 be curved. When thedisplay portion 8302 is curved, a user can feel high realistic sensationof images. Although the structure described in this embodiment as anexample has one display portion 8302, the number of display portions8302 provided is not limited to one. For example, two display portions8302 may be provided, in which case one display portion is provided forone corresponding user's eye, so that three-dimensional display usingparallax or the like is possible.

The display device of one embodiment of the present invention can beused in the display portion 8302. The display device including thesemiconductor device of one embodiment of the present invention has anextremely high resolution; thus, even when an image is magnified usingthe lenses 8305 as illustrated in FIG. 76E, the user does not perceivepixels, and thus a more realistic image can be displayed.

[Electronic Device 2]

Next, FIGS. 76A to 76E illustrate examples of electronic devices thatare different from those illustrated in FIGS. 77A to 77G.

Electronic devices illustrated in FIGS. 77A to 77G include a housing9000, a display portion 9001, a speaker 9003, an operation key 9005(including a power switch or an operation switch), a connection terminal9006, a sensor 9007 (a sensor having a function of measuring force,displacement, position, speed, acceleration, angular velocity,rotational frequency, distance, light, liquid, magnetism, temperature,chemical substance, sound, time, hardness, electric field, current,voltage, electric power, radiation, flow rate, humidity, gradient,oscillation, odor, or infrared ray), a microphone 9008, and the like.

The electronic devices illustrated in FIGS. 77A to 77G can have avariety of functions. For example, a function of displaying a lot ofinformation (e.g., a still image, a moving image, and a text image) on adisplay portion; a touch panel function; a function of displaying acalendar, date, time, and the like; a function of controlling processingwith a lot of software (programs); a wireless communication function; afunction of being connected to a variety of computer networks with awireless communication function; a function of transmitting andreceiving a lot of data with a wireless communication function; afunction of reading a program or data stored in a memory medium anddisplaying the program or data on a display portion. Note that functionswhich can be provided for the electronic devices illustrated in FIGS.77A to 77G are not limited them, and the electronic devices can have avariety of functions. Although not illustrated in FIGS. 77A to 77G, theelectronic devices may each have a plurality of display portions. Theelectronic devices may have a camera or the like and a function oftaking a still image, a function of taking a moving image, a function ofstoring the taken image in a memory medium (an external memory medium ora memory medium incorporated in the camera), a function of displayingthe taken image on the display portion, or the like.

The electronic devices illustrated in FIGS. 77A to 77G will be describedin detail below.

FIG. 77A is a perspective view illustrating a television device 9100.The television device 9100 can include the display portion 9001 having alarge screen size of, for example, 50 inches or more, or 100 inches ormore.

FIG. 77B is a perspective view of a portable information terminal 9101.The portable information terminal 9101 functions as, for example, one ormore of a telephone set, a notebook, an information browsing system, andthe like. Specifically, the portable information terminal can be used asa smartphone. Note that the portable information terminal 9101 mayinclude the speaker 9003, the connection terminal 9006, the sensor 9007,or the like. The portable information terminal 9101 can displaycharacters and image information on its plurality of surfaces. Forexample, three operation buttons 9050 (also referred to as operationicons, or simply, icons) can be displayed on one surface of the displayportion 9001. Furthermore, information 9051 indicated by dashedrectangles can be displayed on another surface of the display portion9001. Examples of the information 9051 include display indicatingreception of an incoming email, social networking service (SNS) message,call, and the like; the title and sender of an email and SNS message;the date; the time; remaining battery; and the reception strength of anantenna. Instead of the information 9051, the operation buttons 9050 orthe like may be displayed on the position where the information 9051 isdisplayed.

FIG. 77C is a perspective view of a portable information terminal 9102.The portable information terminal 9102 has a function of displayinginformation on three or more surfaces of the display portion 9001. Here,information 9052, information 9053, and information 9054 are displayedon different surfaces. For example, a user of the portable informationterminal 9102 can see the display (here, the information 9053) with theportable information terminal 9102 put in a breast pocket of his/herclothes. Specifically, a caller's phone number, name, or the like of anincoming call is displayed in a position that can be seen from above theportable information terminal 9102. Thus, the user can see the displaywithout taking out the portable information terminal 9102 from thepocket and decide whether to answer the call.

FIG. 77D is a perspective view illustrating a wrist-watch-type portableinformation terminal 9200. The portable information terminal 9200 iscapable of executing a variety of applications such as mobile phonecalls, e-mailing, viewing and editing texts, music reproduction,Internet communication, and computer games. The display surface of thedisplay portion 9001 is bent, and images can be displayed on the bentdisplay surface. The portable information terminal 9200 can employ nearfield communication that is a communication method based on an existingcommunication standard. In that case, for example, mutual communicationbetween the portable information terminal and a headset capable ofwireless communication can be performed, and thus hands-free calling ispossible. The portable information terminal 9200 includes the connectionterminal 9006, and data can be directly transmitted to and received fromanother information terminal via a connector. Power charging through theconnection terminal 9006 is possible. Note that the charging operationmay be performed by wireless power feeding without using the connectionterminal 9006.

FIGS. 77E to 77G are perspective views of a foldable portableinformation terminal 9201. FIG. 77E is a perspective view of thefoldable portable information terminal 9201 that is opened. FIG. 77F isa perspective view of the foldable portable information terminal 9201that is being opened or being folded. FIG. 77G is a perspective view ofthe foldable portable information terminal 9201 that is folded. When theportable information terminal 9201 is opened, a seamless large displayregion is highly browsable. The display portion 9001 of the portableinformation terminal 9201 is supported by three housings 9000 joinedtogether by hinges 9055. By folding the portable information terminal9201 at a connection portion between two housings 9000 with the hinges9055, the portable information terminal 9201 can be reversibly changedin shape from an opened state to a folded state. For example, theportable information terminal 9201 can be bent with a radius ofcurvature of greater than or equal to 1 mm and less than or equal to 150mm.

Next, FIGS. 78A and 78B illustrate examples of electronic devices thatare different from those illustrated in FIGS. 76A to 76E and FIGS. 77Ato 77G. FIGS. 78A and 78B are perspective views of a display deviceincluding a plurality of display panels. Note that the plurality ofdisplay panels are wound in the perspective view in FIG. 78A and areunwound in the perspective view in FIG. 78B.

A display device 9500 illustrated in FIGS. 78A and 78B includes aplurality of display panels 9501, a hinge 9511, and a bearing 9512. Theplurality of display panels 9501 each includes a display region 9502 anda light-transmitting region 9503.

Each of the plurality of display panels 9501 is flexible. Two adjacentdisplay panels 9501 are provided so as to partly overlap with eachother. For example, the light-transmitting regions 9503 of the twoadjacent display panels 9501 can be overlapped each other. A displaydevice having a large screen can be obtained with the plurality ofdisplay panels 9501. The display device is highly versatile because thedisplay panels 9501 can be wound depending on its use.

Moreover, although the display regions 9502 of the adjacent displaypanels 9501 are separated from each other in FIGS. 78A and 78B, withoutlimitation to this structure, the display regions 9502 of the adjacentdisplay panels 9501 may overlap with each other without any space sothat a continuous display region 9502 is obtained, for example.

The electronic devices described in this embodiment each include thedisplay portion for displaying some sort of data. Note that thesemiconductor device of one embodiment of the present invention can alsobe used for an electronic device that does not have a display portion.

At least part of this embodiment can be implemented in combination withany of the other embodiments described in this specification asappropriate.

EXPLANATION OF REFERENCE

100: transistor, 100A: transistor, 100B: transistor, 100C: transistor,100D: transistor, 100E: transistor, 100F: transistor, 1000: transistor,100H: transistor, 100J: transistor, 100K: transistor, 102: substrate,104: insulating film, 106: conductive film, 108: oxide semiconductorfilm, 108_1: oxide semiconductor film, 108_2: oxide semiconductor film,108_3: oxide semiconductor film, 108 d: drain region, 108 f: regions,108 i: channel region, 108 s: source region, 110: insulating film, 110 ainsulating film, 112: conductive film, 112_1: conductive film, 112_2:conductive film, 114: insulating film, 116: insulating film, 118:insulating film, 120 a: conductive film, 120 b: conductive film, 122:insulating film, 141 a: opening, 141 b: opening, 143: opening, 200:transistor, 205: conductor, 205 a: conductor, 205 b: conductor, 210:insulator, 212: insulator, 214: insulator, 216: insulator, 218:conductor, 220: insulator, 222: insulator, 224: insulator, 230: oxidesemiconductor, 230 a: oxide semiconductor, 230 b: oxide semiconductor,230 c: oxide semiconductor, 240 a: conductor, 240 b: conductor, 244:conductor, 245: conductor, 250: insulator, 260: conductor, 260 a:conductor, 260 b: conductor, 270: insulator, 280: insulator, 282:insulator, 284: insulator, 300A: transistor, 300B: transistor, 300C:transistor, 300D: transistor, 300E: transistor, 300F: transistor, 300G:transistor, 302: substrate, 304: conductive film, 306: insulating film,307: insulating film, 308: oxide semiconductor film, 308_1: oxidesemiconductor film, 308_2: oxide semiconductor film, 308_3: oxidesemiconductor film, 312 a: conductive film, 312 b: conductive film, 312c: conductive film, 314: insulating film, 316: insulating film, 318:insulating film, 319: insulating film, 320 a: conductive film, 320 b:conductive film, 330D: transistor, 341 a: opening, 341 b: opening, 342:opening, 342 a: opening, 342 b: opening, 342 c: opening, 344: conductivefilm, 351: opening, 352 a: opening, 352 b: opening, 400: transistor,401: substrate, 402: semiconductor region, 404: insulator, 406:conductor, 408 a: low-resistance region, 408 b: low-resistance region,410: capacitor, 420: insulator, 422: insulator, 424: insulator, 426:insulator, 428: conductor, 430: conductor, 450: insulator, 452:insulator, 454: insulator, 456: conductor, 458: insulator, 460:insulator, 462: conductor, 466: conductor, 470: insulator, 474:conductor, 480: insulator, 482: insulator, 484: insulator, 501: pixelcircuit, 502: pixel portion, 504: driver circuit portion, 504 a: gatedriver, 504 b: source driver, 506: protection circuit, 507: terminalportion, 550: transistor, 552: transistor, 554: transistor, 560:capacitor, 562: capacitor, 570: liquid crystal element, 572:light-emitting element, 664: electrode, 665: electrode, 667: electrode,700: display device, 701: substrate, 702: pixel portion, 704: sourcedriver circuit portion, 705: substrate, 706: gate driver circuitportion, 708: terminal portion, 710: signal line, 711: lead wiringportion, 712: sealant, 716: FPC, 730: insulating film, 732: sealingfilm, 734: insulating film, 736: coloring film, 738: light-blockingfilm, 750: transistor, 752: transistor, 760: connection electrode, 770:planarization insulating film, 772: conductive film, 773: insulatingfilm, 774: conductive film, 775: liquid crystal element, 776: liquidcrystal layer, 778: structure body, 780: anisotropic conductive film,782: light-emitting element, 783: droplet discharge apparatus, 784:droplet, 785: layer, 786: EL layer, 788: conductive film, 790:capacitor, 791: touch panel, 792: insulating film, 793: electrode, 794:electrode, 795: insulating film, 796: electrode, 797: insulating film,800: inverter, 810: OS transistor, 820: OS transistor, 831: signalwaveform, 832: signal waveform, 840: dashed line, 841: solid line, 850:OS transistor, 860: CMOS inverter, 900: semiconductor device, 901: powersupply circuit, 902: circuit, 903: voltage generation circuit, 903A:voltage generation circuit, 903B: voltage generation circuit, 903C:voltage generation circuit, 904: circuit, 905: voltage generationcircuit, 906: circuit, 911: transistor, 912: transistor, 912A:transistor, 912B: transistor, 921: control circuit, 922: transistor,950: transistor, 952: substrate, 954: insulating film, 956:semiconductor film, 958: insulating film, 960: conductive film, 962:insulating film, 964: insulating film, 966 a: conductive film, 966 b:conductive film, 968: insulating film, 970: insulating film, 972:insulating film, 1400: droplet discharge apparatus, 1402: substrate,1403: droplet discharge means, 1404: imaging means, 1405: head, 1406:dotted line, 1407: control means, 1408: storage medium, 1409: imageprocessing means, 1410: computer, 1411: marker, 1412: head, 1413:material supply source, 1414: material supply source, 7000: displaymodule, 7001: upper cover, 7002: lower cover, 7003: FPC, 7004: touchpanel, 7005: FPC, 7006: display panel, 7007: backlight, 7008: lightsource, 7009: frame, 7010: printed board, 7011: battery, 8000: camera,8001: housing, 8002: display portion, 8003: operation buttons, 8004:shutter button, 8006: lens, 8100: finder, 8101: housing, 8102: displayportion, 8103: button, 8200: head-mounted display, 8201: mountingportion, 8202: lens, 8203: main body, 8204: display portion, 8205:cable, 8206: battery, 8300: head-mounted display, 8301: housing, 8302:display portion, 8304: fixing bands, 8305: lenses, 9000: housing, 9001:display portion, 9003: speaker, 9005: operation key, 9006: connectionterminal, 9007: sensor, 9008: microphone, 9050: operation buttons, 9051:information, 9052: information, 9053: information, 9054: information,9055: hinges, 9100: television device, 9101: portable informationterminal, 9102: portable information terminal, 9200: portableinformation terminal, 9201: portable information terminal, 9500: displaydevice, 9501: display panels, 9502: display region, 9503: region, 9511:hinge, 9512: bearing.

This application is based on Japanese Patent Application serial No.2015-257710 filed with Japan Patent Office on Dec. 29, 2015 and JapanesePatent Application serial No. 2016-125478 filed with Japan Patent Officeon Jun. 24, 2016, the entire contents of which are hereby incorporatedby reference.

1. A metal oxide film comprising: indium;

which is Al, Ga, Y, or Sn; and zinc, wherein a plurality of crystalparts is observed in a transmission electron microscope image in adirection perpendicular to a surface of the metal oxide film, andwherein a proportion of a region other than the plurality of crystalparts is higher than or equal to 20% and lower than or equal to 60%. 2.The metal oxide film according to claim 1, wherein the plurality ofcrystal parts has a higher proportion of crystal parts in which c-axesare aligned in a thickness direction than crystal parts aligned in otherdirections.
 3. The metal oxide film according claim 1, wherein in asecond image obtained in such a manner that a first image that is animage obtained by subjecting a cross-sectional TEM image to fast Fouriertransform is subjected to inverse fast Fourier transform after masktreatment by which a periodic region remains, the proportion of theremaining area subtracted from an original image is more than or equalto 20% and less than 60%.
 4. The metal oxide film according to claim 1,wherein when electron diffraction with a probe diameter of 50 nm or moreis performed on a slice of the metal oxide film having a thickness ofgreater than or equal to 10 nm and less than or equal to 50 nm in thedirection perpendicular to its cross section, a first electrondiffraction pattern that includes a ring-like diffraction pattern andtwo first spots overlapping with the ring-like diffraction pattern isobserved, and wherein when electron diffraction with a probe diameter ofgreater than or equal to 0.3 nm and less than or equal to 5 nm isperformed thereon, a second electron diffraction pattern that includesthe two first spots and a plurality of second spots distributed in acircumferential direction is observed.
 5. The metal oxide film accordingto claim 4, wherein the two first spots are symmetric with respect to acenter, wherein an angle between a first straight line and the directionof a normal vector of the surface of the metal oxide film is more thanor equal to 00 and less than or equal to 100, and wherein the firststraight line passes through the center and a point at which a luminanceof the two first spots is the highest.
 6. The metal oxide film accordingto claim 5, wherein in the first electron diffraction pattern, theluminance of the ring-like diffraction pattern is lower than that of thetwo first spots at a point of intersection of the ring-like diffractionpattern and a second straight line that intersects with the firststraight line.
 7. The metal oxide film according to claim 6, wherein theluminance of the two first spots is greater than 1 time and less than orequal to 9 times the luminance of the ring-like diffraction pattern atthe point of intersection of the ring-like diffraction pattern and thesecond straight line.
 8. A semiconductor device comprising: a transistorcomprising a semiconductor layer comprising a metal oxide film, whereinthe metal oxide film comprises indium,

which is Al, Ga, Y, or Sn, and zinc, wherein a plurality of crystalparts is observed in a transmission electron microscope image in adirection perpendicular to a surface of the metal oxide film, andwherein a proportion of a region other than the plurality of crystalparts is higher than or equal to 20% and lower than or equal to 60%. 9.A semiconductor device comprising: a transistor comprising asemiconductor layer comprising a metal oxide film, wherein the metaloxide film comprises indium,

which is Al, Ga, Y, or Sn, and zinc, wherein a plurality of crystalparts is observed in a transmission electron microscope image in adirection perpendicular to a surface of the metal oxide film, wherein aproportion of a region other than the plurality of crystal parts ishigher than or equal to 20% and lower than or equal to 60%, and whereinthe plurality of crystal parts has a higher proportion of crystal partsin which c-axes are aligned in a thickness direction than crystal partsaligned in other directions.